WO2025100438A1 - Procédé de production d'une feuille mince d'alliage à base de fe-ni, et feuille mince d'alliage à base de fe-ni - Google Patents

Procédé de production d'une feuille mince d'alliage à base de fe-ni, et feuille mince d'alliage à base de fe-ni Download PDF

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Publication number
WO2025100438A1
WO2025100438A1 PCT/JP2024/039415 JP2024039415W WO2025100438A1 WO 2025100438 A1 WO2025100438 A1 WO 2025100438A1 JP 2024039415 W JP2024039415 W JP 2024039415W WO 2025100438 A1 WO2025100438 A1 WO 2025100438A1
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Prior art keywords
thin plate
less
cold rolling
alloy thin
thin sheet
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PCT/JP2024/039415
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English (en)
Japanese (ja)
Inventor
行隆 水谷
信隆 安田
莉子 早見
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Proterial Ltd
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Proterial Ltd
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Classifications

    • C—CHEMISTRY; METALLURGY
    • C21—METALLURGY OF IRON
    • C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D9/00—Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor
    • C21D9/46—Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor for sheet metals
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C19/00—Alloys based on nickel or cobalt
    • C22C19/03—Alloys based on nickel or cobalt based on nickel
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C38/00—Ferrous alloys, e.g. steel alloys
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C38/00—Ferrous alloys, e.g. steel alloys
    • C22C38/08—Ferrous alloys, e.g. steel alloys containing nickel
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22F—CHANGING THE PHYSICAL STRUCTURE OF NON-FERROUS METALS AND NON-FERROUS ALLOYS
    • C22F1/00—Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working
    • C22F1/10—Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working of nickel or cobalt or alloys based thereon
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22F—CHANGING THE PHYSICAL STRUCTURE OF NON-FERROUS METALS AND NON-FERROUS ALLOYS
    • C22F1/00—Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working

Definitions

  • the present invention relates to a method for producing thin Fe-Ni alloy sheets and thin Fe-Ni alloy sheets.
  • Patent Document 1 discloses a method for manufacturing an Fe-Ni alloy containing 32 to 38 wt % of Ni by cold rolling, correcting the shape by applying a strain of 0.4 to 3%, and then performing strain relief annealing under conditions of a sheet temperature of 550 to 690° C. and a tension of 2 kgf/mm 2 or less, to produce an Fe-Ni low thermal expansion alloy thin plate having excellent sheet shape and thermal contraction resistance.
  • Patent Document 2 discloses a method for producing a low thermal expansion alloy thin plate, in which a hot-rolled material is subjected to cold rolling and annealing at least once each, and the cold rolling rate before final recrystallization annealing is set to 90% or more, the annealing temperature of the final recrystallization annealing is set to 850° C. or more, and the final cold rolling rate is set to 30% or less, in order to improve the etching rate and etching accuracy of the Fe—Ni—Co-based low thermal expansion alloy thin plate.
  • Patent Document 3 the applicant of the present application has proposed an Fe-Ni alloy thin plate having a thickness of 0.5 mm or less, which has a finish cold rolling process in which a cold rolling material is subjected to finish cold rolling at a rolling reduction rate of 5% to 50% to produce a thin plate, a final annealing process in which the thin plate after the finish cold rolling is annealed at a temperature of 800°C to 1000°C, and a tensile stress imparting process in which the thin plate after the final annealing process is subjected to shape correction under tension conditions of 200 to 400 MPa to impart tensile stress.
  • the Fe-Ni thin plates that are the raw materials for these products are required to have a wide width, high flatness of the etched surface, and suppression of warping after etching.
  • shape correction using a roller leveler or tension leveler has been effective in the past, but the residual stress imparted to the thin plate during shape correction is released during etching, causing warping, which becomes a problem.
  • stress relief annealing is known, in which the thin plate is annealed at a temperature that does not reach the recrystallization temperature to remove the distortion.
  • Patent Document 1 is an invention that can improve heat shrinkage resistance and flatness, but does not take into consideration the suppression of warping that occurs when half etching is performed on a wide thin plate, and there is still room for consideration.
  • Patent Document 2 is an invention that can increase the (200) plane density of the rolled surface and improve etching accuracy, but there is no description of suppressing warping in processes after finish rolling, leaving room for further study on suppressing warping and improving flatness.
  • Patent Document 3 is an excellent invention that can achieve both good flatness and excellent resistance to etching warpage.
  • a metal mask since highly accurate pattern formation is required, half etching is performed on the material for the metal mask to various depths in the thickness direction.
  • the deeper the etching the greater the concern about warpage due to the influence of residual stress. Therefore, there is a demand for a material that is less susceptible to deformation such as warpage even when half etching is performed to various depths.
  • An object of the present invention is to provide a method for producing an Fe-Ni alloy thin plate having a thickness of 0.5 mm or less, which has better flatness and etching warpage resistance.
  • One aspect of the present invention is a method for producing an Fe-Ni-based alloy thin plate, which includes a finish cold rolling process in which a cold rolling material containing, by mass%, C: ⁇ 0.01%, Si: ⁇ 0.5%, Mn: ⁇ 1.0%, Ni: 28 to 52%, with the balance being Fe and unavoidable impurities, is subjected to a finish cold rolling reduction of 5% to 50% to obtain a thin plate, a recrystallization annealing process in which the thin plate after the finish cold rolling is annealed at a temperature of 800° C.
  • a tensile stress imparting process in which the thin plate after the recrystallization annealing process is subjected to shape correction under a tension of 200 to 600 MPa to impart tensile stress
  • a strain relief annealing process in which strain relief annealing is performed at a temperature of 400° C. to 750° C. on the thin plate after the tensile stress imparting process, thereby obtaining an Fe-Ni-based alloy thin plate having a thickness of 0.5 mm or less.
  • Another aspect of the present invention is an Fe-Ni based alloy thin plate having a thickness of 0.5 mm or less, containing, by mass%, C: ⁇ 0.01%, Si: ⁇ 0.5%, Mn: ⁇ 1.0%, Ni: 28-52%, with the balance being Fe and unavoidable impurities, wherein a sample having a length of 150 mm and a width of 30 mm is cut out from the Fe-Ni based alloy thin plate, the sample is etched from one side, and when 1 ⁇ 2 of the plate thickness of the sample is removed, the amount of warping is 10 mm or less, and the maximum floating height of the Fe-Ni based alloy thin plate over a length of 800 mm is 1.5 mm or less.
  • the present invention provides an Fe-Ni alloy thin plate having a thickness of 0.5 mm or less that is capable of achieving both good flatness and etching warpage resistance.
  • the invention proposed by the applicant of the present application and shown in Patent Document 3 is capable of achieving both good flatness and excellent resistance to etching warpage, and based on this, the present applicant has found optimal manufacturing conditions that can achieve both good flatness and excellent resistance to etching warpage.
  • the manufacturing method of the Fe-Ni alloy thin plate of the present invention is explained below.
  • a hot-rolled material is prepared having a composition containing, by mass%, C: ⁇ 0.01%, Si: ⁇ 0.5%, Mn: ⁇ 1.0%, Ni: 28-52%, and the balance being Fe and unavoidable impurities.
  • the hot-rolled material of the Fe-Ni alloy thin plate having the composition specified in the present invention has a composition necessary to obtain a desired thermal expansion coefficient.
  • the reasons for specifying the above-mentioned composition range are as follows. [C: ⁇ 0.01% by mass] C is an element that affects etching properties. If C is contained in an excessive amount, it inhibits etching properties, so the upper limit of C is set to 0.01%. The lower limit may be 0%, but since C is contained in no small amount in the manufacturing process, there is no particular limitation.
  • Si and Mn are usually used for the purpose of deoxidization, and are contained in Fe-Ni alloys in trace amounts, but if contained in excess, they are likely to cause segregation, so the Si content is set to 0.5% or less and the Mn content to 1.0% or less.
  • the preferred Si and Mn contents are 0.1% or less and 0.5% or less.
  • Ni is an element that adjusts the thermal expansion coefficient and has a large effect on low thermal expansion properties.
  • the content is less than 28% or more than 52%, the effect of reducing the thermal expansion coefficient is lost, so the Ni range is 28-52%.
  • the preferred lower limit of the Ni content is 30%, the more preferred lower limit of the Ni content is 32%, and the even more preferred lower limit of the Ni content is 34%.
  • the preferred upper limit of the Ni content is 50%, the more preferred upper limit of the Ni content is 45%, and the even more preferred upper limit of the Ni content is 38%.
  • the rest of the above is Fe and unavoidable impurities.
  • a part of Ni can be replaced with Co.
  • a strip-shaped cold rolling material having the above-mentioned composition is prepared.
  • This cold rolling material can be obtained, for example, by mechanically or chemically removing an oxide layer from a hot rolled material having the above-mentioned composition.
  • the edges of the cold rolled material may be trimmed to prevent defects such as cracks from occurring at the edges during cold rolling. If necessary, a homogenization heat treatment may be performed at about 1200°C before cold rolling.
  • intermediate cold rollings may be performed to adjust the plate thickness before the finish cold rolling described later.
  • intermediate cold rolling may be omitted.
  • intermediate annealing may be performed on the thin plate after intermediate cold rolling to soften the work-hardened material and remove processing strain.
  • the temperature of this intermediate annealing may be set to a temperature of 800 ° C or more at which recrystallization is promoted. If the temperature during annealing is less than 800 ° C, the material may not be sufficiently softened and the desired characteristics may not be obtained.
  • the upper limit of the annealing temperature is not particularly limited, but if the temperature is raised too much, it is highly likely that the desired characteristics will not be obtained, so it can be set to about 1100 ° C.
  • the heating retention time at this time may be appropriately adjusted according to the composition and plate thickness of the material.
  • this intermediate annealing can be performed by continuously passing the thin plate after intermediate cold rolling through a heating furnace set to the desired temperature. For example, the sheet after intermediate cold rolling may be pulled out from the rolled state, passed through a heating furnace, and wound into a roll.
  • the intermediate material after the intermediate cold rolling or intermediate annealing is subjected to a finish cold rolling with a rolling reduction of 5% to 50% to obtain a thin plate.
  • a rolling reduction within the range of the above-mentioned rolling reduction, the difference in elongation between the center and end of the intermediate material is reduced, thereby suppressing the occurrence of excessively corrugated shapes, and it is possible to easily adjust the shape to a flat shape after the shape correction process described below.
  • the rolling reduction is less than 5%, intermediate elongation occurs, and the flatness of the center of the thin plate after shape correction tends to decrease.
  • the rolling reduction when the rolling reduction is less than 5%, the recrystallization of the thin plate tends to be excessively promoted in the recrystallization heat treatment described below, and the hardness of the thin plate tends to decrease.
  • the rolling reduction is more than 50%, the end waves become stronger, and the flatness tends to decrease after shape correction.
  • the preferable lower limit of the rolling reduction is 15%, and the more preferable lower limit of the rolling reduction is 20%.
  • the preferable upper limit of the rolling reduction is 40%, and the more preferable upper limit of the rolling reduction is 30%.
  • the number of passes of the finish cold rolling is preferably one pass.
  • the manufacturing method of this embodiment can be applied to thin plates having a width of 300 to 1100 mm.
  • a recrystallization annealing process is performed on a thin plate (finish cold-rolled thin plate) that has been subjected to finish cold rolling, in which annealing is performed at a temperature of 800°C to 1000°C.
  • This process sufficiently reduces the yield strength of the plate while removing the processing strain caused by rolling, making it easier to improve the flatness in the tensile stress application process described later.
  • the temperature during recrystallization annealing is less than 800°C, the processing strain cannot be sufficiently removed, and if the temperature is more than 1000°C, the hardness of the thin plate tends to decrease too much, which is not preferable.
  • the lower limit of the preferred recrystallization annealing temperature is 850°C
  • the upper limit of the preferred recrystallization annealing temperature is 950°C.
  • the preferable lower limit of the tension is 250 MPa
  • the preferable upper limit of the tension is 500 MPa
  • the more preferable upper limit of the tension is 450 MPa
  • the even more preferable upper limit of the tension is 400 MPa.
  • a stress relief annealing process is performed on the thin plate (shape-corrected thin plate) after the tensile stress imparting process, in which annealing is performed at a temperature of 400°C to 750°C, to obtain the Fe-Ni alloy thin plate of the present invention.
  • this "strain relief annealing process" which is not disclosed in Patent Document 3 is essential.
  • the tensile stress imparting process of the present invention is a process that imparts bending stress to the plate as little as possible, but since the stress difference between the plate surface layer and the plate thickness center portion still remains, there is a risk that the above-mentioned residual stress will be released when deep etching is performed, and excessive warping will occur.
  • the above-mentioned stress relief annealing process by performing the above-mentioned stress relief annealing process, it is possible to obtain an Fe-Ni alloy thin plate that can eliminate the residual stress difference of the plate generated by the tensile stress imparting process and suppress the warping caused by etching while having excellent flatness.
  • the lower limit of the preferable stress relief annealing temperature is 500°C
  • the upper limit of the preferable stress relief annealing temperature is 700°C.
  • the thin plate for Fe-Ni alloy of this embodiment is characterized in that when cut into a sample size of 150 mm in the length direction (rolling direction) and 30 mm in the width direction (direction perpendicular to rolling), the amount of warping when 1/2 of the plate thickness of the sample is removed is 10 mm or less.
  • the thin plate of this embodiment has reduced residual stress at the center of the plate thickness, and even if etching is performed to the depth of the center of the plate thickness where the balance of stress is more disturbed, it is possible to suppress deformation of the plate material, and it is possible to ensure shape accuracy while proceeding with etching processing well.
  • the amount of warping when 1/2 of the plate thickness is removed is 10 mm or less, which is more likely to be affected by warping than when 1/3 of the plate thickness is removed as described in Patent Document 3, it can be considered that the residual strain at the complex shape and deep cross-sectional position is also released, and it is suitable as a material for performing various etching.
  • a more preferable upper limit of the amount of warping is 7 mm, and an even more preferable upper limit of the amount of warping is 5 mm.
  • the sample is cut so that the longitudinal direction is the rolling direction to prepare a cut sample with a length of 150 mm and a width of 30 mm, and 1/2 of the plate thickness is removed from one side by etching.
  • one end (upper end) of the cut sample in the longitudinal direction is hung in contact with a vertical platen, and the horizontal distance between the other end (lower end) of the cut sample that is separated from the vertical platen due to warping and the vertical platen is measured as the amount of warping.
  • the case where the etched surface warps to the concave side is considered to be a "+" warp
  • the case where the etched surface warps to the convex side is considered to be a "-" warp.
  • the amount of warping is evaluated as an absolute value, and the smaller the absolute value, the more preferable it is.
  • the amount of warping when 1/2 of the plate thickness of the sample is removed is 10 mm or less (more preferably 7 mm or less, and even more preferably 5 mm or less).
  • the Fe-Ni alloy thin plate of this embodiment can also have a lower maximum floating height at a length of 800 mm than conventional products. Specifically, the maximum floating height is 1.5 mm or less when the length of the Fe-Ni alloy thin plate is 800 mm.
  • the thin plate obtained by carrying out the manufacturing method of the present invention described above has excellent flatness even in a wide thin plate material having a width of 800 mm or more (preferably 900 mm or more, more preferably 1000 mm or more), and tends to exhibit effects such as improved dimensional accuracy in etching processing.
  • a more preferable maximum floating height value is 1.2 mm or less, and a further more preferable maximum floating height value is 1.0 mm or less.
  • the lower limit of the maximum floating height may be set to, for example, about 0.1 mm.
  • the floating height can be measured by cutting the thin plate to a length of 800 mm, placing it on a horizontal platen, and measuring the floating height of the thin plate using a laser displacement meter or the like.
  • the Fe-Ni alloy thin plate of the present embodiment preferably has a maximum steepness of 0.7% or less at a length of 800 mm.
  • the Fe-Ni alloy thin plate of the present invention that satisfies this provision has a better flatness.
  • a more preferable value of the maximum steepness is 0.5% or less, and an even more preferable value of the maximum steepness is 0.3% or less.
  • the lower limit of the maximum steepness is not particularly limited, but since it is extremely difficult to manufacture a completely flat shape, as with the floating height, the lower limit of the maximum steepness may be, for example, about 0.01%.
  • the steepness can be measured by calculating the steepness from data in which the floating height is recorded in a matrix form at every fixed length in the plate width and plate length directions.
  • the Fe-Ni alloy thin plate of this embodiment preferably has a tensile strength of 400 MPa or more and a 0.2% proof stress of 200 MPa or more.
  • the elongation may be set to 20 to 50%. This allows the Fe-Ni alloy thin plate of this embodiment to exhibit excellent flatness and etching warpage resistance as well as excellent plastic workability, and tends to be less susceptible to breakage or cracks during winding or plastic working.
  • the preferred lower limit of the tensile strength is 450 MPa, and the preferred lower limit of the 0.2% proof stress is 250 MPa.
  • the preferred lower limit of the elongation is 25%, and the preferred upper limit of the elongation is 45%.
  • the tensile strength, 0.2% proof stress, and elongation properties can be determined by tests based on the methods specified in JIS-Z2241.
  • An Fe-Ni alloy having the composition shown in Table 1 was hot pressed and hot rolled to prepare a hot rolled material having a thickness of 3.0 mm.
  • the hot rolled material was chemically polished and mechanically polished to remove the oxide layer on the surface of the hot rolled material, and then the hot rolling cracks at both ends in the material width direction were removed by trimming.
  • the material was then divided into an example of the present invention and a comparative example, and each was subjected to intermediate cold rolling and intermediate annealing (approximately 900°C) to produce intermediate cold rolled material having a width of 1040 mm and a thickness of 0.2 mm.
  • both the example of the present invention and the comparative example were subjected to one pass of finish cold rolling at a rolling reduction rate of 25% to form a thin plate shape (finish cold rolled thin plate).
  • the process shown in Table 2 was then carried out to produce sample No. 1, which is an example of the present invention, and samples No. 11 and 12, which are comparative examples.
  • the recrystallization annealing for the present invention and comparative examples was performed at about 900°C, and shape correction was performed using a tension leveler, but without pressing with a leveler roll, under conditions of a correction tension of about 300 MPa, mainly tensile stress.
  • the stress relief annealing temperature for sample No. 1, which is an example of the present invention, and sample No. 12, which is a comparative example was about 630°C.
  • test pieces were taken from the sample of the invention example No. 1 prepared, and each test was performed.
  • the test results are shown in Table 2.
  • the measurement of warpage to confirm the effect of suppressing etching warpage was performed by preparing a cut sample of 150 mm in length and 30 mm in width, removing 1/2 of the plate thickness from one side by etching, and then measuring the amount of warpage when the cut sample was hung from a vertical upper plate and evaluated.
  • the cut sample was taken from the center of the width direction of the prepared sample so that the length direction was the rolling direction.
  • the etching solution used was an aqueous solution of ferric chloride, and the etching solution at a liquid temperature of 50°C was sprayed to corrode the test piece.
  • the maximum floating height was measured using a three-dimensional shape measuring device, and the maximum floating height and maximum steepness were measured from a test piece cut to a length of 800 mm and placed on a horizontal plate. The steepness was calculated from the data recorded in a matrix form of the floating height for each fixed length (width direction: 21 mm, length direction: 8 mm). The tensile strength, 0.2% yield strength and elongation were measured using the test methods specified in JIS-Z2241.
  • the specimen of the invention example No. 1 which was subjected to finish cold rolling-recrystallization annealing-shape straightening-stress relief annealing, showed a good etching warpage of 5 mm or less and good mechanical properties (tensile strength: 460 MPa or more, 0.2% proof stress: 280 MPa or more, elongation: 30% or more), and showed very excellent values of maximum floating height of 0.8 mm or less and maximum steepness of 0.3% or less. From this, it was found that the Fe-Ni alloy thin plate obtained by applying the present invention is suitable for carrying out various etching processes. On the other hand, the specimen of the comparative example No.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
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  • Metallurgy (AREA)
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  • Physics & Mathematics (AREA)
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Abstract

La présente invention concerne une feuille mince d'alliage à base de Fe-Ni qui est apte à présenter à la fois une bonne planéité et une bonne résistance à la déformation par gravure.　La présente invention concerne spécifiquement un procédé de production d'une feuille mince d'alliage à base de Fe-Ni qui présente une épaisseur de 0,5 mm ou moins. Le procédé comprend : une étape de laminage à froid de finition dans laquelle un laminage à froid de finition avec une traction de 5 à 50 % est appliqué à un matériau de laminage à froid qui contient, en % en masse, 0,01 % ou moins de C, 0,5 % ou moins de Si, 1,0 % ou moins de Mn, et 28 à 52 % de Ni, le complément étant constitué de Fe et d'impuretés inévitables, de manière à former une feuille mince ; une étape de recuit de recristallisation dans laquelle un recuit est effectué sur la feuille mince après le laminage à froid de finition à une température de 800 à 1 000 °C, bornes incluses ; une étape d'application d'une contrainte de traction dans laquelle une correction de forme est effectuée sur la feuille mince après l'étape de recuit de recristallisation avec une tension de 200 à 600 MPa de façon à conférer une contrainte de traction à la feuille mince ; et une étape de recuit de réduction des contraintes dans laquelle un recuit de réduction des contraintes est effectué sur la feuille mince après l'étape d'application d'une contrainte de traction à une température de 400 à 750 °C, bornes incluses. La présente invention concerne aussi plus précisément la feuille mince d'alliage à base de Fe-Ni.
PCT/JP2024/039415 2023-11-07 2024-11-06 Procédé de production d'une feuille mince d'alliage à base de fe-ni, et feuille mince d'alliage à base de fe-ni Pending WO2025100438A1 (fr)

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JP2023189925 2023-11-07
JP2023-189925 2023-11-07

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WO2025100438A1 true WO2025100438A1 (fr) 2025-05-15

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10204541A (ja) * 1997-01-17 1998-08-04 Nkk Corp 板形状および耐熱収縮性に優れた低熱膨張合金薄板の製 造方法
JP2006097073A (ja) * 2004-09-29 2006-04-13 Hitachi Metals Ltd Ｆｅ−Ｎｉ系合金薄板材の製造方法
WO2018235862A1 (fr) * 2017-06-20 2018-12-27 日立金属株式会社 Procédé de production de plaque mince pour masques métalliques, et plaque mince pour masques métalliques
JP2021014639A (ja) * 2019-07-10 2021-02-12 日立金属株式会社 Ｆｅ−Ｎｉ系合金薄板の製造方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10204541A (ja) * 1997-01-17 1998-08-04 Nkk Corp 板形状および耐熱収縮性に優れた低熱膨張合金薄板の製 造方法
JP2006097073A (ja) * 2004-09-29 2006-04-13 Hitachi Metals Ltd Ｆｅ−Ｎｉ系合金薄板材の製造方法
WO2018235862A1 (fr) * 2017-06-20 2018-12-27 日立金属株式会社 Procédé de production de plaque mince pour masques métalliques, et plaque mince pour masques métalliques
JP2021014639A (ja) * 2019-07-10 2021-02-12 日立金属株式会社 Ｆｅ−Ｎｉ系合金薄板の製造方法

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