WO2025257553A1 - Actionneur de vanne - Google Patents

Actionneur de vanne

Info

Publication number
WO2025257553A1
WO2025257553A1 PCT/GB2025/051288 GB2025051288W WO2025257553A1 WO 2025257553 A1 WO2025257553 A1 WO 2025257553A1 GB 2025051288 W GB2025051288 W GB 2025051288W WO 2025257553 A1 WO2025257553 A1 WO 2025257553A1
Authority
WO
WIPO (PCT)
Prior art keywords
valve
mass
actuator
valve actuator
actuation element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
PCT/GB2025/051288
Other languages
English (en)
Inventor
Ian Paterson
Paolo CORSINI
Roberto Pricci
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hammerforce Uk Ltd
GlobalForce IP Ltd
Original Assignee
Hammerforce Uk Ltd
GlobalForce IP Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hammerforce Uk Ltd, GlobalForce IP Ltd filed Critical Hammerforce Uk Ltd
Publication of WO2025257553A1 publication Critical patent/WO2025257553A1/fr
Pending legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K37/00—Special means in or on valves or other cut-off apparatus for indicating or recording operation thereof, or for enabling an alarm to be given
    • F16K37/0025—Electrical or magnetic means
    • F16K37/0041—Electrical or magnetic means for measuring valve parameters
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
    • F16K31/06—Actuating devices; Operating means; Releasing devices electric; magnetic using a magnet, e.g. diaphragm valves, cutting off by means of a liquid
    • F16K31/0644—One-way valve
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
    • F16K31/122—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston
    • F16K31/1221—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston one side of the piston being spring-loaded

Definitions

  • the invention relates to a valve actuator, a valve including an actuator and a system and method of fluid flow control.
  • the actuator is the component of a valve that is operable to cause movement of the valve obturator.
  • actuator There are many different types of actuator, from simple manually operable arrangements where an operator physically manipulates a structure which acts directly upon the valve obturator, to more complex systems in which the actuator is operated remotely, by, for example pneumatics or electromagnetically via a solenoid.
  • a valve actuator for operating a linearly actuatable valve, the actuator comprising an actuation element disposed to act upon an obturator of the valve when the actuator is in use, a guide path and a drive system disposed to impart kinetic energy to the actuation element to operate the valve, wherein the drive system comprises a moveable mass adapted to achieve instantaneous transfer of kinetic energy via impact to the actuation element through movement of the mass over a non-zero distance along the guide path.
  • the actuation element defines the guide path and includes one or more impact surface, the or each impact surface being disposed on the guide path for contact by an interacting surface of the mass for the transfer of kinetic energy, the corresponding impact and interacting surfaces together aiding in efficient energy transfer.
  • corresponding interacting and impact surfaces are self-aligning and seating, and that the geometry is such that the mass and the actuation element do not bounce excessively i.e. a reduced coefficient of restitution.
  • a substantially conical, spherical or otherwise convex/concave interface between corresponding interacting and impact surfaces is beneficial, in that, when marginally or microscopically misaligned from each other upon contact the surfaces experience a corrective force toward each other’s central axes. This corrective force and interaction acts to both align and seat the mass and the actuation element, and can act to prevent them from bouncing.
  • Another way to understand or define these interacting surfaces is that the ‘average normal direction’ over the interacting surfaces is substantially axial to both components.
  • the actuation element comprises an elongate body defining the guide path and first and second impact surfaces, the impact surfaces facing one another and being spaced from one another along the guide path, the mass being movable between the surfaces along the guide path.
  • this arrangement allows the actuation element to be reciprocated, allowing the actuator to be used for both opening and closing of the valve.
  • the actuator includes energization apparatus to provide for energization of the mass.
  • the drive system is adapted to operate with pneumatic energisation apparatus.
  • the drive system comprises a pressure chamber having first and second volumes and a return spring, the mass being disposed within the chamber and movable within it between the first and second volumes against the force of the return spring, the mass providing a fluid barrier between the volumes, and a pressure variation system to vary the pressure between the first and second chambers to impart kinetic energy to the mass to move the mass within the chamber. This is also a compact and efficient arrangement, in terms of space usage.
  • the pressure variation system enables the pressure in the chamber to be equalized and is operable to cause a pressure drop in one volume relative to the pressure of the other volume, followed by equalization of pressure between the volumes. Furthermore, it is preferred that the or each impact surface of the actuator element is disposed within the pressure chamber for contact by the mass upon operation of the pressure variation system.
  • the drive system may be adapted to operate with electro-magnetic energization apparatus, such as a system including a coil to impart kinetic energy to the mass.
  • electro-magnetic energization apparatus such as a system including a coil to impart kinetic energy to the mass.
  • the valve actuator is enabled to sense a position of a part of the valve actuator when the actuator is in use.
  • the valve actuator to include one or more position sensor, the or each position sensor being disposed to sense a position of a part of the valve actuator when the actuator is in use. This enables actuator operation to be monitored and controlled, for example to maintain actuator performance over time in response to changes such as component wear, or to allow for automatic adjustment of actuator operation.
  • the or each sensor is a linear Hall-effect sensor, an inductive proximity sensor, a capacitive displacement sensor, a linear variable differential transformer (LVDT), a magnetostrictive sensor, an optical sensor such as a laser sensor, and/or a mechanical microswitch.
  • LVDT linear variable differential transformer
  • valve actuator may include means to allow for measurement of a conductivity change between two or more components of the actuator. This arrangement for position sensing may be useful in situations where ambient conditions are too harsh for other sensor types or sensor response times are too slow. It is preferred that the valve actuator is enabled to sense the position of the actuation element and/or the moveable mass and/or a valve to which the actuator is operatively connected. It is particularly preferred that the valve actuator is enabled to detect the position of the moveable mass.
  • a linearly actuatable valve comprising an actuator as defined hereinabove.
  • suitable linearly actuatable valves for use with the actuator of the invention include diaphragm valves, globe valves and gate valves.
  • a system for fluid supply comprising an actuator and/or a valve as set out hereinabove.
  • the system may include control apparatus adapted to receive a signal from one or more position sensor disposed to sense a position of a part of the valve actuator or valve when the actuator is in use, and vary the timing of subsequent operation of the energisation apparatus in response to the received signal.
  • the control apparatus may be adapted to measure a time period between operation of the energisation apparatus and position sensor signal, compare the time period to a set time period and vary the operation of the energisation apparatus if the measured time period varies from the set time period.
  • the system may advantageously be a part of, or for use in chemical vapor deposition (CVD) apparatus, and in particular atomic layer deposition (ALD), atomic layer etch (ALE), or other molecular layer deposition apparatus.
  • ALD and ALE are highly related and will be referred to as ALD only for convenience for the rest of the disclosure.
  • a method of performing chemical vapor deposition such as atomic layer deposition or molecular layer deposition, the method comprising the step of introducing reactants into a fluid stream by activation of a valve and/or actuator as set out hereinabove. It is preferred that the method includes the step of sensing the position of one or more component of the valve and/or actuator and modifying its activation in response. It is particularly preferred that the step of modifying activation is accomplished by automatic control, and by varying the operation of energization apparatus.
  • Figure l is a schematic sectional view of a first valve according to one aspect of the invention.
  • Figure 2 is a schematic sectional view of a second valve according to one aspect of the invention.
  • Figure 3 is a schematic sectional part view of a variation of the valve shown in Figure 2;
  • Figure 4 is a perspective view of a first embodiment of actuator according to one aspect of the invention.
  • Figure 5 is a side view of the actuator of Figure 4.
  • Figure 6 is a transverse sectional view of the actuator of Figure 4;
  • Figure 7 is a simplified schematic sectional view of the actuator of Figure 4;
  • Figure 9 is a transverse sectional view of a further embodiment of valve according to the invention.
  • Figure 10 is a schematic view of a fluid flow system according to the invention.
  • Figures 11 and 12 are schematic sectional views of a further embodiment of actuator according to the invention.
  • Figure 13 is a schematic sectional view of a part of an actuator according to the invention.
  • Figure 14 is a schematic sectional view of a further embodiment of actuator according to the invention.
  • valve By way of illustrating the actuator of the present invention and its operation, particularly as applied to a specific type of valve, in the first of these examples the actuator is shown working with diaphragm valves.
  • valve as used herein is used to mean a device that includes both an actuator and a valve body including an obturating member.
  • a diaphragm valve is a known form of linearly actuatable valve.
  • a problem that exists with existing designs of diaphragm valves is that of comparatively slow reaction times.
  • Diaphragm valves typically have a 6 - 15ms response time, which is defined as the time from command signal to valve open, and actuation times (the time from closed to open, or open to closed) of no less than 5ms.
  • the speed of reaction time is dictated by the actuators that are typically used in diaphragm valves, rather than being attributable to the valve body or obturating member.
  • Diaphragm valve architecture is commonly used in pulse valves as used in atomic layer deposition (ALD) and in the related technique of molecular layer deposition (MLD), where zero contamination is very important.
  • ALD atomic layer deposition
  • MLD molecular layer deposition
  • currently specified diaphragm valves utilise pneumatic or electro-pneumatic pistons that act directly upon the diaphragm and are capable at best of reaction rates of 6ms.
  • fabricators are under constant pressure to maintain maximum precision in highly complex processes that involve expensive materials and/or materials whose volatility is linked to fine control of flow and pressure state of the system. Small gains to the dosing accuracy and flow consistency of the precursor or reactants can have a huge impact on the failure or success of the chip-building process.
  • a diaphragm valve 1 comprising an actuator 2, the actuator comprising an actuation element 3 disposed to act upon an obturator of the valve 1, a guide path 4 and a drive system 5, the drive system being disposed to impart kinetic energy to the actuation element 3 to operate the valve, wherein the drive system 5 comprises a moveable mass 6 adapted to achieve instantaneous transfer of kinetic energy via impact to the actuation element 3 through movement of the mass 6 over a non-zero distance along the guide path 4.
  • FIGS 1 and 2 illustrate valves that form a part of apparatus for use in chemical vapor deposition, in this case specifically, atomic layer deposition (ALD).
  • the apparatus includes at least one valve 1 having a valve body 8 for the controlled introduction of precursor fluid to a process stream via inlet 9 and outlet 10 along with the usual ancillary apparatus as is known in the art.
  • the valve is a weir-type linearly actuatable diaphragm valve, the valve diaphragm 11 being the obturator that controls the flow between the inlet and outlet.
  • the diaphragm 11 is of known type and comprises a generally circular disc of a plastics, rubber or super alloy material.
  • the dome is resiliently deformable, in the sense that upon application of a sufficient force to it, it will deflect into the plane of the disc, but will return to its domed, at rest configuration when the force is removed.
  • the actuator 2 is adapted to operate with energization apparatus, which in this example is pneumatic energization apparatus of known type.
  • energization apparatus which in this example is pneumatic energization apparatus of known type.
  • bonnet 12 which includes a generally cylindrical wall 12a, a top cap 12b and a bottom cap 12c with neck 20. Together these parts define a pressure chamber 15, with pressure couplings 16a, 17a.
  • the chamber 15 is otherwise sealed to atmosphere and houses mass 6, which here takes the form of a circular disc which fits inside the bonnet in slidable but fluid tight relation to the wall 12a, the sealing of the clearance between the mass 6 and the interior surface of the wall 12a being ensured by the provision of an O-ring seal.
  • the mass 6 divides the chamber 15 into two volumes; a first, upper volume 15a and a second, lower volume, 15b.
  • the mass 6 has a through-hole at its center through which passes actuation element 3, such that the two are movably coaxially mounted for relative movement.
  • the actuation element 3 takes the form of a generally circular section narrow stem, which is substantially vertically linearly extending and also slidably mounted within the bonnet 12.
  • the terms “actuation element” and “stem” are used interchangeably herein and both will use reference numeral 3.
  • the stem 3 includes upper and lower impact surfaces, 24, 25 which here are disposed upon circular flanges 24a, 25a extending radially outwardly from the stem towards the wall 12a.
  • the stem 3 extends linearly downwardly, as viewed, from an aperture 19 in top cap 12b through mass hole 13 into neck 20, neck 20 extending from bottom cap 12c to provide the attachment point for bonnet 12 onto valve body 8.
  • the stem 3 passes through the interior of neck 20 and terminates in a foot 21, which here takes the form of a disc mounted at the lower-most extremity of the stem 3.
  • valve body 8 also defines the internal conduit 23 for passage of precursor fluid, in which is formed weir 27.
  • a valve diaphragm seat 22 is provided above (as viewed) weir 27 onto which is located and sealed the periphery of valve diaphragm 11.
  • valve 1 In use, the valve 1 is closed in its at rest condition, with foot 21 in contact with the top surface of diaphragm 11, pressing it downwardly as viewed so that diaphragm 11 is pressed into contact with weir 27 thereby obturating passage 23.
  • the diaphragm 11 can be depressed into the closed position simply by the weight of the stem 3, or alternatively it can be depressed by downward pressure exerted by the force of a suitably mounted spring or other means on the stem 3, as shown in the part view of Figure 3 for the embodiment of Figure 2.
  • pneumatic pressure is supplied via the pneumatic energization apparatus 7 to coupling 17a, which causes a pressure increase in lower volume 15b.
  • the pressure differential across the mass 6 between the upper and lower volumes thus created causes the mass 6 to move rapidly upwardly, as viewed, building kinetic energy and guided by guide path 4 of stem 3 until it impacts upper impact surface 24, which is disposed substantially normal to the axis of movement of the mass 6 to ensure even contact and therefore maximum effect.
  • mass 6 transfers its kinetic energy to the stem 3 via the impact surface.
  • the relative masses and coefficient of restitution will affect the amount of energy transferred, which means, advantageously, that these can be tuned to optimize the desired effect on the stem 3.
  • the stem 3 will rise rapidly, lifting the foot 21 from the diaphragm 11, releasing it from weir 27 and allowing it to return to its domed, at rest shape. Fluid can now flow between inlet 9 and outlet 10. If the supply of pneumatic pressure to coupling 17a is maintained, the mass 6 will remain in contact with the upper impact surface, keeping the stem 3 elevated and the valve will remain open. Once the pressure reduces sufficiently, the mass 6 will descend, allowing the stem to descend also, replacing the downward force on the diaphragm 11 and so closing the valve.
  • the pneumatic supply can be reversed, such that pressure is increased in upper volume 15a and reduced in lower volume 15b, causing the mass 6 to descend forcefully to strike lower impact surface 25, which forces stem 3 downwardly, causing rapid valve closing.
  • the actuator 2 thus provides for fast valve opening and closing once the mass 6 has been energized, as the impact upon the impact surfaces of the stem is rapid and carries the full force of the kinetic energy built up by the freely moving mass 6.
  • different opening and closing effects can be achieved, such as for example, rapid and maintained opening, rapid opening and slow closing, and rapid opening and rapid closing in the form of a “pulse”.
  • throttling can also be achieved.
  • a valve provided with such an actuator 2 is susceptible of high reaction rates and a high level of control.
  • bonnet 12 includes a single internal volume in chamber 15 which houses circumferential coil 28.
  • Coil 28 includes central aperture 29 within which is mounted moveable mass 6 which here takes the form of a cylindrical magnet.
  • the mass 6 has a central through bore 30 through which is mounted actuation element 3 (which corresponds in shape and function with the actuation element described and illustrated in Figure 1) such that the two are movably coaxially mounted for relative movement.
  • Electro-magnetic energization apparatus 7 is provided in the form of an electrical connection by means of which the coil 28 may be energized.
  • the valve 1 functions in a similar way to the valve described above in Figure 1.
  • the coil 28 is energized to build kinetic energy in the mass 6.
  • Mass 6 is moved upwardly, guided by guide path 4 of stem 3 until it impacts upper impact surface 24, which is disposed substantially normal to the axis of movement of the mass 6 to ensure even contact.
  • mass 6 transfers its kinetic energy to the stem via the impact surface 24.
  • the relative masses and coefficient of restitution will affect the amount of energy transferred, which as before, allows for these to be tuned to optimize the desired effect on the stem 3.
  • the stem 3 will rise rapidly, lifting the foot 21 from the diaphragm 11, releasing it from weir 27 and allowing it to return to its domed, at rest shape. Fluid can now flow between inlet 9 and outlet 10. If the supply of current to the coil is maintained, the mass 6 will remain in contact with the upper impact surface, keeping the stem 3 elevated and the valve will remain open. Once the supply of current is reduced sufficiently the mass 6 will descend, allowing the stem to descend also, replacing the downward force on the diaphragm 11 and so closing the valve.
  • the polarity can be reversed, causing the mass 6 to descend forcefully to strike lower impact surface 25 which forces stem 3 downwardly, causing rapid valve closing.
  • the actuator 2 thus provides for fast valve opening and closing once the mass 6 has been energized, as the impact upon the impact surfaces of the stem is rapid and carries the full force of the kinetic energy built up by the freely moving mass 6.
  • different opening and closing effects can be achieved, such as for example, rapid and maintained opening, rapid opening and slow closing, and rapid opening and rapid closing in the form of a “pulse”.
  • a suitable valve obturator and valve body With a suitable valve obturator and valve body, throttling can also be achieved.
  • a valve provided with such an actuator is susceptible of high reaction rates and a high level of control.
  • a valve actuator 2 for operating a linearly actuatable valve, such as for example a diaphragm valve, globe valve or a gate valve.
  • the actuator 2 comprises actuation element 3, a guide path 4 and a drive system 5, the drive system being disposed to impart kinetic energy to the actuation element 3 to operate the valve, wherein the drive system 5 comprises a moveable mass 6 adapted to transfer kinetic energy to the actuation element 3 through movement of the mass 6 over a non-zero distance along the guide path 4.
  • the actuator 2 includes a drive system 5 that is adapted to operate with pneumatic energization apparatus of known type.
  • actuator 2 comprises a bonnet 12, including bonnet upper and lower sections, 120, 121.
  • Bonnet upper section 120 comprises cap 122 and annular dump valve sleeve 123.
  • Cap 122 includes a top surface 124, a dependent circumferential skirt 125 and an internal circular wall 126. Skirt 125 and wall 126 together define circular channel 127. Inboard of circular channel 127 there is formed central boss 128 in which is formed actuation element bore 129. Between boss 128 and wall 126 is disposed a spring locating channel 131.
  • the cap 122 also includes pressure sensing port 122a and pneumatic actuation port 122b which provides for fluid communication between channel 127 and an external source of pneumatic pressure for actuation.
  • Annular dump valve sleeve 123 comprises two rings; an extension ring 132 and a main ring 133.
  • the two rings are joined end to end at joint 123 a, the parts being formed together in this embodiment as one integral unit.
  • the diameters of the rings differ, with extension ring 132 having a smaller diameter than main ring 133.
  • Extension ring 132 which is uppermost as viewed in Figure 6, includes circumferential wall 132a, and wall 132a is dimensioned such that the end of extension ring 132 fits into circular channel 127 of the cap, abutting in close but slidable relation within the inside surface of dependent skirt 125, but spaced from wall 126, thereby leaving space 135.
  • Wall 132a includes through vents 134 formed through it in a direction substantially normal to its longitudinal axis, so allowing fluid communication from the inside of the ring 132 to its outside.
  • Main ring 133 which is lowermost as viewed, has as mentioned, a larger diameter than ring 132, defined by wall 136 which includes spring locating seat 137 at its lowermost end as viewed.
  • Bonnet lower section 121 is in general form a cup, the cup including a base 138 and a generally circular wall 139 which together define an internal volume 140.
  • the wall is of narrower diameter than the bonnet upper section, having an open upper end 143 and is dimensioned to fit within the upper section.
  • the wall 139 is traversed by two rings of circumferentially spaced through apertures, an upper ring 141a and a lower ring 141b which provide a means of fluid communication between volume 140 and its exterior.
  • a circular, cylindrical open-ended upstand 142 extends upwardly from the base a short distance relative to the height of the wall 139.
  • the base 138 of the cup comprises a generally circular plate of constant thickness, the plate extending radially outwardly to provide a ledge 145 outside of the wall.
  • a circular mounting recess 146 At the underside of the base there is formed a circular mounting recess 146, including an internal screw thread and within the mounting recess is located a through aperture 144 that extends into the interior of the cup via the upstand 142.
  • a pneumatic pressure port 146 is also provided in the base, allowing fluid communication between the interior and exterior of the cup.
  • actuation element 3 takes the form of a generally circular section, narrow stem.
  • actuation element and “stem” are used interchangeably herein and reference numeral 3 will be used for both.
  • Stem 3 includes a longitudinally extending elongate body, including upper section 3a, middle section 3b, and lower section 3c, with middle section 3b providing guide path 4.
  • the stem further comprises upper and lower flanges 24, 25, each extending radially outwardly from the body, flange 24 being located between the upper and middle sections and flange 25 being located between the middle and lower sections of the body.
  • each flange thus forms a circular ledge, extending outwardly from the body normal to its longitudinal axis, and each ledge itself thus includes upper 151 and lower 152 planar impact surfaces.
  • the lower impact surface 152 of the upper flange 24, and the upper impact surface 151 of the lower flange are thus in opposed relation, facing one another along the guide path 4.
  • mass 6 mounted upon the middle section 3b of the stem, in between the upper and lower impact surfaces, is mass 6.
  • mass 6 takes the form of a hollow cylinder of uniform internal diameter, the cylinder having a wall 6a and a through bore 6b, with open upper and lower ends 147, 148 as viewed.
  • wall 6a At its lower end 148, wall 6a includes lower sealing diameter and O-ring, 148a. At its upper end 147, wall 6a includes circumferential circular impact flange 149 which extends radially outwardly and includes a top surface, as viewed, which has a spring locating seat 150, a substantially circular planar impact surface 163 formed thereon, and upper sealing diameter and O-ring, 147a.
  • mass 6 has two sealing diameters, 148a and 147a.
  • the through bore 6b is dimensioned to accommodate the stem 3 therein in freely slidable relation, the stem 3 and mass 6 thus being coaxially disposed for mutual linear movement between the impact surfaces 151, 152.
  • the assembled actuator 2 is illustrated in Figure 6.
  • Bonnet lower section 121 is engaged with upper section 120 and extension ring 132 of dump valve sleeve 123 is fitted around cup wall 143 at its upper end and together these parts are inserted into channel 127 of cap 122.
  • Cup wall 143 is fixed in place by a male and female thread 143a, 143b.
  • Sleeve 123 is freely linearly slidable relative to wall 143 and is retained in position by the biassing force of coil spring 153 located around the outside of wall 143 and seated upon ledge 145 at its lower end and spring locating seat 137 of main ring 133.
  • main ring 133 is of greater diameter than extension ring 132 and this greater diameter results in there being formed circumferential connecting chamber 155 around the middle part of wall 143.
  • the upper and lower aperture rings 141a and 141b are located here, so that chamber 155 is in fluid communication with them.
  • the stem 3 is located centrally within the chamber 15, extending from the cap to the base, the upper section 3 a of the stem 3 being located within bore 129 of cap 122.
  • the top of the upper section 3a of stem 3 protrudes out a short distance from the cap and is sealed to atmosphere by an O-ring.
  • the lower section 3c of the stem 3 is located within the upstand 142, with its lower tip in register with aperture 144.
  • the middle section 3b, with mass 6 thereon is thus located in chamber 15.
  • Impact flange 149 of mass 6 is dimensioned such that it extends radially outwardly a sufficient distance to seal against the interior of wall 139, via upper sealing diameter and O-ring 147a.
  • the lower end 148 of wall 6a is dimensioned such that lower sealing diameter and O-ring 148a seal against the interior of upstand 142
  • the impact flange thus provides a fluid tight divider in the chamber 15, thereby forming a first, upper volume 15a and a second, lower volume, 15b, and the lower end 148 of wall 6a provides a fluid tight divider between the lower volume 15b and through aperture 144.
  • the impact flange is positioned between the upper and lower aperture bands.
  • the apertures thus provide a means of fluid communication between the upper and lower volumes, i.e. from one side of the impact flange to the other, via connecting chamber 155.
  • the mass 6 is biassed downwardly against upward movement by wave spring 156 which is located between spring locating seat 150 and spring locating channel 131.
  • actuator 2 is shown in its at rest, energized state in Figure 7 substantially as described above, with constant pneumatic pressure applied via port 146 in base 138. The pressure is equalized between the upper and lower volumes of chamber 15 by virtue of the upper and lower aperture rings 141a, 141b and circumferential connecting chamber 155.
  • the pneumatic supply to pneumatic actuation port 122b is activated ( Figure 8a).
  • Actuator 2 thus provides for fast valve opening and closing once the mass 6 has been energized, as the impact upon the impact surfaces of the stem 3 is rapid and carries the full force of the kinetic energy built up by the freely moving mass 6.
  • Globe valve 1 comprises a valve body 8, an actuator 2, the actuator comprising an actuation element 3, a guide path 4 and a drive system 5, the drive system being disposed to impart kinetic energy to the actuation element 3 to operate the valve, wherein the drive system 5 comprises a moveable mass 6 adapted to transfer kinetic energy to the actuation element 3 through movement of the mass 6 over a non-zero distance along the guide path 4.
  • the actuator 2 of this embodiment is substantially the same as actuators described in previous embodiments and is a pneumatic type actuator energized by pneumatic energization apparatus.
  • the actuator 2 is mounted via mounting recess 146 upon valve body 8 with actuation element or stem 3 connected at its lower end with spindle 200.
  • the connection may be via a thread or any suitable means, such that the stem and spindle are able to linearly reciprocate as one, up and down, to move valve member 201 into and out of register with valve seat 202 to open and close the valve.
  • the valve and actuator combination described here also includes a position sensor 500, the operation of which will be described further hereinbelow.
  • FIG. 10 there is illustrated a schematic representation of a fluid flow system for use in chemical vapor deposition, in this case specifically, atomic layer deposition (ALD).
  • the system shown here includes at least one valve 1 having a valve body 8 for the controlled introduction of precursor fluid to a process stream via inlet 9 and outlet 10, under control of an actuator 2 according to the invention.
  • the system here illustrated also includes sensors 500 for each actuator/valve combination, operatively connected to a control system, which will be described in more detail hereinbelow.
  • actuator 2 is a pneumatically energized actuator of similar configuration to those described above, the difference in this case being that the pneumatic supply is controlled by solenoid valve 300.
  • the actuator 2 is supplied with pneumatic pressure via port 146, but also in this case by additional port 176, under control of the solenoid valve.
  • the mass 6 is maintained in the lower position by the wave spring 156 ( Figure 11).
  • the solenoid valve 300 is switched to isolate the upper chamber from the pneumatic supply pressure and instead connects it to atmosphere, causing a rapid pressure drop in the upper chamber 15a. Mass 6 rapidly moves upwardly as described in previously described embodiments, and a valve member to which stem 3 is operatively connected is moved accordingly.
  • valve actuator 2 is enabled to sense a position of a part of the valve actuator when the actuator is in use.
  • the valve actuator to include one or more position sensor 500 in order to provide the ability for a user or automated system to monitor and adjust actuator performance, not only to compensate for adverse changes in performance over time, but also to allow for deliberate adjustment to accommodate changed process requirements.
  • the or each position sensor 500 is advantageously disposed to sense the position of a component of the actuator, in use, and send a signal to a control system 501 (Figure 10).
  • sensor 500 is disposed to sense the position of the stem 3, although as an alternative, it could be disposed to sense the position of the mass 6 or even the valve body of the valve.
  • the sensor 500 will detect one or more of the positional states of the part.
  • the sensing can be achieved by including means to allow for measurement of a conductivity change between two or more components of the actuator.
  • electrical leads 502 are connected to stem 3 and actuator cap 122 to provide a selectively breakable electrical circuit.
  • a layer of isolating material such as, for example, polyphenylene sulphide (PPS) is applied to the surfaces shown by hatched by lines so that these are isolated from one another when the system is energised.
  • PPS polyphenylene sulphide
  • the timing of the operation of the actuator 2 can be varied to compensate for this delay on subsequent actuations.
  • the sensor can be considered to be a part of a feedback mechanism.

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Fluid-Driven Valves (AREA)

Abstract

Vanne à membrane (1), comprenant un actionneur (2), l'actionneur comprenant un élément d'actionnement (3) disposé pour agir sur un obturateur de la vanne, un chemin de guidage (4) et un système d'entraînement (5), le système d'entraînement étant disposé pour transmettre de l'énergie cinétique à l'élément d'actionnement pour faire fonctionner la vanne, le système d'entraînement comprenant une masse mobile (6) conçue pour assurer un transfert instantané d'énergie cinétique par impact sur l'élément d'actionnement par mouvement de la masse sur une distance non nulle le long du chemin de guidage.
PCT/GB2025/051288 2024-06-12 2025-06-11 Actionneur de vanne Pending WO2025257553A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US202463659170P 2024-06-12 2024-06-12
US63/659,170 2024-06-12

Publications (1)

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WO2025257553A1 true WO2025257553A1 (fr) 2025-12-18

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WO (1) WO2025257553A1 (fr)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6871617B1 (en) * 2004-01-09 2005-03-29 Ford Global Technologies, Llc Method of correcting valve timing in engine having electromechanical valve actuation
WO2014182756A1 (fr) * 2013-05-09 2014-11-13 Swagelok Company Vanne à diaphragme
EP2659170B1 (fr) * 2010-12-28 2017-09-06 Emerson Process Management (Tianjin) Valve Co., Ltd. Dispositif hydraulique de commande destiné à un ensemble soupape de commande à tige coulissante à levier orientable
WO2020127282A2 (fr) * 2018-12-17 2020-06-25 Samson Aktiengesellschaft Électrovanne électropneumatique, appareil de terrain muni d'une électrovanne et procédé de diagnostic pour une électrovanne électropneumatique

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6871617B1 (en) * 2004-01-09 2005-03-29 Ford Global Technologies, Llc Method of correcting valve timing in engine having electromechanical valve actuation
EP2659170B1 (fr) * 2010-12-28 2017-09-06 Emerson Process Management (Tianjin) Valve Co., Ltd. Dispositif hydraulique de commande destiné à un ensemble soupape de commande à tige coulissante à levier orientable
WO2014182756A1 (fr) * 2013-05-09 2014-11-13 Swagelok Company Vanne à diaphragme
WO2020127282A2 (fr) * 2018-12-17 2020-06-25 Samson Aktiengesellschaft Électrovanne électropneumatique, appareil de terrain muni d'une électrovanne et procédé de diagnostic pour une électrovanne électropneumatique

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