ZA857791B - Pressure sensing cell using brittle diaphragm - Google Patents

Pressure sensing cell using brittle diaphragm

Info

Publication number
ZA857791B
ZA857791B ZA857791A ZA857791A ZA857791B ZA 857791 B ZA857791 B ZA 857791B ZA 857791 A ZA857791 A ZA 857791A ZA 857791 A ZA857791 A ZA 857791A ZA 857791 B ZA857791 B ZA 857791B
Authority
ZA
South Africa
Prior art keywords
pressure sensing
sensing cell
brittle diaphragm
brittle
diaphragm
Prior art date
Application number
ZA857791A
Other languages
English (en)
Inventor
Thomas A Knecht
Roger L Frick
John P Schulte
Original Assignee
Rosemount Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rosemount Inc filed Critical Rosemount Inc
Publication of ZA857791B publication Critical patent/ZA857791B/xx

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G5/00—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
    • H01G5/16—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of distance between electrodes
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/43—Electric condenser making

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
ZA857791A 1984-10-12 1985-10-09 Pressure sensing cell using brittle diaphragm ZA857791B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/660,394 US4578735A (en) 1984-10-12 1984-10-12 Pressure sensing cell using brittle diaphragm

Publications (1)

Publication Number Publication Date
ZA857791B true ZA857791B (en) 1986-09-24

Family

ID=24649362

Family Applications (1)

Application Number Title Priority Date Filing Date
ZA857791A ZA857791B (en) 1984-10-12 1985-10-09 Pressure sensing cell using brittle diaphragm

Country Status (9)

Country Link
US (1) US4578735A (ja)
EP (1) EP0198031A1 (ja)
JP (1) JPS62500545A (ja)
CN (1) CN85108071A (ja)
AU (1) AU4968685A (ja)
CA (1) CA1235922A (ja)
IL (1) IL76638A0 (ja)
WO (1) WO1986002486A1 (ja)
ZA (1) ZA857791B (ja)

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US4730496A (en) * 1986-06-23 1988-03-15 Rosemount Inc. Capacitance pressure sensor
IL82960A0 (en) * 1986-06-30 1987-12-20 Rosemount Inc Differential pressure sensor
US4745810A (en) * 1986-09-15 1988-05-24 Rosemount Inc. Flangeless transmitter coupling to a flange adapter union
GB8718637D0 (en) * 1987-08-06 1987-09-09 Spectrol Reliance Ltd Sealing electrical feedthrough
US4996627A (en) * 1989-01-30 1991-02-26 Dresser Industries, Inc. High sensitivity miniature pressure transducer
US5189777A (en) * 1990-12-07 1993-03-02 Wisconsin Alumni Research Foundation Method of producing micromachined differential pressure transducers
US5483834A (en) * 1993-09-20 1996-01-16 Rosemount Inc. Suspended diaphragm pressure sensor
JP2519393B2 (ja) * 1993-11-22 1996-07-31 日産自動車株式会社 半導体力学量センサの製造方法
US5706565A (en) * 1996-09-03 1998-01-13 Delco Electronics Corporation Method for making an all-silicon capacitive pressure sensor
GB9625138D0 (en) * 1996-12-03 1997-01-22 Crane Ltd A capacitive differential pressure sensor
US5936164A (en) * 1997-08-27 1999-08-10 Delco Electronics Corporation All-silicon capacitive pressure sensor
DE19750131C2 (de) * 1997-11-13 2002-06-13 Infineon Technologies Ag Mikromechanische Differenzdrucksensorvorrichtung
US6272929B1 (en) 1999-02-04 2001-08-14 Kulite Semiconductor Products High pressure piezoresistive transducer suitable for use in hostile environments
JP3494594B2 (ja) * 1999-08-05 2004-02-09 忠弘 大見 圧力検出器の取付け構造
JP3771425B2 (ja) * 2000-07-04 2006-04-26 株式会社山武 容量式圧力センサおよびその製造方法
FR2812394A1 (fr) * 2000-07-25 2002-02-01 Michelin Soc Tech Procede d'evaluation de l'autonomie d'un systeme de roulage a plat
EP1407464B1 (en) * 2001-07-17 2011-03-09 SMC Kabushiki Kaisha Micro-electromechanical sensor
US7010986B2 (en) * 2001-10-02 2006-03-14 Matsushita Electric Industrial Co., Ltd. Strain sensor and method of producing the same
JP2003329526A (ja) * 2002-05-13 2003-11-19 Hitachi Unisia Automotive Ltd 圧力センサ
CN1320432C (zh) * 2002-12-12 2007-06-06 丹福斯有限公司 触觉传感器元件和传感器阵列
CN100414278C (zh) * 2003-03-22 2008-08-27 霍里巴斯特克公司 为提供低滞后而带有处于拉伸状态下的较厚平隔膜的电容量压力计
CN101124467B (zh) * 2004-03-11 2011-04-20 电流感应器公司 具有整体集成压力传感器的微缝隙式粘度计
US7188528B2 (en) * 2004-04-23 2007-03-13 Kulite Semiconductor Products, Inc. Low pass filter semiconductor structures for use in transducers for measuring low dynamic pressures in the presence of high static pressures
US7121145B2 (en) * 2004-10-18 2006-10-17 Silverbrook Research Pty Ltd Capacitative pressure sensor
US7691723B2 (en) * 2005-01-07 2010-04-06 Honeywell International Inc. Bonding system having stress control
DE102005001097A1 (de) * 2005-01-08 2006-07-27 Abb Patent Gmbh Drucksensor (I)
US7379792B2 (en) 2005-09-29 2008-05-27 Rosemount Inc. Pressure transmitter with acoustic pressure sensor
US7415886B2 (en) * 2005-12-20 2008-08-26 Rosemount Inc. Pressure sensor with deflectable diaphragm
NO326583B1 (no) * 2007-06-08 2009-01-12 Presens As Differensialtrykkmaler
KR100956616B1 (ko) * 2008-04-18 2010-05-11 한국표준과학연구원 다이아프램을 이용한 압력 측정 장치 및 압력 측정 방법
AT506705B1 (de) * 2008-09-11 2009-11-15 Piezocryst Advanced Sensorics Piezoelektrischer drucksensor
US7870791B2 (en) 2008-12-03 2011-01-18 Rosemount Inc. Method and apparatus for pressure measurement using quartz crystal
US7954383B2 (en) * 2008-12-03 2011-06-07 Rosemount Inc. Method and apparatus for pressure measurement using fill tube
US8327713B2 (en) 2008-12-03 2012-12-11 Rosemount Inc. Method and apparatus for pressure measurement using magnetic property
TWI393870B (zh) * 2009-01-15 2013-04-21 Ind Tech Res Inst 具耦合型與多向性之軟性應力感測裝置
RU2465561C2 (ru) * 2009-02-19 2012-10-27 Государственное образовательное учреждение высшего профессионального образования "Московский государственный технический университет имени Н.Э. Баумана (МГТУ им. Н.Э. Баумана) Микроэлектромеханический датчик давления
US7819014B1 (en) * 2009-04-23 2010-10-26 Rosemount Inc. Capacitive gage pressure sensor with vacuum dielectric
DE102009046229A1 (de) * 2009-10-30 2011-05-12 Endress + Hauser Gmbh + Co. Kg Drucksensor, insbesondere Differenzdrucksensor
US8132464B2 (en) 2010-07-12 2012-03-13 Rosemount Inc. Differential pressure transmitter with complimentary dual absolute pressure sensors
US8171800B1 (en) * 2011-01-25 2012-05-08 Continental Automotive Systems, Inc. Differential pressure sensor using dual backside absolute pressure sensing
US8752433B2 (en) 2012-06-19 2014-06-17 Rosemount Inc. Differential pressure transmitter with pressure sensor
CN103063350B (zh) * 2012-12-21 2016-04-13 上海华虹宏力半导体制造有限公司 Mems压力传感器阵列、其制作方法及压力测量方法
DE102013004561B4 (de) * 2013-03-15 2017-05-04 Infineon Technologies Ag Eine vorrichtung zum erkennen einer krafteinwirkung und ein verfahren zum erkennen einer krafteinwirkung
CN104122026B (zh) * 2013-04-25 2017-11-03 浙江三花制冷集团有限公司 一种压力传感器及压力系统
FR3015755B1 (fr) 2013-12-19 2017-01-27 Airbus Operations Sas Dispositif de mesure comprenant des capteurs disposes dans des logements recouverts par un unique film
FR3015664B1 (fr) 2013-12-19 2017-03-10 Airbus Operations Sas Dispositif de mesure a circuit de commande unique
FR3015756B1 (fr) 2013-12-19 2017-05-12 Airbus Operations Sas Dispositif de mesure simplifie et procede et outil de fabrication d'un tel dispositif
CN105849521B (zh) * 2013-12-25 2019-09-27 日立汽车系统株式会社 压力测定装置
EP3410929A4 (en) * 2016-02-03 2020-01-22 Hutchinson Technology Incorporated MINIATURE PRESSURE / FORCE SENSOR WITH INTEGRATED ELECTRODES
IT201800001092A1 (it) * 2018-01-16 2019-07-16 St Microelectronics Srl Sensore di pressione piezoresistivo microelettromeccanico con capacita' di auto-diagnosi e relativo procedimento di fabbricazione
CN109029828B (zh) * 2018-06-07 2019-08-02 江苏大学 一种电容式差压传感器及其输出特性计算方法与制作方法
CN111099003B (zh) * 2019-12-26 2020-10-27 杭州电子科技大学 一种分布式传感水下航行器及其驱动控制方法
CN112834110A (zh) * 2020-12-30 2021-05-25 季华实验室 一种高精度电容薄膜真空计
CN115235681B (zh) * 2022-09-21 2022-12-20 无锡芯感智半导体有限公司 Mems压力传感器的封装结构及方法
US11953392B1 (en) 2022-09-21 2024-04-09 Wuxi Sencoch Semiconductor Co., Ltd. Packaging structure and method of MEMS pressure sensor
CN119714401B (zh) * 2024-10-31 2025-11-18 武汉飞恩微电子有限公司 一种温度压力传感器
CN120837042B (zh) * 2025-09-25 2025-12-23 宁波芯联心医疗科技有限公司 一种高精度植入式血压监测系统
CN120879986B (zh) * 2025-09-28 2025-12-16 宁波芯联心医疗科技有限公司 一种智能植入式无线供电套件

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US4177496A (en) * 1976-03-12 1979-12-04 Kavlico Corporation Capacitive pressure transducer
US4084438A (en) * 1976-03-29 1978-04-18 Setra Systems, Inc. Capacitive pressure sensing device
CA1077294A (en) * 1976-05-03 1980-05-13 Honeywell Inc. Pressure transmitter with simplified pressure sensing head
US4207604A (en) * 1976-12-02 1980-06-10 Kavlico Corporation Capacitive pressure transducer with cut out conductive plate
US4168518A (en) * 1977-05-10 1979-09-18 Lee Shih Y Capacitor transducer
JPS5829862B2 (ja) * 1977-05-14 1983-06-25 富士電機株式会社 圧力測定装置
DE2825222C2 (de) * 1978-06-06 1981-09-17 Siemens AG, 1000 Berlin und 8000 München Druckmeßumformer
GB2048488B (en) * 1979-04-26 1983-04-27 Rosemount Eng Co Ltd Differential pressure sensing apparatus
US4301492A (en) * 1980-01-28 1981-11-17 Paquin Maurice J Pressure-sensing transducer
US4332000A (en) * 1980-10-03 1982-05-25 International Business Machines Corporation Capacitive pressure transducer
US4390925A (en) * 1981-08-26 1983-06-28 Leeds & Northrup Company Multiple-cavity variable capacitance pressure transducer

Also Published As

Publication number Publication date
WO1986002486A1 (en) 1986-04-24
AU4968685A (en) 1986-05-02
JPS62500545A (ja) 1987-03-05
CN85108071A (zh) 1986-04-10
CA1235922A (en) 1988-05-03
IL76638A0 (en) 1986-02-28
US4578735A (en) 1986-03-25
EP0198031A1 (en) 1986-10-22

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