ZA949165B - Coating of inner walls of hollow bodies - Google Patents

Coating of inner walls of hollow bodies

Info

Publication number
ZA949165B
ZA949165B ZA949165A ZA949165A ZA949165B ZA 949165 B ZA949165 B ZA 949165B ZA 949165 A ZA949165 A ZA 949165A ZA 949165 A ZA949165 A ZA 949165A ZA 949165 B ZA949165 B ZA 949165B
Authority
ZA
South Africa
Prior art keywords
coating
inner walls
hollow bodies
bodies
hollow
Prior art date
Application number
ZA949165A
Other languages
English (en)
Inventor
Hermann Dr Mai
Reiner Dietsch
Andreas Dr Mucha
Original Assignee
Fraunhofer Ges Forschung
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fraunhofer Ges Forschung filed Critical Fraunhofer Ges Forschung
Publication of ZA949165B publication Critical patent/ZA949165B/xx

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/046—Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Physical Vapour Deposition (AREA)
ZA949165A 1993-11-19 1994-11-18 Coating of inner walls of hollow bodies ZA949165B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE4339490A DE4339490C1 (de) 1993-11-19 1993-11-19 Verfahren und Vorrichtung zur Innenwandbeschichtung von Hohlkörpern, insbesondere kleiner Abmessungen

Publications (1)

Publication Number Publication Date
ZA949165B true ZA949165B (en) 1995-07-25

Family

ID=6502966

Family Applications (1)

Application Number Title Priority Date Filing Date
ZA949165A ZA949165B (en) 1993-11-19 1994-11-18 Coating of inner walls of hollow bodies

Country Status (4)

Country Link
EP (1) EP0729520B1 (fr)
DE (1) DE4339490C1 (fr)
WO (1) WO1995014114A1 (fr)
ZA (1) ZA949165B (fr)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19802298C2 (de) * 1998-01-22 2000-11-23 Daimler Chrysler Ag Verfahren zur Erzielung funktioneller Metall-, Keramik- oder Keramik/Metall-Schichten auf der Innenwand von Hohlkörpern
US6534134B1 (en) 1998-11-20 2003-03-18 University Of Puerto Rico Apparatus and method for pulsed laser deposition of materials on wires and pipes
US6499426B1 (en) * 1999-12-10 2002-12-31 Saint-Gobain Industrial Ceramics, Inc. System and method for coating non-planar surfaces of objects with diamond film
CN103572341B (zh) * 2013-09-23 2016-01-20 江苏大学 激光光管电极的电化学复合沉积制造方法与装置
CN113373417A (zh) * 2021-06-11 2021-09-10 哈尔滨工业大学 阴阳极双靶头优化管内壁镀膜的镀膜装置及其镀膜方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DD252845A1 (de) * 1986-09-23 1987-12-30 Karl Marx Stadt Tech Hochschul Verfahren und ao zur herstellung metallischer ueberzuege auf den innenflaechen von glasrohren
FR2607830B1 (fr) * 1986-12-08 1993-04-09 Univ Limoges Procede et dispositif pour le depot par vaporisation a l'interieur d'un tube
DE3800680A1 (de) * 1988-01-13 1989-07-27 Leyendecker Toni Verfahren und vorrichtung zur beschichtung eines substrates
US5372862A (en) * 1993-10-14 1994-12-13 Krishnaswamy; Jayaram Coating technique for synchrotron beam tubes

Also Published As

Publication number Publication date
EP0729520A1 (fr) 1996-09-04
EP0729520B1 (fr) 2000-05-03
DE4339490C1 (de) 1995-03-23
WO1995014114A1 (fr) 1995-05-26

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