AT520565A5 - Vorrichtung und Verfahren zum Beschichten eines Substrats - Google Patents

Vorrichtung und Verfahren zum Beschichten eines Substrats Download PDF

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Publication number
AT520565A5
AT520565A5 ATA9159/2014A AT91592014A AT520565A5 AT 520565 A5 AT520565 A5 AT 520565A5 AT 91592014 A AT91592014 A AT 91592014A AT 520565 A5 AT520565 A5 AT 520565A5
Authority
AT
Austria
Prior art keywords
substrate
coating
receiving
relates
cooling
Prior art date
Application number
ATA9159/2014A
Other languages
English (en)
Other versions
AT520565B1 (de
Inventor
Mayr Christoph
Original Assignee
Ev Group E Thallner Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ev Group E Thallner Gmbh filed Critical Ev Group E Thallner Gmbh
Publication of AT520565A5 publication Critical patent/AT520565A5/de
Application granted granted Critical
Publication of AT520565B1 publication Critical patent/AT520565B1/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B9/00—Spraying apparatus for discharge of liquids or other fluent material, without essentially mixing with gas or vapour
    • B05B9/002—Spraying apparatus for discharge of liquids or other fluent material, without essentially mixing with gas or vapour incorporating means for heating or cooling, e.g. the material to be sprayed
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/02—Processes for applying liquids or other fluent materials performed by spraying
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
    • B05D3/04—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to gases
    • B05D3/0466—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to gases the gas being a non-reacting gas
    • B05D3/048—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to gases the gas being a non-reacting gas for cooling
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
    • B05D3/04—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to gases
    • B05D3/0486—Operating the coating or treatment in a controlled atmosphere
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
    • B05D3/04—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to gases
    • B05D3/0493—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to gases using vacuum
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0431—Apparatus for thermal treatment
    • H10P72/0434—Apparatus for thermal treatment mainly by convection
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0448—Apparatus for applying a liquid, a resin, an ink or the like
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
    • B05D3/002—Pretreatement
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
    • B05D3/04—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to gases
    • B05D3/0406—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to gases the gas being air
    • B05D3/0426—Cooling with air

Landscapes

  • Application Of Or Painting With Fluid Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Details Or Accessories Of Spraying Plant Or Apparatus (AREA)
  • Coating Apparatus (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

Die Erfindung betrifft eine Vorrichtung zum Beschichten einer Oberfläche (9o) eines Substrats (9) mit einem mindestens eine Beschichtungskomponente und mindestens ein Lösungsmittel aufweisenden Beschichtungsmaterial, mit folgenden Merkmalen: - einer mit Druck beaufschlagbaren Kammer (7), - einer Aufnahmeeinrichtung (8) zur Aufnahme des Substrats (9) auf einer Aufnahmefläche (12) und - einer Sprühdüse (11) zur Beschichtung des Substrats (9), dadurch gekennzeichnet, dass die Vorrichtung Kühlmittel zur Kühlung zumindest der Oberfläche (9o) des auf der Aufnahmefläche (12) der Aufnahmeeinrichtung (8) aufgenommenen Substrats (9) aufweist. Weiterhin betrifft die Erfindung ein korrespondierendes Verfahren.
ATA9159/2014A 2013-05-23 2014-04-01 Vorrichtung und Verfahren zum Beschichten eines Substrats AT520565B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102013105320.3A DE102013105320A1 (de) 2013-05-23 2013-05-23 Vorrichtung und Verfahren zum Beschichten eines Substrats
PCT/EP2014/056539 WO2014187600A1 (de) 2013-05-23 2014-04-01 Vorrichtung und verfahren zum beschichten eines substrats

Publications (2)

Publication Number Publication Date
AT520565A5 true AT520565A5 (de) 2019-05-15
AT520565B1 AT520565B1 (de) 2019-06-15

Family

ID=50424250

Family Applications (1)

Application Number Title Priority Date Filing Date
ATA9159/2014A AT520565B1 (de) 2013-05-23 2014-04-01 Vorrichtung und Verfahren zum Beschichten eines Substrats

Country Status (9)

Country Link
US (1) US9962721B2 (de)
JP (1) JP6360160B2 (de)
KR (1) KR102160846B1 (de)
CN (1) CN105377452B (de)
AT (1) AT520565B1 (de)
DE (1) DE102013105320A1 (de)
SG (1) SG11201509621VA (de)
TW (1) TWI668052B (de)
WO (1) WO2014187600A1 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3054338A1 (de) * 2015-02-04 2016-08-10 Georg-August-Universität Göttingen Stiftung Öffentlichen Rechts Montagevorrichtung für eine Probe und Verfahren zur Entnahme einer Probe
EP3520133B1 (de) * 2016-09-29 2020-04-29 EV Group E. Thallner GmbH Vorrichtung und verfahren zum bonden zweier substrate
CN106423734B (zh) * 2016-10-26 2022-05-10 广东工业大学 一种喷射点胶装置及工艺
KR102125141B1 (ko) * 2017-09-22 2020-06-19 가부시키가이샤 스크린 홀딩스 기판 처리 방법 및 기판 처리 장치
US10994300B2 (en) * 2018-11-27 2021-05-04 Service Support Specialties, Inc Method and/or system for coating a substrate
CN113926603A (zh) * 2021-11-19 2022-01-14 刘常青 一种家具油漆雾化敷涂装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19952604A1 (de) * 1998-11-04 2000-10-26 Tokyo Electron Ltd Vorrichtung zum Ausbilden eines Beschichtungsfilms
US20020124797A1 (en) * 1999-12-15 2002-09-12 Tokyo Electron Limited Film forming unit
US20040048002A1 (en) * 2002-09-11 2004-03-11 Shifflette J. Michael Method for coating objects

Family Cites Families (16)

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Publication number Priority date Publication date Assignee Title
JP3069762B2 (ja) * 1993-03-25 2000-07-24 東京エレクトロン株式会社 塗布膜形成方法及びその装置
US6383289B2 (en) * 1997-12-16 2002-05-07 The University Of North Carolina At Chapel Hill Apparatus for liquid carbon dioxide systems
KR100321712B1 (ko) * 1998-12-22 2002-03-08 박종섭 초저유전율의폴리머절연막형성방법
DE19941760A1 (de) * 1999-09-02 2001-03-22 Duerr Systems Gmbh Kühlzone einer Lackieranlage und Verfahren zum Betreiben einer solchen Kühlzone
WO2003039765A1 (en) 2001-11-02 2003-05-15 Bbi Enterprises, L.P. Electrostatic application of loose fiber to substrates
JP4379053B2 (ja) 2002-12-16 2009-12-09 株式会社デンソー 電動アクチュエータシステム
JP2005342641A (ja) * 2004-06-04 2005-12-15 Matsushita Electric Ind Co Ltd 液体の塗布装置及び塗布方法
KR100575139B1 (ko) 2004-11-12 2006-05-03 (주)태광테크 가스냉각장치가 구비된 저온 스프레이 코팅장치
US20080035306A1 (en) * 2006-08-08 2008-02-14 White John M Heating and cooling of substrate support
JP4680149B2 (ja) * 2006-08-23 2011-05-11 東京エレクトロン株式会社 塗布処理方法、プログラム、コンピュータ読み取り可能な記録媒体及び塗布処理装置
JP2008096503A (ja) * 2006-10-06 2008-04-24 Toshiba Corp 粉末状感光性組成物の製造方法、感光性組成物およびこの感光性組成物から形成された光記録媒体
FR2926466B1 (fr) 2008-01-23 2010-11-12 Dbv Tech Procede de fabrication de patchs par electrospray
JP5189417B2 (ja) 2008-06-25 2013-04-24 三ツ星ベルト株式会社 静電植毛パイル拡散ノズル
JP5390956B2 (ja) * 2009-06-25 2014-01-15 大日本スクリーン製造株式会社 配線形成装置および配線形成方法
DE202011000789U1 (de) 2011-04-04 2011-06-09 Hellmuth, Felix, 96268 Vorrichtung zur elektrostatischen Beflockung
JP4920115B2 (ja) * 2011-04-04 2012-04-18 芝浦メカトロニクス株式会社 溶液の塗布装置及び塗布方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19952604A1 (de) * 1998-11-04 2000-10-26 Tokyo Electron Ltd Vorrichtung zum Ausbilden eines Beschichtungsfilms
US20020124797A1 (en) * 1999-12-15 2002-09-12 Tokyo Electron Limited Film forming unit
US20040048002A1 (en) * 2002-09-11 2004-03-11 Shifflette J. Michael Method for coating objects

Also Published As

Publication number Publication date
KR102160846B1 (ko) 2020-09-29
JP6360160B2 (ja) 2018-07-18
SG11201509621VA (en) 2015-12-30
AT520565B1 (de) 2019-06-15
JP2016526292A (ja) 2016-09-01
US9962721B2 (en) 2018-05-08
US20160082453A1 (en) 2016-03-24
TW201501806A (zh) 2015-01-16
CN105377452B (zh) 2018-09-25
TWI668052B (zh) 2019-08-11
WO2014187600A1 (de) 2014-11-27
KR20160016774A (ko) 2016-02-15
DE102013105320A1 (de) 2014-11-27
CN105377452A (zh) 2016-03-02

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