AT524077A3 - Adapter, Anschlussvorrichtung sowie Versorgungssystem - Google Patents

Adapter, Anschlussvorrichtung sowie Versorgungssystem Download PDF

Info

Publication number
AT524077A3
AT524077A3 ATA50856/2021A AT508562021A AT524077A3 AT 524077 A3 AT524077 A3 AT 524077A3 AT 508562021 A AT508562021 A AT 508562021A AT 524077 A3 AT524077 A3 AT 524077A3
Authority
AT
Austria
Prior art keywords
supply system
adapter
container
channel
connection device
Prior art date
Application number
ATA50856/2021A
Other languages
English (en)
Other versions
AT524077A2 (de
AT524077B1 (de
Original Assignee
Suss Microtec Lithography Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Suss Microtec Lithography Gmbh filed Critical Suss Microtec Lithography Gmbh
Publication of AT524077A2 publication Critical patent/AT524077A2/de
Publication of AT524077A3 publication Critical patent/AT524077A3/de
Application granted granted Critical
Publication of AT524077B1 publication Critical patent/AT524077B1/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B15/00—Details of spraying plant or spraying apparatus not otherwise provided for; Accessories
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0448—Apparatus for applying a liquid, a resin, an ink or the like
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B9/00—Spraying apparatus for discharge of liquids or other fluent material, without essentially mixing with gas or vapour
    • B05B9/03—Spraying apparatus for discharge of liquids or other fluent material, without essentially mixing with gas or vapour characterised by means for supplying liquid or other fluent material
    • B05B9/04—Spraying apparatus for discharge of liquids or other fluent material, without essentially mixing with gas or vapour characterised by means for supplying liquid or other fluent material with pressurised or compressible container; with pump
    • B05B9/0403—Spraying apparatus for discharge of liquids or other fluent material, without essentially mixing with gas or vapour characterised by means for supplying liquid or other fluent material with pressurised or compressible container; with pump with pumps for liquids or other fluent material
    • B05B9/0409—Spraying apparatus for discharge of liquids or other fluent material, without essentially mixing with gas or vapour characterised by means for supplying liquid or other fluent material with pressurised or compressible container; with pump with pumps for liquids or other fluent material the pumps being driven by a hydraulic or a pneumatic fluid
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/11—Vats or other containers for liquids or other fluent materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D51/00—Closures not otherwise provided for
    • B65D51/16—Closures not otherwise provided for with means for venting air or gas
    • B65D51/1672—Closures not otherwise provided for with means for venting air or gas whereby venting occurs by manual actuation of the closure or other element
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B67—OPENING, CLOSING OR CLEANING BOTTLES, JARS OR SIMILAR CONTAINERS; LIQUID HANDLING
    • B67D—DISPENSING, DELIVERING OR TRANSFERRING LIQUIDS, NOT OTHERWISE PROVIDED FOR
    • B67D7/00—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes
    • B67D7/02—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B9/00—Spraying apparatus for discharge of liquids or other fluent material, without essentially mixing with gas or vapour
    • B05B9/03—Spraying apparatus for discharge of liquids or other fluent material, without essentially mixing with gas or vapour characterised by means for supplying liquid or other fluent material
    • B05B9/04—Spraying apparatus for discharge of liquids or other fluent material, without essentially mixing with gas or vapour characterised by means for supplying liquid or other fluent material with pressurised or compressible container; with pump
    • B05B9/08—Apparatus to be carried on or by a person, e.g. of knapsack type
    • B05B9/0805—Apparatus to be carried on or by a person, e.g. of knapsack type comprising a pressurised or compressible container for liquid or other fluent material
    • B05B9/0811—Apparatus to be carried on or by a person, e.g. of knapsack type comprising a pressurised or compressible container for liquid or other fluent material comprising air supplying means actuated by the operator to pressurise or compress the container
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0402—Apparatus for fluid treatment
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/53—Means to assemble or disassemble

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Quick-Acting Or Multi-Walled Pipe Joints (AREA)
  • Coating Apparatus (AREA)

Abstract

Ein Adapter für einen Flüssigkeitsbehälter (14) eines Versorgungssystems eines Nassprozessmoduls, insbesondere eines Belackungsmoduls, zur Behandlung von Substraten, insbesondere Wafern, hat ein Behälterteil (62) zur Befestigung am Flüssigkeitsbehälter (14) und ein Kanalteil (66) zur Befestigung am Versorgungssystem, wobei das Behälterteil (62) eine zentrale Öffnung (68) und eine Befestigungsvorrichtung zur Befestigung des Behälterteils (62) am Flüssigkeitsbehälter (14) aufweist. Dabei weist das Kanalteil (66) einen durchgängigen ersten Kanalabschnitt (42) und einen durchgängigen zweiten Kanalabschnitt (44) auf, wobei die ersten und zweiten Kanalabschnitte (42, 44) jeweils in die zentrale Öffnung (68) des Behälterteils (62) münden. Ferner sind eine Anschlussvorrichtung und ein Versorgungssystem beschrieben.
ATA50856/2021A 2020-07-29 2021-10-29 Adapter, Anschlussvorrichtung sowie Versorgungssystem AT524077B1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL2026157A NL2026157B1 (en) 2020-07-29 2020-07-29 Adapter, Connection Device and Supply System

Publications (3)

Publication Number Publication Date
AT524077A2 AT524077A2 (de) 2022-02-15
AT524077A3 true AT524077A3 (de) 2023-04-15
AT524077B1 AT524077B1 (de) 2023-07-15

Family

ID=73402010

Family Applications (1)

Application Number Title Priority Date Filing Date
ATA50856/2021A AT524077B1 (de) 2020-07-29 2021-10-29 Adapter, Anschlussvorrichtung sowie Versorgungssystem

Country Status (8)

Country Link
US (1) US11776827B2 (de)
KR (1) KR20220014855A (de)
CN (1) CN114082573A (de)
AT (1) AT524077B1 (de)
AU (1) AU2021204976A1 (de)
DE (1) DE102021119359A1 (de)
NL (1) NL2026157B1 (de)
TW (1) TW202222653A (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2025235870A1 (en) * 2024-05-09 2025-11-13 Henkel Ag & Co. Kgaa Dispensing sub-assembly and method of dispensing from a bottle with pressurized fluid

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030075566A1 (en) * 2001-10-20 2003-04-24 Ryan Priebe Apparatus and method for dispensing high-viscosity liquid
US20030189061A1 (en) * 1998-04-08 2003-10-09 Aicello Chemical Co., Ltd. Container for photoresist liquid
US20180111747A1 (en) * 2016-10-24 2018-04-26 Samsung Electronics Co., Ltd. Fluid dispenser

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US888488A (en) * 1907-03-25 1908-05-26 James C Gurley Gasolene-tank.
US3382886A (en) * 1965-12-15 1968-05-14 Willy Hesselmann Apparatus for circulating viscous substances with cleaning provisions
US4005226A (en) * 1975-06-09 1977-01-25 The Jim Dandy Company Multiple nozzle dispenser head
US4027789A (en) * 1975-09-10 1977-06-07 Glasrock Products, Inc. Foaming device for high solids content foamable liquids
US20050087237A1 (en) * 2003-10-27 2005-04-28 Advanced Technology Materials, Inc. Liquid dispensing and recirculating system with sensor
JP4441289B2 (ja) * 2004-02-25 2010-03-31 シスメックス株式会社 液体吸引装置
JP5048968B2 (ja) * 2006-05-08 2012-10-17 サーパス工業株式会社 コネクタ構造
AU2010273188B2 (en) * 2009-07-16 2014-10-09 Coopers Brewery Limited Beverage dispensing apparatus
JP5434781B2 (ja) * 2010-04-28 2014-03-05 東京エレクトロン株式会社 処理液供給機構
DE102011013864B4 (de) * 2011-03-15 2012-10-31 Fass-Frisch Gmbh Klebstoff-Dispenservorrichtung zur Anordnung auf einem Klebstoffcontainer und Klebstoffdispenseranlage
WO2015042109A1 (en) * 2013-09-20 2015-03-26 Advanced Technology Materials, Inc. Apparatus and method for pressure dispensing of high viscosity liquid-containing materials
US9458002B2 (en) * 2014-04-11 2016-10-04 Suss Microtec Lithography Gmbh Bottle supply system and bottle cap adapter
JP6495063B2 (ja) * 2015-03-26 2019-04-03 Hoya株式会社 レジスト液保管容器、レジスト液供給装置、レジスト液塗布装置、レジスト液保存装置、及びマスクブランクの製造方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030189061A1 (en) * 1998-04-08 2003-10-09 Aicello Chemical Co., Ltd. Container for photoresist liquid
US20030075566A1 (en) * 2001-10-20 2003-04-24 Ryan Priebe Apparatus and method for dispensing high-viscosity liquid
US20180111747A1 (en) * 2016-10-24 2018-04-26 Samsung Electronics Co., Ltd. Fluid dispenser

Also Published As

Publication number Publication date
TW202222653A (zh) 2022-06-16
DE102021119359A1 (de) 2022-02-03
AT524077A2 (de) 2022-02-15
AU2021204976A1 (en) 2022-02-17
US20220037168A1 (en) 2022-02-03
NL2026157B1 (en) 2022-03-29
CN114082573A (zh) 2022-02-25
AT524077B1 (de) 2023-07-15
KR20220014855A (ko) 2022-02-07
US11776827B2 (en) 2023-10-03

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