ATA366276A - PROCESS FOR THE DEPOSITION OF METALLIC RUTHENIUM - Google Patents

PROCESS FOR THE DEPOSITION OF METALLIC RUTHENIUM

Info

Publication number
ATA366276A
ATA366276A AT763662A AT366276A ATA366276A AT A366276 A ATA366276 A AT A366276A AT 763662 A AT763662 A AT 763662A AT 366276 A AT366276 A AT 366276A AT A366276 A ATA366276 A AT A366276A
Authority
AT
Austria
Prior art keywords
deposition
metallic ruthenium
ruthenium
metallic
Prior art date
Application number
AT763662A
Other languages
German (de)
Original Assignee
Inco Europ Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Inco Europ Ltd filed Critical Inco Europ Ltd
Publication of ATA366276A publication Critical patent/ATA366276A/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/06—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material
    • C23C16/18—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material from metallo-organic compounds

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Apparatuses And Processes For Manufacturing Resistors (AREA)
  • Manufacture And Refinement Of Metals (AREA)
  • Electrolytic Production Of Metals (AREA)
  • Contacts (AREA)
  • Physical Vapour Deposition (AREA)
AT763662A 1975-05-20 1976-05-19 PROCESS FOR THE DEPOSITION OF METALLIC RUTHENIUM ATA366276A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB21497/75A GB1499549A (en) 1975-05-20 1975-05-20 Deposition of ruthenium

Publications (1)

Publication Number Publication Date
ATA366276A true ATA366276A (en) 1977-12-15

Family

ID=10163942

Family Applications (1)

Application Number Title Priority Date Filing Date
AT763662A ATA366276A (en) 1975-05-20 1976-05-19 PROCESS FOR THE DEPOSITION OF METALLIC RUTHENIUM

Country Status (14)

Country Link
JP (1) JPS51141738A (en)
AT (1) ATA366276A (en)
AU (1) AU1369576A (en)
BE (1) BE842027A (en)
CA (1) CA1087040A (en)
CH (1) CH603809A5 (en)
DE (1) DE2622181A1 (en)
DK (1) DK220776A (en)
ES (1) ES448043A1 (en)
FR (1) FR2311859A1 (en)
GB (1) GB1499549A (en)
NL (1) NL7605002A (en)
SE (1) SE7605668L (en)
ZA (1) ZA762641B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AT410757B (en) * 1993-12-10 2003-07-25 Tyrolia Freizeitgeraete ski brake

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01301865A (en) * 1988-05-30 1989-12-06 Nippon Telegr & Teleph Corp <Ntt> Method and apparatus for growing thin film
JP2799763B2 (en) * 1990-07-11 1998-09-21 同和鉱業株式会社 Production method of thin film using organometallic complex
JP2802676B2 (en) * 1990-07-13 1998-09-24 同和鉱業株式会社 Method for producing thin film using 1,3-diketone organometallic complex
JP5792438B2 (en) * 2010-08-12 2015-10-14 東京エレクトロン株式会社 Film forming apparatus and film forming method
US9725794B2 (en) 2014-12-17 2017-08-08 Kennametal Inc. Cemented carbide articles and applications thereof

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AT410757B (en) * 1993-12-10 2003-07-25 Tyrolia Freizeitgeraete ski brake

Also Published As

Publication number Publication date
ZA762641B (en) 1977-04-27
SE7605668L (en) 1976-11-21
NL7605002A (en) 1976-11-23
DE2622181A1 (en) 1976-12-09
GB1499549A (en) 1978-02-01
ES448043A1 (en) 1977-07-01
AU1369576A (en) 1977-11-10
BE842027A (en) 1976-11-22
JPS51141738A (en) 1976-12-06
CA1087040A (en) 1980-10-07
DK220776A (en) 1976-11-21
CH603809A5 (en) 1978-08-31
FR2311859A1 (en) 1976-12-17

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Legal Events

Date Code Title Description
A1Z Withdrawn
EIH Change in the person of patent owner
ELJ Ceased due to non-payment of the annual fee