ATE102295T1 - Vorrichtung und verfahren zur erzeugung eines vakuums. - Google Patents

Vorrichtung und verfahren zur erzeugung eines vakuums.

Info

Publication number
ATE102295T1
ATE102295T1 AT89305183T AT89305183T ATE102295T1 AT E102295 T1 ATE102295 T1 AT E102295T1 AT 89305183 T AT89305183 T AT 89305183T AT 89305183 T AT89305183 T AT 89305183T AT E102295 T1 ATE102295 T1 AT E102295T1
Authority
AT
Austria
Prior art keywords
booster pump
bypass
chamber
evacuation
manner
Prior art date
Application number
AT89305183T
Other languages
English (en)
Inventor
Steven V Morgan
John E Madocks
Original Assignee
Boc Group Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Boc Group Inc filed Critical Boc Group Inc
Application granted granted Critical
Publication of ATE102295T1 publication Critical patent/ATE102295T1/de

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Diaphragms For Electromechanical Transducers (AREA)
  • Compressor (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
  • Physical Vapour Deposition (AREA)
AT89305183T 1988-05-24 1989-05-23 Vorrichtung und verfahren zur erzeugung eines vakuums. ATE102295T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US07/197,937 US4850806A (en) 1988-05-24 1988-05-24 Controlled by-pass for a booster pump
EP89305183A EP0343914B1 (de) 1988-05-24 1989-05-23 Vorrichtung und Verfahren zur Erzeugung eines Vakuums

Publications (1)

Publication Number Publication Date
ATE102295T1 true ATE102295T1 (de) 1994-03-15

Family

ID=22731348

Family Applications (1)

Application Number Title Priority Date Filing Date
AT89305183T ATE102295T1 (de) 1988-05-24 1989-05-23 Vorrichtung und verfahren zur erzeugung eines vakuums.

Country Status (7)

Country Link
US (1) US4850806A (de)
EP (1) EP0343914B1 (de)
JP (1) JPH0242186A (de)
AT (1) ATE102295T1 (de)
CA (1) CA1322740C (de)
DE (1) DE68913351T2 (de)
ES (1) ES2049814T3 (de)

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JP3074845B2 (ja) * 1991-10-08 2000-08-07 松下電器産業株式会社 流体回転装置
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JP3038432B2 (ja) * 1998-07-21 2000-05-08 セイコー精機株式会社 真空ポンプ及び真空装置
US6672171B2 (en) * 2001-07-16 2004-01-06 Mks Instruments, Inc. Combination differential and absolute pressure transducer for load lock control
US6589023B2 (en) * 2001-10-09 2003-07-08 Applied Materials, Inc. Device and method for reducing vacuum pump energy consumption
US6648609B2 (en) * 2002-04-05 2003-11-18 Berger Instruments, Inc. Pump as a pressure source for supercritical fluid chromatography involving pressure regulators and a precision orifice
GB0212757D0 (en) 2002-05-31 2002-07-10 Boc Group Plc A vacuum pumping system and method of controlling the same
GB0214273D0 (en) 2002-06-20 2002-07-31 Boc Group Plc Apparatus for controlling the pressure in a process chamber and method of operating same
US20040025940A1 (en) * 2002-08-06 2004-02-12 Taiwan Semiconductor Manufacturing Co., Ltd. Balance switch for controlling gas
DE10302764A1 (de) * 2003-01-24 2004-07-29 Pfeiffer Vacuum Gmbh Vakuumpumpsystem
JP4218756B2 (ja) * 2003-10-17 2009-02-04 株式会社荏原製作所 真空排気装置
GB0401396D0 (en) * 2004-01-22 2004-02-25 Boc Group Plc Pressure control method
PL1582607T3 (pl) * 2004-03-31 2009-04-30 Applied Mat Gmbh & Co Kg Układ śluzy dla urządzenia do obróbki próżniowej i sposób jego eksploatacji
GB0418771D0 (en) * 2004-08-20 2004-09-22 Boc Group Plc Evacuation of a load lock enclosure
GB0424198D0 (en) 2004-11-01 2004-12-01 Boc Group Plc Pumping arrangement
US7585141B2 (en) * 2005-02-01 2009-09-08 Varian Semiconductor Equipment Associates, Inc. Load lock system for ion beam processing
US20090140444A1 (en) * 2007-11-29 2009-06-04 Total Separation Solutions, Llc Compressed gas system useful for producing light weight drilling fluids
JP2009191754A (ja) * 2008-02-15 2009-08-27 Toyota Industries Corp 可変容量ギヤポンプ
US8215922B2 (en) 2008-06-24 2012-07-10 Aurora Sfc Systems, Inc. Compressible fluid pumping system for dynamically compensating compressible fluids over large pressure ranges
US9163618B2 (en) 2008-06-24 2015-10-20 Agilent Technologies, Inc. Automated conversion between SFC and HPLC
EP3502472B1 (de) * 2009-12-24 2020-09-09 Sumitomo Seika Chemicals Co., Ltd. Abgasvibrationsunterdrückungsvorrichtung in einer doppelvakuumpumpe
US8419936B2 (en) 2010-03-23 2013-04-16 Agilent Technologies, Inc. Low noise back pressure regulator for supercritical fluid chromatography
CA2795793A1 (en) 2010-04-20 2011-10-27 Sandvik Intellectual Property Ab Air compressor system and method of operation
GB201007814D0 (en) * 2010-05-11 2010-06-23 Edwards Ltd Vacuum pumping system
US20130017317A1 (en) * 2011-07-13 2013-01-17 Ring Kenneth M Load lock control method and apparatus
US10428807B2 (en) * 2011-12-09 2019-10-01 Applied Materials, Inc. Pump power consumption enhancement
GB2497957B (en) * 2011-12-23 2018-06-27 Edwards Ltd Vacuum pumping
CH706231B1 (fr) * 2012-03-05 2016-07-29 Ateliers Busch Sa Installation de pompage et procédé de contrôle d'une telle installation.
GB2501735B (en) * 2012-05-02 2015-07-22 Edwards Ltd Method and apparatus for warming up a vacuum pump arrangement
US11215180B2 (en) * 2012-06-28 2022-01-04 Sterling Industry Consult Gmbh Method and pump arrangement for evacuating a chamber
GB2510829B (en) 2013-02-13 2015-09-02 Edwards Ltd Pumping system
US9175528B2 (en) * 2013-03-15 2015-11-03 Hydril USA Distribution LLC Decompression to fill pressure
US20150221487A9 (en) * 2013-05-09 2015-08-06 Arash Akhavan Fomani Surface adsorption vacuum pumps and methods for producing adsorbate-free surfaces
CN104988462B (zh) * 2015-07-23 2017-05-31 京东方科技集团股份有限公司 一种坩埚装置
EP3491243A1 (de) * 2016-07-12 2019-06-05 Dr.-ing. K. Busch GmbH Evakuierungssystem
US11260330B2 (en) 2018-02-09 2022-03-01 Paul NEISER Filtration apparatus and method
US11167313B2 (en) 2018-02-09 2021-11-09 Paul NEISER Filtration apparatus and method
CN112041724A (zh) 2018-02-15 2020-12-04 P·奈瑟 用于选择性透射对象的设备和方法
US20210164451A1 (en) * 2018-02-23 2021-06-03 Paul NEISER Interaction method and apparatus
CN113056610B (zh) * 2018-11-15 2023-03-31 福斯管理公司 用于抽空超大体积的设备和方法
GB2579360A (en) * 2018-11-28 2020-06-24 Edwards Ltd Multiple chamber vacuum exhaust system
JP7138238B2 (ja) * 2019-03-25 2022-09-15 株式会社Kokusai Electric 基板処理装置、半導体装置の製造方法及びプログラム
PL4069976T3 (pl) * 2019-12-04 2024-10-14 Ateliers Busch S.A. Redundantny system pompowania i sposób pompowania za pomocą tego systemu pompowania
JP7650633B2 (ja) 2020-10-06 2025-03-25 エドワーズ株式会社 真空排気システム
CN116110814A (zh) * 2021-11-11 2023-05-12 细美事有限公司 基板处理装置
US12448957B2 (en) * 2023-10-23 2025-10-21 Shawn Kahan Dual motor pump assembly

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US2449217A (en) * 1944-06-14 1948-09-14 Republic Flow Meters Co Regulating apparatus
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US3642384A (en) * 1969-11-19 1972-02-15 Henry Huse Multistage vacuum pumping system
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JPS57195736A (en) * 1981-05-29 1982-12-01 Shin Etsu Chem Co Ltd Vacuum treatment apparatus
US4504194A (en) * 1982-05-24 1985-03-12 Varian Associates, Inc. Air lock vacuum pumping methods and apparatus
JPS61192871A (ja) * 1985-02-20 1986-08-27 Tokico Ltd 真空ポンプの圧力制御装置
GB2164093B (en) * 1984-09-05 1988-01-20 Dowty Fuel Syst Ltd Controlling compressors in pure-air generators
JPS62243982A (ja) * 1986-04-14 1987-10-24 Hitachi Ltd ２段型真空ポンプ装置およびその運転方法

Also Published As

Publication number Publication date
DE68913351T2 (de) 1994-08-04
JPH0242186A (ja) 1990-02-13
EP0343914A1 (de) 1989-11-29
EP0343914B1 (de) 1994-03-02
ES2049814T3 (es) 1994-05-01
DE68913351D1 (de) 1994-04-07
US4850806A (en) 1989-07-25
CA1322740C (en) 1993-10-05

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