ATE112053T1 - Wandler mit einer membran und eine vielzahl von fühlelementen. - Google Patents

Wandler mit einer membran und eine vielzahl von fühlelementen.

Info

Publication number
ATE112053T1
ATE112053T1 AT90911117T AT90911117T ATE112053T1 AT E112053 T1 ATE112053 T1 AT E112053T1 AT 90911117 T AT90911117 T AT 90911117T AT 90911117 T AT90911117 T AT 90911117T AT E112053 T1 ATE112053 T1 AT E112053T1
Authority
AT
Austria
Prior art keywords
sensing elements
transducer
membrane
variety
piezoresistors
Prior art date
Application number
AT90911117T
Other languages
English (en)
Inventor
Stephen Clark Terry
John Hallock Jerman
Original Assignee
Ic Sensors Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ic Sensors Inc filed Critical Ic Sensors Inc
Application granted granted Critical
Publication of ATE112053T1 publication Critical patent/ATE112053T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0054—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements integral with a semiconducting diaphragm
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/18—Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measuring Fluid Pressure (AREA)
  • Air Bags (AREA)
AT90911117T 1989-06-22 1990-06-20 Wandler mit einer membran und eine vielzahl von fühlelementen. ATE112053T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/369,899 US5058435A (en) 1989-06-22 1989-06-22 Single diaphragm transducer with multiple sensing elements

Publications (1)

Publication Number Publication Date
ATE112053T1 true ATE112053T1 (de) 1994-10-15

Family

ID=23457393

Family Applications (1)

Application Number Title Priority Date Filing Date
AT90911117T ATE112053T1 (de) 1989-06-22 1990-06-20 Wandler mit einer membran und eine vielzahl von fühlelementen.

Country Status (7)

Country Link
US (1) US5058435A (de)
EP (1) EP0429641B1 (de)
JP (1) JP2989004B2 (de)
AT (1) ATE112053T1 (de)
CA (1) CA2035030C (de)
DE (1) DE69012748T2 (de)
WO (1) WO1990015976A1 (de)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3039934B2 (ja) * 1989-06-13 2000-05-08 コーリン電子株式会社 圧脈波検出装置
US5184515A (en) * 1989-06-22 1993-02-09 Ic Sensors, Inc. Single diaphragm transducer with multiple sensing elements
US5179956A (en) * 1990-07-06 1993-01-19 Colin Electronics Co., Ltd. Contact pressure sensor
JP3203560B2 (ja) * 1991-12-13 2001-08-27 ハネウエル・インコーポレーテッド 圧電抵抗シリコン圧力センサ設計
JP3624597B2 (ja) * 1996-12-10 2005-03-02 株式会社デンソー 半導体装置及びその製造方法
US6044711A (en) * 1997-01-10 2000-04-04 Psi-Tronix, Inc. Force sensing apparatus
US5898359A (en) * 1997-12-19 1999-04-27 Delco Electronics Corp. Diffusion-barrier materials for thick-film piezoresistors and sensors formed therewith
US6142021A (en) * 1998-08-21 2000-11-07 Motorola, Inc. Selectable pressure sensor
US7290441B2 (en) * 2001-10-31 2007-11-06 Rheosense, Inc. Micro slit viscometer with monolithically integrated pressure sensors
EP1640696B1 (de) * 2004-09-24 2010-06-09 Grundfos A/S Drucksensor
US7412893B2 (en) * 2006-03-23 2008-08-19 Rosemount Inc. Redundant mechanical and electronic remote seal system
US8132465B1 (en) * 2007-08-01 2012-03-13 Silicon Microstructures, Inc. Sensor element placement for package stress compensation
WO2011139719A2 (en) 2010-04-26 2011-11-10 Rheosense, Inc. Portable viscometer
WO2015157698A1 (en) 2014-04-11 2015-10-15 Rheosense, Inc. Viscometer and methods for using the same
US9719872B2 (en) * 2015-09-29 2017-08-01 Rosemount Inc. High over-pressure capable silicon die pressure sensor with extended pressure signal output
US10060813B2 (en) 2015-09-29 2018-08-28 Rosemount Inc. High over-pressure capable silicon die pressure sensor
US10203258B2 (en) 2016-09-26 2019-02-12 Rosemount Inc. Pressure sensor diaphragm with overpressure protection
US11092504B2 (en) * 2019-05-21 2021-08-17 Rosemount Aerospace Inc. Micromechanical redundant piezoresistive array pressure sensor
US12078582B2 (en) 2021-05-10 2024-09-03 Rheosense, Inc. Viscometer with reduced dead-volume and high dynamic range

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DK127449B (da) * 1970-05-14 1973-11-05 Ceskoslovenska Akademie Ved Tensometrisk føler for tryk i luftarter og væsker.
US3820401A (en) * 1972-11-07 1974-06-28 Sperry Rand Corp Piezoresistive bridge transducer
US4207551A (en) * 1976-03-12 1980-06-10 Hans Kautzky Pressure transducer
US4359498A (en) * 1981-04-20 1982-11-16 Kulite Semiconductor Products, Inc. Transducer structure employing vertically walled diaphragms with quasi rectangular active areas
JPH073380B2 (ja) * 1983-05-31 1995-01-18 株式会社日立製作所 集積化圧力センサ
US4528855A (en) * 1984-07-02 1985-07-16 Itt Corporation Integral differential and static pressure transducer
US4766655A (en) * 1984-10-30 1988-08-30 Burr-Brown Corporation Method for fabricating a compensated silicon pressure sensing device
US4665754A (en) * 1985-04-08 1987-05-19 Honeywell Inc. Pressure transducer
US4777826A (en) * 1985-06-20 1988-10-18 Rosemount Inc. Twin film strain gauge system
US4771638A (en) * 1985-09-30 1988-09-20 Kabushiki Kaisha Toyota Chuo Kenkyusho Semiconductor pressure sensor
US4702113A (en) * 1986-04-04 1987-10-27 Dynisco, Inc. Pressure transducer
US4809536A (en) * 1986-11-06 1989-03-07 Sumitomo Electric Industries, Ltd. Method of adjusting bridge circuit of semiconductor pressure sensor
US4745812A (en) * 1987-03-25 1988-05-24 The United States Of America As Represented By The Secretary Of The Army Triaxial tactile sensor
DE3742673A1 (de) * 1987-12-16 1989-06-29 Siemens Ag Mikro-spannungssensor

Also Published As

Publication number Publication date
EP0429641A1 (de) 1991-06-05
CA2035030A1 (en) 1990-12-23
JP2989004B2 (ja) 1999-12-13
DE69012748T2 (de) 1995-01-12
CA2035030C (en) 2002-01-15
JPH04500411A (ja) 1992-01-23
EP0429641B1 (de) 1994-09-21
DE69012748D1 (de) 1994-10-27
US5058435A (en) 1991-10-22
WO1990015976A1 (en) 1990-12-27
EP0429641A4 (en) 1992-03-11

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Legal Events

Date Code Title Description
UEP Publication of translation of european patent specification
REN Ceased due to non-payment of the annual fee