ATE115645T1 - Verfahren zum aufdampfen eines diamantähnlichen films auf ein niedrig schmelzendes substrat. - Google Patents

Verfahren zum aufdampfen eines diamantähnlichen films auf ein niedrig schmelzendes substrat.

Info

Publication number
ATE115645T1
ATE115645T1 AT91300010T AT91300010T ATE115645T1 AT E115645 T1 ATE115645 T1 AT E115645T1 AT 91300010 T AT91300010 T AT 91300010T AT 91300010 T AT91300010 T AT 91300010T AT E115645 T1 ATE115645 T1 AT E115645T1
Authority
AT
Austria
Prior art keywords
substrate
chamber
diamond
pressure
differentially evacuated
Prior art date
Application number
AT91300010T
Other languages
English (en)
Inventor
Michael J Cumbo
Original Assignee
Bausch & Lomb
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bausch & Lomb filed Critical Bausch & Lomb
Application granted granted Critical
Publication of ATE115645T1 publication Critical patent/ATE115645T1/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0605—Carbon
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Vapour Deposition (AREA)
  • Carbon And Carbon Compounds (AREA)
AT91300010T 1990-01-29 1991-01-02 Verfahren zum aufdampfen eines diamantähnlichen films auf ein niedrig schmelzendes substrat. ATE115645T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US41784990A 1990-01-29 1990-01-29

Publications (1)

Publication Number Publication Date
ATE115645T1 true ATE115645T1 (de) 1994-12-15

Family

ID=23655625

Family Applications (1)

Application Number Title Priority Date Filing Date
AT91300010T ATE115645T1 (de) 1990-01-29 1991-01-02 Verfahren zum aufdampfen eines diamantähnlichen films auf ein niedrig schmelzendes substrat.

Country Status (3)

Country Link
EP (1) EP0440326B1 (de)
AT (1) ATE115645T1 (de)
DE (1) DE69105764T2 (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5401543A (en) * 1993-11-09 1995-03-28 Minnesota Mining And Manufacturing Company Method for forming macroparticle-free DLC films by cathodic arc discharge
GB9405029D0 (en) * 1994-03-15 1994-04-27 Franks Joseph Dr Improved catheters and other tubular inserts
US5569487A (en) * 1995-01-23 1996-10-29 General Electric Company Capacitor dielectrics of silicon-doped amorphous hydrogenated carbon
GB9709071D0 (en) * 1997-05-02 1997-06-25 Howmedica A process for improving start up and steady rate friction of soft/compliant polyurethanes
CN1049931C (zh) * 1997-07-10 2000-03-01 北京理工大学 制备类金刚石薄膜的电化学沉积方法及其装置
MY134338A (en) * 2001-08-24 2007-12-31 Asml Us Inc Atmospheric pressure wafer processing reactor having an internal pressure control system and method
US7866342B2 (en) 2002-12-18 2011-01-11 Vapor Technologies, Inc. Valve component for faucet
US8220489B2 (en) 2002-12-18 2012-07-17 Vapor Technologies Inc. Faucet with wear-resistant valve component
US7866343B2 (en) 2002-12-18 2011-01-11 Masco Corporation Of Indiana Faucet
US8555921B2 (en) 2002-12-18 2013-10-15 Vapor Technologies Inc. Faucet component with coating
DE102013014147B4 (de) * 2013-08-23 2017-02-16 Centrotherm Photovoltaics Ag Verfahren und vorrichtung zum detektieren einer plasmazündung

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3756193A (en) * 1972-05-01 1973-09-04 Battelle Memorial Institute Coating apparatus
US4725345A (en) * 1985-04-22 1988-02-16 Kabushiki Kaisha Kenwood Method for forming a hard carbon thin film on article and applications thereof
US4777090A (en) * 1986-11-03 1988-10-11 Ovonic Synthetic Materials Company Coated article and method of manufacturing the article

Also Published As

Publication number Publication date
DE69105764D1 (de) 1995-01-26
EP0440326B1 (de) 1994-12-14
EP0440326A1 (de) 1991-08-07
DE69105764T2 (de) 1995-04-27

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Legal Events

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