JPS6428366A - Crucible of vacuum deposition device - Google Patents
Crucible of vacuum deposition deviceInfo
- Publication number
- JPS6428366A JPS6428366A JP18432087A JP18432087A JPS6428366A JP S6428366 A JPS6428366 A JP S6428366A JP 18432087 A JP18432087 A JP 18432087A JP 18432087 A JP18432087 A JP 18432087A JP S6428366 A JPS6428366 A JP S6428366A
- Authority
- JP
- Japan
- Prior art keywords
- crucible
- temp
- graphite
- vacuum deposition
- deposition device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001771 vacuum deposition Methods 0.000 title abstract 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 abstract 2
- 239000011248 coating agent Substances 0.000 abstract 2
- 238000000576 coating method Methods 0.000 abstract 2
- 229910002804 graphite Inorganic materials 0.000 abstract 2
- 239000010439 graphite Substances 0.000 abstract 2
- 229910052582 BN Inorganic materials 0.000 abstract 1
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 abstract 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract 1
- 230000015556 catabolic process Effects 0.000 abstract 1
- 238000007796 conventional method Methods 0.000 abstract 1
- 238000006731 degradation reaction Methods 0.000 abstract 1
- 238000001514 detection method Methods 0.000 abstract 1
- 230000008020 evaporation Effects 0.000 abstract 1
- 238000001704 evaporation Methods 0.000 abstract 1
- 238000010438 heat treatment Methods 0.000 abstract 1
- 239000012212 insulator Substances 0.000 abstract 1
- 239000000463 material Substances 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/243—Crucibles for source material
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
PURPOSE:To provide a crucible for a vacuum deposition device which allows the exacter detection of the crucible temp. than by the conventional method by constituting the crucible in such a manner that a sensor is brought into contact with an exposed part of the crucible coated with a conductive coating film. CONSTITUTION:A high voltage is impressed between a filament 4 enclosing the circumference of the crucible 1 disposed in a vacuum chamber 3 and the coating film 1b which consists of graphite and is coated on the crucible 1 from a power supply 6. The crucible 1 is thereby subjected to electron bombardment heating to evaporate a material M to be deposited by evaporation in the crucible 1, by which the vapor deposited film is formed on the surface of a substrate, etc. The temp. of the crucible 1 is detected during this time by bringing a thermocouple 5 placed at a ground potential into contact with the exposed part 1c of the crucible body 1a, i.e., an insulating body. The temp. of the crucible 1 is detected by this method without using an insulator made of alumina as heretofore. Since pyrolithic boron nitride (PBN) and graphite do not react with each other at about 2,000 deg.C, the degradation in the quality of the vapor deposited film is obviated.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18432087A JPS6428366A (en) | 1987-07-22 | 1987-07-22 | Crucible of vacuum deposition device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18432087A JPS6428366A (en) | 1987-07-22 | 1987-07-22 | Crucible of vacuum deposition device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6428366A true JPS6428366A (en) | 1989-01-30 |
Family
ID=16151269
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18432087A Pending JPS6428366A (en) | 1987-07-22 | 1987-07-22 | Crucible of vacuum deposition device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6428366A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04231459A (en) * | 1990-06-06 | 1992-08-20 | Union Carbide Coatings Service Technol Corp | Boron nitride crucible and method for manufacturing same |
| GB2306512A (en) * | 1995-10-27 | 1997-05-07 | Leybold Ag | Electron beam vacuum coating plant having a crucible of high melting material |
| JP2006233304A (en) * | 2005-02-28 | 2006-09-07 | Toppan Printing Co Ltd | Deposition boat and sheath thermocouple |
-
1987
- 1987-07-22 JP JP18432087A patent/JPS6428366A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04231459A (en) * | 1990-06-06 | 1992-08-20 | Union Carbide Coatings Service Technol Corp | Boron nitride crucible and method for manufacturing same |
| GB2306512A (en) * | 1995-10-27 | 1997-05-07 | Leybold Ag | Electron beam vacuum coating plant having a crucible of high melting material |
| GB2306512B (en) * | 1995-10-27 | 1999-06-16 | Leybold Ag | Vacuum coating plant with a crucible disposed in the vacuum chamber for holding material to be evaporated |
| JP2006233304A (en) * | 2005-02-28 | 2006-09-07 | Toppan Printing Co Ltd | Deposition boat and sheath thermocouple |
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