ATE115938T1 - Verpackungs- und handhabungssystem für folien. - Google Patents

Verpackungs- und handhabungssystem für folien.

Info

Publication number
ATE115938T1
ATE115938T1 AT90118340T AT90118340T ATE115938T1 AT E115938 T1 ATE115938 T1 AT E115938T1 AT 90118340 T AT90118340 T AT 90118340T AT 90118340 T AT90118340 T AT 90118340T AT E115938 T1 ATE115938 T1 AT E115938T1
Authority
AT
Austria
Prior art keywords
pellicle
holder
assembly
handling system
film packaging
Prior art date
Application number
AT90118340T
Other languages
English (en)
Inventor
David Alan Beldyk
Cramer Chesterfield Hegeman
Original Assignee
Du Pont
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Du Pont filed Critical Du Pont
Application granted granted Critical
Publication of ATE115938T1 publication Critical patent/ATE115938T1/de

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/62—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • H10P72/19—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers
    • H10P72/1902—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers specially adapted for a single substrate
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/66—Containers specially adapted for masks, mask blanks or pellicles; Preparation thereof
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • H10P72/19—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers
    • H10P72/1906—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers specially adapted for containing masks, reticles or pellicles
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • H10P72/19—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers
    • H10P72/1921—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers characterised by substrate supports
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • H10P72/19—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers
    • H10P72/1922—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers characterised by the construction of the closed carrier

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Packaging Frangible Articles (AREA)
  • Laminated Bodies (AREA)
  • Packaging Of Special Articles (AREA)
  • Basic Packing Technique (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
AT90118340T 1989-09-27 1990-09-25 Verpackungs- und handhabungssystem für folien. ATE115938T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/413,352 US5042655A (en) 1989-09-27 1989-09-27 Pellicle packaging and handling system

Publications (1)

Publication Number Publication Date
ATE115938T1 true ATE115938T1 (de) 1995-01-15

Family

ID=23636912

Family Applications (1)

Application Number Title Priority Date Filing Date
AT90118340T ATE115938T1 (de) 1989-09-27 1990-09-25 Verpackungs- und handhabungssystem für folien.

Country Status (7)

Country Link
US (1) US5042655A (de)
EP (1) EP0420122B1 (de)
JP (1) JP2921955B2 (de)
KR (1) KR940000101B1 (de)
AT (1) ATE115938T1 (de)
CA (1) CA2026248A1 (de)
DE (1) DE69015301T2 (de)

Families Citing this family (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD334283S (en) 1991-07-01 1993-03-30 Edmund Scientific Company Folding lens case
US5168993A (en) * 1991-08-26 1992-12-08 Yen Yung Tsai Optical pellicle holder
US5749469A (en) * 1992-05-15 1998-05-12 Fluoroware, Inc. Wafer carrier
US5305878A (en) * 1993-04-01 1994-04-26 Yen Yung Tsai Packaged optical pellicle
USD364739S (en) 1993-08-19 1995-12-05 Hoya Corporation Case for camera filter
US5440458A (en) * 1993-11-02 1995-08-08 Volk; Donald A. Illuminated lens case
USD357579S (en) 1994-04-21 1995-04-25 Abrams Richard W Contact lens package
USD357803S (en) 1994-04-21 1995-05-02 Abrams Richard W Package for a contact lens
USD357352S (en) 1994-04-21 1995-04-18 Abrams Richard W Contact lens package
USD363161S (en) 1994-04-21 1995-10-17 Johnson & Johnson Vision Products, Inc. Contact lens package
USD365679S (en) 1994-04-21 1996-01-02 Johnson & Johnson Vision Products, Inc. Contact lens package
USD362962S (en) 1994-04-21 1995-10-10 Johnson & Johnson Vision Products, Inc. Package for a contact lens
WO1996007199A2 (en) * 1994-08-31 1996-03-07 Heraeus Quarzglas Gmbh Quartz glass jig for the heat treatment of silicon wafers and method and device for producing same
JP3143337B2 (ja) * 1994-10-12 2001-03-07 信越ポリマー株式会社 ペリクル収納容器
USD380898S (en) * 1995-01-26 1997-07-15 Francis John Lovell Contact lens storage container
US5720386A (en) * 1996-08-29 1998-02-24 Allsop, Inc. Storage container for a disk-shaped recording medium
JP2001201847A (ja) * 2000-01-19 2001-07-27 Shin Etsu Chem Co Ltd ペリクル容器
US6736386B1 (en) * 2001-04-10 2004-05-18 Dupont Photomasks, Inc. Covered photomask holder and method of using the same
US6734445B2 (en) * 2001-04-23 2004-05-11 Intel Corporation Mechanized retractable pellicles and methods of use
JP4052947B2 (ja) * 2001-05-17 2008-02-27 株式会社荏原製作所 基板搬送容器
US6875282B2 (en) 2001-05-17 2005-04-05 Ebara Corporation Substrate transport container
JP2005123292A (ja) * 2003-10-15 2005-05-12 Canon Inc 収納装置、当該収納装置を用いた露光方法
USD517906S1 (en) * 2004-05-04 2006-03-28 St. Shine Optical Co., Ltd. Package for contact lenses
JP4286194B2 (ja) * 2004-08-18 2009-06-24 信越化学工業株式会社 ペリクルフレーム、および該フレームを用いたフォトリソグラフィー用ペリクル
US20060186011A1 (en) * 2005-02-23 2006-08-24 Uneka Concepts, Inc. Modular object display, security and storage system
JP4391435B2 (ja) * 2005-03-22 2009-12-24 信越化学工業株式会社 ペリクル収納容器
JP5583140B2 (ja) * 2008-12-02 2014-09-03 アリゾナ・ボード・オブ・リージェンツ，フォー・アンド・オン・ビハーフ・オブ・アリゾナ・ステート・ユニバーシティ フレキシブル基板アセンブリを準備する方法およびその方法により準備されたフレキシブル基板アセンブリ
US8268514B2 (en) * 2009-01-26 2012-09-18 Taiwan Semiconductor Manufacturing Co., Ltd. Pellicle mounting method and apparatus
US8158961B2 (en) * 2009-07-31 2012-04-17 Sciconsult, Inc. Ophthalmic lens case equipped with an ultraviolet light source
US9588417B2 (en) * 2015-05-28 2017-03-07 Taiwan Semiconductor Manufacturing Company, Ltd. Photomask pellicle
KR102670392B1 (ko) * 2017-06-15 2024-05-30 에이에스엠엘 네델란즈 비.브이. 펠리클 및 펠리클 조립체
KR102763336B1 (ko) 2018-07-04 2025-02-07 에이에스엠엘 네델란즈 비.브이. 위치설정 및 클램핑 경화를 위한 장치
JP7176165B2 (ja) * 2020-04-24 2022-11-22 家登精密工業股▲ふん▼有限公司 Ｅｕｖレチクルポッド
USD977961S1 (en) * 2021-08-10 2023-02-14 MV Gold AG Capsule casing

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3489265A (en) * 1967-05-22 1970-01-13 Product Packaging Corp Fragile plate carrier
US3532213A (en) * 1969-03-26 1970-10-06 Varian Associates Holder for inspection,shipping and storage of glass optical elements
US3615006A (en) * 1969-06-26 1971-10-26 Ibm Storage container
US4549843A (en) * 1983-03-15 1985-10-29 Micronix Partners Mask loading apparatus, method and cassette
US4470508A (en) * 1983-08-19 1984-09-11 Micro Lithography, Inc. Dustfree packaging container and method
DE3481049D1 (de) * 1983-08-29 1990-02-22 Yung Tsai Yen Staubfreier behaelter und dessen herstellung.
US4776462A (en) * 1985-09-27 1988-10-11 Canon Kabushiki Kaisha Container for a sheet-like article
US4697701A (en) * 1986-05-30 1987-10-06 Inko Industrial Corporation Dust free storage container for a membrane assembly such as a pellicle and its method of use
JPS63178958A (ja) * 1986-12-27 1988-07-23 キヤノン株式会社 防塵容器
US4842136A (en) * 1987-02-13 1989-06-27 Canon Kabushiki Kaisha Dust-proof container having improved construction for holding a reticle therein

Also Published As

Publication number Publication date
JP2921955B2 (ja) 1999-07-19
CA2026248A1 (en) 1991-03-28
US5042655A (en) 1991-08-27
KR910006124A (ko) 1991-04-27
EP0420122A1 (de) 1991-04-03
JPH03229254A (ja) 1991-10-11
EP0420122B1 (de) 1994-12-21
DE69015301D1 (de) 1995-02-02
DE69015301T2 (de) 1995-06-29
KR940000101B1 (ko) 1994-01-05

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Legal Events

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