ATE127636T1 - Verfahren und vorrichtung zur kühlung heisser stellen in der platte eines linearmotorsystems. - Google Patents

Verfahren und vorrichtung zur kühlung heisser stellen in der platte eines linearmotorsystems.

Info

Publication number
ATE127636T1
ATE127636T1 AT92108760T AT92108760T ATE127636T1 AT E127636 T1 ATE127636 T1 AT E127636T1 AT 92108760 T AT92108760 T AT 92108760T AT 92108760 T AT92108760 T AT 92108760T AT E127636 T1 ATE127636 T1 AT E127636T1
Authority
AT
Austria
Prior art keywords
coolant
linear motor
hot spots
motor system
plate
Prior art date
Application number
AT92108760T
Other languages
English (en)
Inventor
Thomas D Schmidt
Original Assignee
Megamation Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Megamation Inc filed Critical Megamation Inc
Application granted granted Critical
Publication of ATE127636T1 publication Critical patent/ATE127636T1/de

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K9/00—Arrangements for cooling or ventilating
    • H02K9/19—Arrangements for cooling or ventilating for machines with closed casing and closed-circuit cooling using a liquid cooling medium, e.g. oil
    • H02K9/197—Arrangements for cooling or ventilating for machines with closed casing and closed-circuit cooling using a liquid cooling medium, e.g. oil in which the rotor or stator space is fluid-tight, e.g. to provide for different cooling media for rotor and stator
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K1/00—Details of the magnetic circuit
    • H02K1/06—Details of the magnetic circuit characterised by the shape, form or construction
    • H02K1/12—Stationary parts of the magnetic circuit
    • H02K1/20—Stationary parts of the magnetic circuit with channels or ducts for flow of cooling medium
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K2201/00—Specific aspects not provided for in the other groups of this subclass relating to the magnetic circuits
    • H02K2201/18—Machines moving with multiple degrees of freedom

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Electromagnetism (AREA)
  • Linear Motors (AREA)
  • Manufacture Of Motors, Generators (AREA)
AT92108760T 1991-06-04 1992-05-25 Verfahren und vorrichtung zur kühlung heisser stellen in der platte eines linearmotorsystems. ATE127636T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/709,899 US5138206A (en) 1991-06-04 1991-06-04 Method and apparatus for cooling hot spots in platen of linear motor system

Publications (1)

Publication Number Publication Date
ATE127636T1 true ATE127636T1 (de) 1995-09-15

Family

ID=24851750

Family Applications (1)

Application Number Title Priority Date Filing Date
AT92108760T ATE127636T1 (de) 1991-06-04 1992-05-25 Verfahren und vorrichtung zur kühlung heisser stellen in der platte eines linearmotorsystems.

Country Status (5)

Country Link
US (1) US5138206A (de)
EP (1) EP0517060B1 (de)
JP (1) JP2668482B2 (de)
AT (1) ATE127636T1 (de)
DE (1) DE69204551D1 (de)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5386621A (en) * 1993-08-16 1995-02-07 Ford Motor Company Flexible assembly cell
US5523640A (en) * 1994-04-22 1996-06-04 Cincinnati Milacron Inc. Liquid cooling for electrical components of a plastics processing machine
TW448488B (en) 1998-03-19 2001-08-01 Nippon Kogaku Kk Planar motor apparatus, base stage apparatus, exposure apparatus as well as its manufacturing method, and the equipment as well as its manufacturing method
US6114781A (en) * 1999-02-26 2000-09-05 Nikon Corporation Cooling system for a linear or planar motor
US6313550B1 (en) 2000-02-02 2001-11-06 Nikon Corporation Coil mounting and cooling system for an electric motor
US20040070938A1 (en) * 2001-01-04 2004-04-15 Hazelton Andrew J. Circulating system for a conductor
US20040252287A1 (en) * 2003-06-11 2004-12-16 Michael Binnard Reaction frame assembly that functions as a reaction mass
US6956308B2 (en) * 2003-07-15 2005-10-18 Nikon Corporation Dual flow circulation system for a mover
US7355308B2 (en) 2003-08-21 2008-04-08 Nikon Corporation Mover combination with two circulation flows
US7221433B2 (en) * 2004-01-28 2007-05-22 Nikon Corporation Stage assembly including a reaction assembly having a connector assembly
US6979920B2 (en) * 2004-01-30 2005-12-27 Nikon Corporation Circulation housing for a mover
CN100521468C (zh) * 2004-08-20 2009-07-29 清华大学 永磁同步平面电动机
US7548303B2 (en) 2004-09-04 2009-06-16 Nikon Corporation Cooling assembly for a stage
US20080073563A1 (en) * 2006-07-01 2008-03-27 Nikon Corporation Exposure apparatus that includes a phase change circulation system for movers
US7916267B2 (en) * 2006-08-29 2011-03-29 Asml Netherlands B.V. Lithographic apparatus, and motor cooling device
DE102007035793A1 (de) 2007-07-04 2009-01-08 Institut für Mikroelektronik- und Mechatronik-Systeme gGmbH Präzisionsplanarpositionieranordnung
CN102624154A (zh) * 2012-04-13 2012-08-01 华域汽车电动系统有限公司 一种螺旋轴向循环式电机冷却水道结构
US20150075751A1 (en) * 2013-09-16 2015-03-19 Nikon Corporation Fluid distribution network for large stator motor

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3273727A (en) * 1966-09-20 Load handling apparatus
US3704078A (en) * 1971-01-22 1972-11-28 Hydr O Matic Pump Co Deep well type pump
DE2202426B2 (de) * 1972-01-19 1975-11-06 Conz Elektricitaets-Gesellschaft Mbh, 2000 Hamburg Verfahren zur Kühlung des Sekundärteils eines Linearmotors großer Leistung bei Stillstand oder bei Betrieb mit relativ kleinen Geschwindigkeiten sowie Einrichtung zur Durchführung des Verfahrens
FR2330189A1 (fr) * 1975-10-30 1977-05-27 Guimbal Jean Moteur lineaire de grande puissance et a grande vitesse
JPS5431517A (en) * 1977-08-16 1979-03-08 Toshiba Corp Construction for linear motor secondary plate
JPS5948868B2 (ja) * 1982-09-24 1984-11-29 ビ−エイエスエフ・ワイアンドツト・コ−ポレイシヨン 有機シリコ−ンスルホネ−ト及びシリケ−トの共重合体を含有する内燃機関の冷却系統用不凍濃縮液及び冷却剤
JPS60118039A (ja) * 1983-11-26 1985-06-25 Sumitomo Electric Ind Ltd 冷却装置付きリニアモ−タ
US4654571A (en) * 1985-09-16 1987-03-31 Hinds Walter E Single plane orthogonally movable drive system
JPS62100161A (ja) * 1985-10-23 1987-05-09 Shin Etsu Chem Co Ltd 平面モ−タ
US4749921A (en) * 1986-07-21 1988-06-07 Anwar Chitayat Linear motor with non-magnetic armature
US4906878A (en) * 1986-10-08 1990-03-06 Fanamation, Inc. Fluid circulated linear motor for robotic systems
JPS63157643A (ja) * 1986-12-18 1988-06-30 Canon Inc リニアモ−タ
US4823062A (en) * 1987-07-23 1989-04-18 Megamation, Incorporated Method and apparatus for precision control of linear motors and the like employing a closed loop technique
US4839545A (en) * 1987-10-16 1989-06-13 Anwar Chitayat Cooling system for linear motor
US4916340A (en) * 1988-01-22 1990-04-10 Canon Kabushiki Kaisha Movement guiding mechanism
FR2627913B1 (fr) * 1988-02-25 1992-02-07 Labavia Ralentisseur electromagnetique, moyens d'alimentation associes et application a un vehicule
JPH0315249A (ja) * 1989-02-13 1991-01-23 Canon Electron Inc ダブルロータ型モータ

Also Published As

Publication number Publication date
EP0517060B1 (de) 1995-09-06
EP0517060A1 (de) 1992-12-09
JPH06205575A (ja) 1994-07-22
US5138206A (en) 1992-08-11
JP2668482B2 (ja) 1997-10-27
DE69204551D1 (de) 1995-10-12

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Legal Events

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RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties