ATE127818T1 - Reflexion vorbeugender beschichtungsfilm und verfahren zu dessen herstellung. - Google Patents

Reflexion vorbeugender beschichtungsfilm und verfahren zu dessen herstellung.

Info

Publication number
ATE127818T1
ATE127818T1 AT88306309T AT88306309T ATE127818T1 AT E127818 T1 ATE127818 T1 AT E127818T1 AT 88306309 T AT88306309 T AT 88306309T AT 88306309 T AT88306309 T AT 88306309T AT E127818 T1 ATE127818 T1 AT E127818T1
Authority
AT
Austria
Prior art keywords
production
coating film
reflection
reflection preventing
preventing coating
Prior art date
Application number
AT88306309T
Other languages
English (en)
Inventor
Tokinori C O Mitsui Petro Agou
Waki-Cho
Hitomi C O Mitsui Pe Matsuzaki
Waki-Cho Chome
Masahide C O Mitsui Pet Tanaka
Takamasa C O Mitsui Pe Tsumoto
Masaaki C O Mitsui Pe Kawasaki
Takami C O Mitsui Pe Nishikawa
Shuji C O Mitsui Petroc Minami
Original Assignee
Mitsui Petrochemical Ind
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP17111887A external-priority patent/JPH0792601B2/ja
Priority claimed from JP25810087A external-priority patent/JPH0748106B2/ja
Priority claimed from JP63016320A external-priority patent/JPH01191853A/ja
Priority claimed from JP63016321A external-priority patent/JPH01191854A/ja
Priority claimed from JP63016319A external-priority patent/JPH01191852A/ja
Priority claimed from JP4709188A external-priority patent/JP2551087B2/ja
Application filed by Mitsui Petrochemical Ind filed Critical Mitsui Petrochemical Ind
Application granted granted Critical
Publication of ATE127818T1 publication Critical patent/ATE127818T1/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B23/00—Layered products comprising a layer of cellulosic plastic substances, i.e. substances obtained by chemical modification of cellulose, e.g. cellulose ethers, cellulose esters, viscose
    • B32B23/04—Layered products comprising a layer of cellulosic plastic substances, i.e. substances obtained by chemical modification of cellulose, e.g. cellulose ethers, cellulose esters, viscose comprising such cellulosic plastic substance as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • B32B23/08—Layered products comprising a layer of cellulosic plastic substances, i.e. substances obtained by chemical modification of cellulose, e.g. cellulose ethers, cellulose esters, viscose comprising such cellulosic plastic substance as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/38—Masks having auxiliary features, e.g. special coatings or marks for alignment or testing; Preparation thereof
    • G03F1/46—Antireflective coatings
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J3/00—Processes of treating or compounding macromolecular substances
    • C08J3/02—Making solutions, dispersions, lattices or gels by other methods than by solution, emulsion or suspension polymerisation techniques
    • C08J3/09—Making solutions, dispersions, lattices or gels by other methods than by solution, emulsion or suspension polymerisation techniques in organic liquids
    • C08J3/091—Making solutions, dispersions, lattices or gels by other methods than by solution, emulsion or suspension polymerisation techniques in organic liquids characterised by the chemical constitution of the organic liquid
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J7/00—Chemical treatment or coating of shaped articles made of macromolecular substances
    • C08J7/04—Coating
    • C08J7/0427—Coating with only one layer of a composition containing a polymer binder
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11—Anti-reflection coatings
    • G02B1/111—Anti-reflection coatings using layers comprising organic materials
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/62—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J2301/00—Characterised by the use of cellulose, modified cellulose or cellulose derivatives
    • C08J2301/08—Cellulose derivatives
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J2333/00—Characterised by the use of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical, or of salts, anhydrides, esters, amides, imides, or nitriles thereof; Derivatives of such polymers
    • C08J2333/04—Characterised by the use of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical, or of salts, anhydrides, esters, amides, imides, or nitriles thereof; Derivatives of such polymers esters
    • C08J2333/14—Characterised by the use of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical, or of salts, anhydrides, esters, amides, imides, or nitriles thereof; Derivatives of such polymers esters of esters containing halogen, nitrogen, sulfur, or oxygen atoms in addition to the carboxy oxygen
    • C08J2333/16—Homopolymers or copolymers of esters containing halogen atoms
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J2433/00—Characterised by the use of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical, or of salts, anhydrides, esters, amides, imides, or nitriles thereof; Derivatives of such polymers
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31504—Composite [nonstructural laminate]
    • Y10T428/3154—Of fluorinated addition polymer from unsaturated monomers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Organic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Dispersion Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Optics & Photonics (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Vessels, Lead-In Wires, Accessory Apparatuses For Cathode-Ray Tubes (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
  • Surface Treatment Of Optical Elements (AREA)
AT88306309T 1987-07-10 1988-07-11 Reflexion vorbeugender beschichtungsfilm und verfahren zu dessen herstellung. ATE127818T1 (de)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP17111887A JPH0792601B2 (ja) 1987-07-10 1987-07-10 反射防止型ペリクル膜とその製法
JP25810087A JPH0748106B2 (ja) 1987-10-13 1987-10-13 ペリクル膜
JP63016320A JPH01191853A (ja) 1988-01-27 1988-01-27 ペリクル膜
JP63016321A JPH01191854A (ja) 1988-01-27 1988-01-27 ペリクル膜
JP63016319A JPH01191852A (ja) 1988-01-27 1988-01-27 ペリクル膜
JP4709188A JP2551087B2 (ja) 1988-02-29 1988-02-29 ペリクル膜の製造方法

Publications (1)

Publication Number Publication Date
ATE127818T1 true ATE127818T1 (de) 1995-09-15

Family

ID=27548645

Family Applications (1)

Application Number Title Priority Date Filing Date
AT88306309T ATE127818T1 (de) 1987-07-10 1988-07-11 Reflexion vorbeugender beschichtungsfilm und verfahren zu dessen herstellung.

Country Status (6)

Country Link
US (2) US4966813A (de)
EP (1) EP0300661B1 (de)
KR (1) KR960000490B1 (de)
AT (1) ATE127818T1 (de)
CA (1) CA1307892C (de)
DE (1) DE3854459T2 (de)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4970099A (en) * 1989-05-19 1990-11-13 E. I. Du Pont De Nemours And Company Perfluoropolymer coated pellicles
ATE122477T1 (de) * 1989-09-06 1995-05-15 Du Pont Nichtreflektierende filmabdeckung.
US5229229A (en) * 1990-04-27 1993-07-20 Tosoh Corporation Pellicle having reflection-preventing function
JP3037745B2 (ja) * 1990-11-29 2000-05-08 三井化学株式会社 ペリクル構造体
US5178955A (en) * 1990-12-17 1993-01-12 Allied-Signal Inc. Polymeric anti-reflection coatings and coated articles
US5168001A (en) * 1991-05-20 1992-12-01 E. I. Du Pont De Nemours And Company Perfluoropolymer coated pellicle
US5198267A (en) * 1991-09-20 1993-03-30 Allied-Signal Inc. Fluoropolymer blend anti-reflection coatings and coated articles
US5242502A (en) * 1992-06-02 1993-09-07 Occidental Chemical Corporation Method and apparatus for cleaning articles
JP2790946B2 (ja) * 1992-08-21 1998-08-27 信越化学工業株式会社 ペリクル膜の製造方法
US5344677A (en) * 1992-08-27 1994-09-06 Hong Gilbert H Photochemically stable deep ultraviolet pellicles for excimer lasers
KR970003593B1 (en) * 1992-09-03 1997-03-20 Samsung Electronics Co Ltd Projection exposure method and device using mask
JP3277092B2 (ja) * 1995-04-05 2002-04-22 アヴェンティス・リサーチ・ウント・テクノロジーズ・ゲーエムベーハー・ウント・コー・カーゲー 有機ガス検知用ポリマーフィルム
US5741576A (en) * 1995-09-06 1998-04-21 Inko Industrial Corporation Optical pellicle with controlled transmission peaks and anti-reflective coatings
AUPN871296A0 (en) * 1996-03-15 1996-04-18 Sola International Holdings Ltd Multicoat for light transmitting articles
US5846650A (en) * 1996-05-10 1998-12-08 Minnesota Mining And Manufacturing Company Anti-reflective, abrasion resistant, anti-fogging coated articles and methods
US6632513B1 (en) 1998-02-19 2003-10-14 3M Innovative Properties Company Antireflection film
US20020155265A1 (en) 1998-02-19 2002-10-24 Hyung-Chul Choi Antireflection film
US7351470B2 (en) * 1998-02-19 2008-04-01 3M Innovative Properties Company Removable antireflection film
US6379788B2 (en) * 1998-02-19 2002-04-30 3M Innovative Properties Company Antireflection film
US6800378B2 (en) 1998-02-19 2004-10-05 3M Innovative Properties Company Antireflection films for use with displays
US6703463B2 (en) 2001-08-01 2004-03-09 Avery Dennison Corporation Optical adhesive coating having low refractive index
US20060138599A1 (en) * 2004-12-29 2006-06-29 Tessera, Inc. Semiconductor members having a halogenated polymeric coating and methods for their formation
WO2007019030A2 (en) 2005-08-08 2007-02-15 Guardian Industries Corp. Transparent articles with anti-reflective coating and methods of making the same
US20070021700A1 (en) * 2006-08-07 2007-01-25 Tyler Liebowitz Medical device for an athlete's digits

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA1221795A (en) * 1982-02-24 1987-05-12 Bolesh J. Skutnik Optical fiber cladding
JPS6083032A (ja) * 1983-10-13 1985-05-11 Asahi Chem Ind Co Ltd 光透過性に優れたフオトマスク用防塵カバ−
US4768860A (en) * 1985-09-21 1988-09-06 Sumitomo Chemical Co., Ltd. Plastic optical cable
US4759990A (en) * 1985-11-27 1988-07-26 Yen Yung Tsai Composite optical element including anti-reflective coating

Also Published As

Publication number Publication date
US5059451A (en) 1991-10-22
DE3854459T2 (de) 1996-02-29
EP0300661A3 (en) 1990-07-04
EP0300661B1 (de) 1995-09-13
DE3854459D1 (de) 1995-10-19
US4966813A (en) 1990-10-30
KR890002717A (ko) 1989-04-11
KR960000490B1 (ko) 1996-01-08
CA1307892C (en) 1992-09-29
EP0300661A2 (de) 1989-01-25

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Legal Events

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RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties