ATE132968T1 - Differenzdrucksensor mit membran mit freier randkonstruktion - Google Patents

Differenzdrucksensor mit membran mit freier randkonstruktion

Info

Publication number
ATE132968T1
ATE132968T1 AT89911696T AT89911696T ATE132968T1 AT E132968 T1 ATE132968 T1 AT E132968T1 AT 89911696 T AT89911696 T AT 89911696T AT 89911696 T AT89911696 T AT 89911696T AT E132968 T1 ATE132968 T1 AT E132968T1
Authority
AT
Austria
Prior art keywords
diaphragm
pressure sensor
free edge
membrane
differential pressure
Prior art date
Application number
AT89911696T
Other languages
English (en)
Inventor
Thomas A Knecht
Ahmed Naumaan
Stanley E Rud Jr
Original Assignee
Rosemount Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rosemount Inc filed Critical Rosemount Inc
Application granted granted Critical
Publication of ATE132968T1 publication Critical patent/ATE132968T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01B—MACHINES OR ENGINES, IN GENERAL OR OF POSITIVE-DISPLACEMENT TYPE, e.g. STEAM ENGINES
    • F01B19/00—Positive-displacement machines or engines of flexible-wall type

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Measuring Fluid Pressure (AREA)
AT89911696T 1988-10-20 1989-10-17 Differenzdrucksensor mit membran mit freier randkonstruktion ATE132968T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/260,237 US4905575A (en) 1988-10-20 1988-10-20 Solid state differential pressure sensor with overpressure stop and free edge construction

Publications (1)

Publication Number Publication Date
ATE132968T1 true ATE132968T1 (de) 1996-01-15

Family

ID=22988351

Family Applications (1)

Application Number Title Priority Date Filing Date
AT89911696T ATE132968T1 (de) 1988-10-20 1989-10-17 Differenzdrucksensor mit membran mit freier randkonstruktion

Country Status (8)

Country Link
US (1) US4905575A (de)
EP (1) EP0439494B1 (de)
JP (1) JP2743104B2 (de)
AT (1) ATE132968T1 (de)
BR (1) BR8907728A (de)
CA (1) CA2001047A1 (de)
DE (1) DE68925425T2 (de)
WO (1) WO1990004701A1 (de)

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US6622558B2 (en) * 2000-11-30 2003-09-23 Orbital Research Inc. Method and sensor for detecting strain using shape memory alloys
DE10114666A1 (de) * 2001-03-23 2002-09-26 Bernhard Trier Differenzdrucksensor
JP2004140029A (ja) * 2002-10-15 2004-05-13 Sharp Corp 半導体装置、半導体モジュール、半導体装置の製造方法、及び、半導体モジュールの製造方法
US20050081638A1 (en) * 2003-09-05 2005-04-21 Couch Philip R. Sensing diaphragm for a differential pressure sensor with over-pressure protection and methods
AU2004274005A1 (en) * 2003-09-16 2005-03-31 Cardiomems, Inc. Implantable wireless sensor
US20060287602A1 (en) * 2005-06-21 2006-12-21 Cardiomems, Inc. Implantable wireless sensor for in vivo pressure measurement
US8026729B2 (en) 2003-09-16 2011-09-27 Cardiomems, Inc. System and apparatus for in-vivo assessment of relative position of an implant
CA2613241A1 (en) * 2005-06-21 2007-01-04 Cardiomems, Inc. Method of manufacturing implantable wireless sensor for in vivo pressure measurement
US7409865B2 (en) * 2005-09-30 2008-08-12 General Electric Company Diaphragm structure
JP5187529B2 (ja) * 2008-07-22 2013-04-24 セイコーエプソン株式会社 圧力センサー
CH699668A1 (de) * 2008-10-09 2010-04-15 Kistler Holding Ag Sensormembrane.
DE102010028504A1 (de) * 2010-05-03 2011-11-03 Endress + Hauser Gmbh + Co. Kg Drucksensor
US8704538B2 (en) * 2010-07-01 2014-04-22 Mks Instruments, Inc. Capacitance sensors
JP2012037415A (ja) * 2010-08-09 2012-02-23 Seiko Epson Corp 圧力センサー
DE102010045536B4 (de) * 2010-09-15 2012-06-21 Trw Automotive Electronics & Components Gmbh Elektrodynamischer Aktor
US8906730B2 (en) * 2011-04-14 2014-12-09 Robert Bosch Gmbh Method of forming membranes with modified stress characteristics
JP2013044675A (ja) * 2011-08-25 2013-03-04 Yokogawa Electric Corp 振動式差圧センサとその製造方法
DE102012102020A1 (de) * 2012-03-09 2013-09-12 Epcos Ag Mikromechanisches Messelement
JP5897940B2 (ja) * 2012-03-14 2016-04-06 アズビル株式会社 圧力センサチップ
ITMI20120617A1 (it) * 2012-04-16 2013-10-17 St Microelectronics Srl Sensore di pressione a stato solido
DE102012111533A1 (de) 2012-11-28 2014-05-28 Endress + Hauser Gmbh + Co. Kg Druckmesszelle
AU2015231164B2 (en) 2014-03-19 2020-04-09 Dana-Farber Cancer Institute, Inc. Immunogenetic restriction on elicitation of antibodies
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US9316553B2 (en) 2014-03-26 2016-04-19 Rosemount Inc. Span line pressure effect compensation for diaphragm pressure sensor
CN106471263B (zh) * 2014-05-13 2018-10-16 火石工业产品有限责任公司 具有反作用特征结构的致动器挠性构件
US9963340B2 (en) 2015-12-03 2018-05-08 Honeywell International Inc. Pressure sensor die over pressure protection for high over pressure to operating span ratios
US10197462B2 (en) * 2016-05-25 2019-02-05 Honeywell International Inc. Differential pressure sensor full overpressure protection device
CN205793288U (zh) * 2016-05-26 2016-12-07 瑞声科技(新加坡)有限公司 微型发声器
US20180259413A1 (en) 2017-03-10 2018-09-13 Honeywell International Inc. Pressure sensor having coplanar meter body with sensor overpressure protection
CA3099745A1 (en) 2018-05-17 2019-11-21 Rosemount Inc. Measuring element and measuring device comprising the same
JP7401248B2 (ja) * 2019-10-09 2023-12-19 アズビル株式会社 圧力センサ
US11226253B2 (en) * 2019-12-23 2022-01-18 Rosemount Inc. High range differential pressure sensor
US11692895B2 (en) * 2021-03-30 2023-07-04 Rosemount Aerospace Inc. Differential pressure sensor
EP4257825A1 (de) * 2022-04-06 2023-10-11 Goodrich Corporation Membran

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Also Published As

Publication number Publication date
DE68925425D1 (de) 1996-02-22
US4905575A (en) 1990-03-06
EP0439494B1 (de) 1996-01-10
JPH04502203A (ja) 1992-04-16
WO1990004701A1 (en) 1990-05-03
EP0439494A4 (en) 1992-04-01
EP0439494A1 (de) 1991-08-07
JP2743104B2 (ja) 1998-04-22
CA2001047A1 (en) 1990-04-20
BR8907728A (pt) 1991-07-30
DE68925425T2 (de) 1996-05-15

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Legal Events

Date Code Title Description
UEP Publication of translation of european patent specification
REN Ceased due to non-payment of the annual fee