ATE135875T1 - Schnelle atomstrahlquelle - Google Patents

Schnelle atomstrahlquelle

Info

Publication number
ATE135875T1
ATE135875T1 AT90122336T AT90122336T ATE135875T1 AT E135875 T1 ATE135875 T1 AT E135875T1 AT 90122336 T AT90122336 T AT 90122336T AT 90122336 T AT90122336 T AT 90122336T AT E135875 T1 ATE135875 T1 AT E135875T1
Authority
AT
Austria
Prior art keywords
oil
cylinder
melting point
low
point metal
Prior art date
Application number
AT90122336T
Other languages
English (en)
Inventor
Kazutoshi Nagai
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp filed Critical Ebara Corp
Application granted granted Critical
Publication of ATE135875T1 publication Critical patent/ATE135875T1/de

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H3/00—Production or acceleration of neutral particle beams, e.g. molecular or atomic beams
    • H05H3/02—Molecular or atomic-beam generation, e.g. resonant beam generation

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Stabilization Of Oscillater, Synchronisation, Frequency Synthesizers (AREA)
  • Particle Accelerators (AREA)
AT90122336T 1989-11-22 1990-11-22 Schnelle atomstrahlquelle ATE135875T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1301832A JPH0715839B2 (ja) 1989-11-22 1989-11-22 高速原子線放射装置

Publications (1)

Publication Number Publication Date
ATE135875T1 true ATE135875T1 (de) 1996-04-15

Family

ID=17901697

Family Applications (1)

Application Number Title Priority Date Filing Date
AT90122336T ATE135875T1 (de) 1989-11-22 1990-11-22 Schnelle atomstrahlquelle

Country Status (4)

Country Link
EP (1) EP0430081B1 (de)
JP (1) JPH0715839B2 (de)
AT (1) ATE135875T1 (de)
DE (1) DE69026037T2 (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5326227A (en) * 1990-08-03 1994-07-05 Ebara Corporation Exhaust apparatus with vacuum pump
US5240381A (en) * 1990-08-03 1993-08-31 Ebara Corporation Exhaust apparatus and vacuum pumping unit including the exhaust apparatus
JP2509488B2 (ja) * 1991-09-12 1996-06-19 株式会社荏原製作所 高速原子線源
US5814819A (en) * 1997-07-11 1998-09-29 Eaton Corporation System and method for neutralizing an ion beam using water vapor
KR101624219B1 (ko) * 2015-04-06 2016-05-26 기초과학연구원 중이온 가속기의 복수개의 싱글 스포크형 가속관 저온 유지 장치

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3005121A (en) * 1959-09-14 1961-10-17 Nat Company Inc Beam intensity control system
US3523210A (en) * 1966-05-20 1970-08-04 Xerox Corp Gas discharge neutralizer including a charged particle source
US4328667A (en) * 1979-03-30 1982-05-11 The European Space Research Organisation Field-emission ion source and ion thruster apparatus comprising such sources
EP0066474B1 (de) * 1981-06-02 1986-03-26 Ibt-Dubilier Limited Vorratsbehälter für eine Ionenquelle

Also Published As

Publication number Publication date
DE69026037T2 (de) 1996-10-31
JPH0715839B2 (ja) 1995-02-22
EP0430081A3 (en) 1991-10-30
EP0430081B1 (de) 1996-03-20
JPH03163733A (ja) 1991-07-15
DE69026037D1 (de) 1996-04-25
EP0430081A2 (de) 1991-06-05

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