JPH0715839B2 - 高速原子線放射装置 - Google Patents

高速原子線放射装置

Info

Publication number
JPH0715839B2
JPH0715839B2 JP1301832A JP30183289A JPH0715839B2 JP H0715839 B2 JPH0715839 B2 JP H0715839B2 JP 1301832 A JP1301832 A JP 1301832A JP 30183289 A JP30183289 A JP 30183289A JP H0715839 B2 JPH0715839 B2 JP H0715839B2
Authority
JP
Japan
Prior art keywords
cathode
oil
cylinder
melting point
point metal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP1301832A
Other languages
English (en)
Japanese (ja)
Other versions
JPH03163733A (ja
Inventor
一敏 長井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp filed Critical Ebara Corp
Priority to JP1301832A priority Critical patent/JPH0715839B2/ja
Priority to EP90122336A priority patent/EP0430081B1/de
Priority to AT90122336T priority patent/ATE135875T1/de
Priority to DE69026037T priority patent/DE69026037T2/de
Publication of JPH03163733A publication Critical patent/JPH03163733A/ja
Publication of JPH0715839B2 publication Critical patent/JPH0715839B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H3/00—Production or acceleration of neutral particle beams, e.g. molecular or atomic beams
    • H05H3/02—Molecular or atomic-beam generation, e.g. resonant beam generation

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Stabilization Of Oscillater, Synchronisation, Frequency Synthesizers (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Particle Accelerators (AREA)
JP1301832A 1989-11-22 1989-11-22 高速原子線放射装置 Expired - Fee Related JPH0715839B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP1301832A JPH0715839B2 (ja) 1989-11-22 1989-11-22 高速原子線放射装置
EP90122336A EP0430081B1 (de) 1989-11-22 1990-11-22 Schnelle Atomstrahlquelle
AT90122336T ATE135875T1 (de) 1989-11-22 1990-11-22 Schnelle atomstrahlquelle
DE69026037T DE69026037T2 (de) 1989-11-22 1990-11-22 Schnelle Atomstrahlquelle

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1301832A JPH0715839B2 (ja) 1989-11-22 1989-11-22 高速原子線放射装置

Publications (2)

Publication Number Publication Date
JPH03163733A JPH03163733A (ja) 1991-07-15
JPH0715839B2 true JPH0715839B2 (ja) 1995-02-22

Family

ID=17901697

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1301832A Expired - Fee Related JPH0715839B2 (ja) 1989-11-22 1989-11-22 高速原子線放射装置

Country Status (4)

Country Link
EP (1) EP0430081B1 (de)
JP (1) JPH0715839B2 (de)
AT (1) ATE135875T1 (de)
DE (1) DE69026037T2 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016163689A1 (ko) * 2015-04-06 2016-10-13 기초과학연구원 중이온 가속기의 복수개의 싱글 스포크형 가속관 저온 유지 장치

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5240381A (en) * 1990-08-03 1993-08-31 Ebara Corporation Exhaust apparatus and vacuum pumping unit including the exhaust apparatus
US5326227A (en) * 1990-08-03 1994-07-05 Ebara Corporation Exhaust apparatus with vacuum pump
JP2509488B2 (ja) * 1991-09-12 1996-06-19 株式会社荏原製作所 高速原子線源
US5814819A (en) * 1997-07-11 1998-09-29 Eaton Corporation System and method for neutralizing an ion beam using water vapor

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3005121A (en) * 1959-09-14 1961-10-17 Nat Company Inc Beam intensity control system
US3523210A (en) * 1966-05-20 1970-08-04 Xerox Corp Gas discharge neutralizer including a charged particle source
US4328667A (en) * 1979-03-30 1982-05-11 The European Space Research Organisation Field-emission ion source and ion thruster apparatus comprising such sources
US4516052A (en) * 1981-06-02 1985-05-07 Dublier Scientific Limited Dispenser for ion source

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016163689A1 (ko) * 2015-04-06 2016-10-13 기초과학연구원 중이온 가속기의 복수개의 싱글 스포크형 가속관 저온 유지 장치

Also Published As

Publication number Publication date
EP0430081A3 (en) 1991-10-30
EP0430081A2 (de) 1991-06-05
EP0430081B1 (de) 1996-03-20
DE69026037D1 (de) 1996-04-25
JPH03163733A (ja) 1991-07-15
DE69026037T2 (de) 1996-10-31
ATE135875T1 (de) 1996-04-15

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees