JPH0715839B2 - 高速原子線放射装置 - Google Patents

高速原子線放射装置

Info

Publication number: JPH0715839B2
Authority: JP; Japan
Prior art keywords: cathode; oil; cylinder; melting point; point metal
Prior art date: 1989-11-22
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Fee Related

Application number

JP1301832A

Other languages

English (en)

Japanese (ja)

Other versions

JPH03163733A (ja

Inventor

一敏長井

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Ebara Corp

Original Assignee

Ebara Corp

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1989-11-22

Filing date

1989-11-22

Publication date

1995-02-22

1989-11-22 Application filed by Ebara Corp filed Critical Ebara Corp

1989-11-22 Priority to JP1301832A priority Critical patent/JPH0715839B2/ja

1990-11-22 Priority to EP90122336A priority patent/EP0430081B1/de

1990-11-22 Priority to AT90122336T priority patent/ATE135875T1/de

1990-11-22 Priority to DE69026037T priority patent/DE69026037T2/de

1991-07-15 Publication of JPH03163733A publication Critical patent/JPH03163733A/ja

1995-02-22 Publication of JPH0715839B2 publication Critical patent/JPH0715839B2/ja

2010-02-22 Anticipated expiration legal-status Critical

Status Expired - Fee Related legal-status Critical Current

Links

239000002184 metal Substances 0.000 claims abstract description 31
229910052751 metal Inorganic materials 0.000 claims abstract description 31
238000002844 melting Methods 0.000 claims abstract description 26
230000008018 melting Effects 0.000 claims abstract description 20
238000001816 cooling Methods 0.000 claims description 9
230000005855 radiation Effects 0.000 claims description 9
239000007788 liquid Substances 0.000 claims description 4
150000002500 ions Chemical class 0.000 abstract description 5
239000007789 gas Substances 0.000 description 30
125000004429 atom Chemical group 0.000 description 23
239000001301 oxygen Substances 0.000 description 6
229910052760 oxygen Inorganic materials 0.000 description 6
-1 Oxygen ions Chemical class 0.000 description 5
230000008020 evaporation Effects 0.000 description 4
238000001704 evaporation Methods 0.000 description 4
238000004544 sputter deposition Methods 0.000 description 4
MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 3
229910001882 dioxygen Inorganic materials 0.000 description 3
239000000463 material Substances 0.000 description 3
230000007935 neutral effect Effects 0.000 description 3
125000004430 oxygen atom Chemical group O* 0.000 description 3
239000000126 substance Substances 0.000 description 3
XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
239000000919 ceramic Substances 0.000 description 2
238000002347 injection Methods 0.000 description 2
239000007924 injection Substances 0.000 description 2
239000012212 insulator Substances 0.000 description 2
238000010884 ion-beam technique Methods 0.000 description 2
230000003472 neutralizing effect Effects 0.000 description 2
230000001737 promoting effect Effects 0.000 description 2
230000000087 stabilizing effect Effects 0.000 description 2
ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
229910052786 argon Inorganic materials 0.000 description 1
QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
239000000460 chlorine Substances 0.000 description 1
229910052801 chlorine Inorganic materials 0.000 description 1
238000009833 condensation Methods 0.000 description 1
230000005494 condensation Effects 0.000 description 1
238000011109 contamination Methods 0.000 description 1
230000000694 effects Effects 0.000 description 1
238000010894 electron beam technology Methods 0.000 description 1
239000011261 inert gas Substances 0.000 description 1
150000002739 metals Chemical class 0.000 description 1
238000000034 method Methods 0.000 description 1
239000000203 mixture Substances 0.000 description 1
239000004033 plastic Substances 0.000 description 1
229920003023 plastic Polymers 0.000 description 1
239000004065 semiconductor Substances 0.000 description 1
238000000992 sputter etching Methods 0.000 description 1
239000013589 supplement Substances 0.000 description 1

Classifications

- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H3/00—Production or acceleration of neutral particle beams, e.g. molecular or atomic beams
- H05H3/02—Molecular or atomic-beam generation, e.g. resonant beam generation

Landscapes

Physics & Mathematics (AREA)
Spectroscopy & Molecular Physics (AREA)
Engineering & Computer Science (AREA)
Plasma & Fusion (AREA)
Electron Sources, Ion Sources (AREA)
Analysing Materials By The Use Of Radiation (AREA)
Stabilization Of Oscillater, Synchronisation, Frequency Synthesizers (AREA)
Particle Accelerators (AREA)

JP1301832A 1989-11-22 1989-11-22 高速原子線放射装置 Expired - Fee Related JPH0715839B2 (ja)

Priority Applications (4)

Application Number	Priority Date	Filing Date	Title
JP1301832A JPH0715839B2 (ja)	1989-11-22	1989-11-22	高速原子線放射装置
EP90122336A EP0430081B1 (de)	1989-11-22	1990-11-22	Schnelle Atomstrahlquelle
AT90122336T ATE135875T1 (de)	1989-11-22	1990-11-22	Schnelle atomstrahlquelle
DE69026037T DE69026037T2 (de)	1989-11-22	1990-11-22	Schnelle Atomstrahlquelle

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP1301832A JPH0715839B2 (ja)	1989-11-22	1989-11-22	高速原子線放射装置

Publications (2)

Publication Number	Publication Date
JPH03163733A JPH03163733A (ja)	1991-07-15
JPH0715839B2 true JPH0715839B2 (ja)	1995-02-22

Family

ID=17901697

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP1301832A Expired - Fee Related JPH0715839B2 (ja)	1989-11-22	1989-11-22	高速原子線放射装置

Country Status (4)

Country	Link
EP (1)	EP0430081B1 (de)
JP (1)	JPH0715839B2 (de)
AT (1)	ATE135875T1 (de)
DE (1)	DE69026037T2 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
WO2016163689A1 (ko) *	2015-04-06	2016-10-13	기초과학연구원	중이온 가속기의 복수개의 싱글 스포크형 가속관 저온 유지 장치

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US5326227A (en) *	1990-08-03	1994-07-05	Ebara Corporation	Exhaust apparatus with vacuum pump
US5240381A (en) *	1990-08-03	1993-08-31	Ebara Corporation	Exhaust apparatus and vacuum pumping unit including the exhaust apparatus
JP2509488B2 (ja) *	1991-09-12	1996-06-19	株式会社荏原製作所	高速原子線源
US5814819A (en) *	1997-07-11	1998-09-29	Eaton Corporation	System and method for neutralizing an ion beam using water vapor

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US3005121A (en) *	1959-09-14	1961-10-17	Nat Company Inc	Beam intensity control system
US3523210A (en) *	1966-05-20	1970-08-04	Xerox Corp	Gas discharge neutralizer including a charged particle source
US4328667A (en) *	1979-03-30	1982-05-11	The European Space Research Organisation	Field-emission ion source and ion thruster apparatus comprising such sources
EP0066474B1 (de) *	1981-06-02	1986-03-26	Ibt-Dubilier Limited	Vorratsbehälter für eine Ionenquelle

1989
- 1989-11-22 JP JP1301832A patent/JPH0715839B2/ja not_active Expired - Fee Related
1990
- 1990-11-22 EP EP90122336A patent/EP0430081B1/de not_active Expired - Lifetime
- 1990-11-22 DE DE69026037T patent/DE69026037T2/de not_active Expired - Fee Related
- 1990-11-22 AT AT90122336T patent/ATE135875T1/de active

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
WO2016163689A1 (ko) *	2015-04-06	2016-10-13	기초과학연구원	중이온 가속기의 복수개의 싱글 스포크형 가속관 저온 유지 장치

Also Published As

Publication number	Publication date
DE69026037T2 (de)	1996-10-31
ATE135875T1 (de)	1996-04-15
EP0430081A3 (en)	1991-10-30
EP0430081B1 (de)	1996-03-20
JPH03163733A (ja)	1991-07-15
DE69026037D1 (de)	1996-04-25
EP0430081A2 (de)	1991-06-05

Legal Events

Date	Code	Title	Description
2008-02-22	LAPS	Cancellation because of no payment of annual fees

Publication	Publication Date	Title
US5656141A (en)	1997-08-12	Apparatus for coating substrates
JPH08227688A (ja)	1996-09-03	イオン注入機に使用するイオン発生装置とその方法
JP5150626B2 (ja)	2013-02-20	電子ビーム蒸発装置
US7557511B2 (en)	2009-07-07	Apparatus and method utilizing high power density electron beam for generating pulsed stream of ablation plasma
JPH0715839B2 (ja)	1995-02-22	高速原子線放射装置
JPH0456761A (ja)	1992-02-24	薄膜形成装置
US5055672A (en)	1991-10-08	Fast atom beam source
JP3401365B2 (ja)	2003-04-28	プラズマ発生装置およびイオンプレーティング装置
JP2710670B2 (ja)	1998-02-10	蒸気発生源用るつぼ
JPH0770741A (ja)	1995-03-14	蒸発源
JP3554030B2 (ja)	2004-08-11	小型熱電子真空アーク蒸発源
JP3140636B2 (ja)	2001-03-05	プラズマ発生装置
JP3186777B2 (ja)	2001-07-11	プラズマ源
JPH11224797A (ja)	1999-08-17	プラズマ発生装置及び薄膜形成装置
JPH051895Y2 (de)	1993-01-19
JPH09256148A (ja)	1997-09-30	イオンプレーティング装置
JPH0830265B2 (ja)	1996-03-27	薄膜形成装置
JP4515158B2 (ja)	2010-07-28	電子ビームガンおよびプラズマ装置
JP2620474B2 (ja)	1997-06-11	イオンプレーティング装置
JP3330159B2 (ja)	2002-09-30	ダイナミックミキシング装置
JP2594949B2 (ja)	1997-03-26	薄膜形成装置
US4171462A (en)	1979-10-16	Linear electron beam gun evaporator having uniform electron emission
JP3431174B2 (ja)	2003-07-28	サブストレートのコーティング装置
JP2000239834A (ja)	2000-09-05	成膜装置及び方法
JPH04306540A (ja)	1992-10-29	プラズマ源およびそれを用いたイオンビーム源

JPH0715839B2 - 高速原子線放射装置 - Google Patents

Info

Links

Classifications

Landscapes

Priority Applications (4)

Applications Claiming Priority (1)

Publications (2)

Family

ID=17901697

Family Applications (1)

Country Status (4)

Cited By (1)

Families Citing this family (4)

Family Cites Families (4)

Cited By (1)

Also Published As

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Legal Events