ATE139407T1 - Werkzeugauswechselsystem für hybrid-chipverbinder - Google Patents

Werkzeugauswechselsystem für hybrid-chipverbinder

Info

Publication number
ATE139407T1
ATE139407T1 AT91301769T AT91301769T ATE139407T1 AT E139407 T1 ATE139407 T1 AT E139407T1 AT 91301769 T AT91301769 T AT 91301769T AT 91301769 T AT91301769 T AT 91301769T AT E139407 T1 ATE139407 T1 AT E139407T1
Authority
AT
Austria
Prior art keywords
tool
head
tool change
change system
bank
Prior art date
Application number
AT91301769T
Other languages
English (en)
Inventor
Karl Schweitzer
Gerhard Zeindl
Original Assignee
F&K Delvotec Bondtechnik Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by F&K Delvotec Bondtechnik Gmbh filed Critical F&K Delvotec Bondtechnik Gmbh
Application granted granted Critical
Publication of ATE139407T1 publication Critical patent/ATE139407T1/de

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0444—Apparatus for wiring semiconductor or solid-state device
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S33/00—Geometrical instruments
    • Y10S33/01—Magnetic

Landscapes

  • Die Bonding (AREA)
  • Auxiliary Devices For Machine Tools (AREA)
  • Details Of Connecting Devices For Male And Female Coupling (AREA)
  • Perforating, Stamping-Out Or Severing By Means Other Than Cutting (AREA)
  • Wire Bonding (AREA)
  • Automatic Tool Replacement In Machine Tools (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
AT91301769T 1990-03-16 1991-03-04 Werkzeugauswechselsystem für hybrid-chipverbinder ATE139407T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB909006037A GB9006037D0 (en) 1990-03-16 1990-03-16 Tool exchange system for hybrid die bonder

Publications (1)

Publication Number Publication Date
ATE139407T1 true ATE139407T1 (de) 1996-06-15

Family

ID=10672785

Family Applications (1)

Application Number Title Priority Date Filing Date
AT91301769T ATE139407T1 (de) 1990-03-16 1991-03-04 Werkzeugauswechselsystem für hybrid-chipverbinder

Country Status (6)

Country Link
US (1) US5150530A (de)
EP (1) EP0447087B1 (de)
JP (1) JPH0774190A (de)
AT (1) ATE139407T1 (de)
DE (1) DE69120111T2 (de)
GB (1) GB9006037D0 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH709629B1 (de) * 2000-10-06 2015-11-30 Chemspeed Technologies Ag Vorrichtung mit einem Werkzeughalter, einem Werkzeug und einer Waage.
EP1310986A1 (de) 2001-11-08 2003-05-14 F & K Delvotec Bondtechnik GmbH Chipträgerplatten-Wechselmechanismus
WO2009081357A2 (en) * 2007-12-19 2009-07-02 Nxp B.V. Pick and place tool grinding

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2976613A (en) * 1958-01-13 1961-03-28 Voss Engineering Company Releasable stylus holder for duplicator or tracer mechanism
FR2469982A1 (fr) * 1979-11-26 1981-05-29 Mecalix Dispositif de positionnement relatif de deux pieces
US4390172A (en) * 1980-11-28 1983-06-28 Presco, Inc. Precise quick-release positioning mechanism
JPS59161040A (ja) * 1983-03-03 1984-09-11 Shinkawa Ltd インナ−リ−ドボンダ−
US4795518A (en) * 1984-02-17 1989-01-03 Burr-Brown Corporation Method using a multiple device vacuum chuck for an automatic microelectronic bonding apparatus
GB8406129D0 (en) * 1984-03-08 1984-04-11 Dyna Pert Precima Ltd Orienting electrical components
JPS61201431A (ja) * 1985-03-04 1986-09-06 Tokyo Sokuhan Kk 自動ダイボンダ−
JPH01227442A (ja) * 1988-03-08 1989-09-11 Matsushita Electron Corp 半導体ダイボンディング方法

Also Published As

Publication number Publication date
DE69120111T2 (de) 1997-02-06
GB9006037D0 (en) 1990-05-09
DE69120111D1 (de) 1996-07-18
EP0447087A1 (de) 1991-09-18
JPH0774190A (ja) 1995-03-17
US5150530A (en) 1992-09-29
EP0447087B1 (de) 1996-06-12

Similar Documents

Publication Publication Date Title
DE3380948D1 (de) Motor fuer gedruckte schaltungen.
DE3372033D1 (en) Optical head in a write-read device for an information carrier
EP0862168A3 (de) Optisches Plattengerät mit reduzierten Abmessungen
AU563610B2 (en) Machine tool-tool exchanging device
FR2526537B1 (fr) Dispositif de positionnement de haute precision, notamment pour le deplacement d'un outil par rapport a un element de travail
FR2780909B1 (fr) Dispositif d'emmagasinage et de changement d'outils d'une machine-outil d'usinage et procede de travail d'un tel dispositif
DE69113086D1 (de) Chipausstosssystem für Chipverbinder.
DE3865320D1 (de) Induktive vorrichtung zum schnellen datenaustausch zwischen zwei traegern.
DE69120111D1 (de) Werkzeugauswechselsystem für Hybrid-Chipverbinder
JP3038114B2 (ja) 穴明機における自動ドリル交換方法
DE3586105D1 (de) Montagevorrichtung.
EP0038157A3 (de) Werkzeugwechselvorrichtung für eine Werkzeugmaschine
FR2750626B1 (fr) Dispositif permettant d'adapter la taille d'un serre-flan de machine-outil
IT1134181B (it) Torretta portautensili a revolver a piu' posizioni,per macchine utensili in genreale e per torni in particolare
CN223301211U (zh) 一种圆环上料机构及雾化芯装配设备
CN218497206U (zh) 一种高精度可调式并行光组件定长治具
JPS5840347U (ja) 自動加工ラインのワ−クの受け渡し装置
CA1259176C (de)
JPS5768042A (en) Pellet pickup method
JPS5741827A (en) Automatic die mounting and demounting device of bending machine
JPS6053442U (ja) 工具交換装置
IT8025779A0 (it) Torretta portautensili a revolver a piu' posizioni, per macchine utensili in generale e per torni in particolare.
JPS58164467U (ja) 区枠簇送り装置
JPS6084226U (ja) 自動工具交換装置
JPS6039446U (ja) オ−トロ−ダの走行装置

Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties