ATE140103T1 - System und verfahren zur ermittlung des zentrums eines integrierten schaltungsplättchens - Google Patents

System und verfahren zur ermittlung des zentrums eines integrierten schaltungsplättchens

Info

Publication number
ATE140103T1
ATE140103T1 AT88303489T AT88303489T ATE140103T1 AT E140103 T1 ATE140103 T1 AT E140103T1 AT 88303489 T AT88303489 T AT 88303489T AT 88303489 T AT88303489 T AT 88303489T AT E140103 T1 ATE140103 T1 AT E140103T1
Authority
AT
Austria
Prior art keywords
determining
center
circuit board
integrated circuit
wafer
Prior art date
Application number
AT88303489T
Other languages
English (en)
Inventor
David Cheng
Wesley W Zhang
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Application granted granted Critical
Publication of ATE140103T1 publication Critical patent/ATE140103T1/de

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/50—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for positioning, orientation or alignment
    • H10P72/53—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for positioning, orientation or alignment using optical controlling means
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W46/00—Marks applied to devices, e.g. for alignment or identification
    • H10W46/501—Marks applied to devices, e.g. for alignment or identification for use before dicing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling
    • Y10S414/137—Associated with semiconductor wafer handling including means for charging or discharging wafer cassette

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Control Of Conveyors (AREA)
  • Control Of Position Or Direction (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
AT88303489T 1987-04-20 1988-04-18 System und verfahren zur ermittlung des zentrums eines integrierten schaltungsplättchens ATE140103T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/040,974 US4819167A (en) 1987-04-20 1987-04-20 System and method for detecting the center of an integrated circuit wafer

Publications (1)

Publication Number Publication Date
ATE140103T1 true ATE140103T1 (de) 1996-07-15

Family

ID=21914022

Family Applications (1)

Application Number Title Priority Date Filing Date
AT88303489T ATE140103T1 (de) 1987-04-20 1988-04-18 System und verfahren zur ermittlung des zentrums eines integrierten schaltungsplättchens

Country Status (5)

Country Link
US (1) US4819167A (de)
EP (1) EP0288233B1 (de)
JP (1) JPH0727953B2 (de)
AT (1) ATE140103T1 (de)
DE (1) DE3855389T2 (de)

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JPS6448443A (en) 1989-02-22
EP0288233A3 (de) 1991-01-23
DE3855389T2 (de) 1997-01-02
DE3855389D1 (de) 1996-08-08
EP0288233A2 (de) 1988-10-26
US4819167A (en) 1989-04-04
EP0288233B1 (de) 1996-07-03

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