ATE141025T1 - Getter-pumpe mit hoher leistung - Google Patents

Getter-pumpe mit hoher leistung

Info

Publication number
ATE141025T1
ATE141025T1 AT93910317T AT93910317T ATE141025T1 AT E141025 T1 ATE141025 T1 AT E141025T1 AT 93910317 T AT93910317 T AT 93910317T AT 93910317 T AT93910317 T AT 93910317T AT E141025 T1 ATE141025 T1 AT E141025T1
Authority
AT
Austria
Prior art keywords
getter pump
high performance
blades
main surface
performance getter
Prior art date
Application number
AT93910317T
Other languages
English (en)
Inventor
Bruno Ferrario
Paolo Manini
Original Assignee
Getters Spa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Getters Spa filed Critical Getters Spa
Application granted granted Critical
Publication of ATE141025T1 publication Critical patent/ATE141025T1/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J7/00—Details not provided for in the preceding groups and common to two or more basic types of discharge tubes or lamps
    • H01J7/14—Means for obtaining or maintaining the desired pressure within the vessel
    • H01J7/18—Means for absorbing or adsorbing gas, e.g. by gettering
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/02—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by absorption or adsorption

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
AT93910317T 1992-07-17 1993-04-23 Getter-pumpe mit hoher leistung ATE141025T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
ITMI921753A IT1255439B (it) 1992-07-17 1992-07-17 Pompa getter non evaporabile

Publications (1)

Publication Number Publication Date
ATE141025T1 true ATE141025T1 (de) 1996-08-15

Family

ID=11363695

Family Applications (1)

Application Number Title Priority Date Filing Date
AT93910317T ATE141025T1 (de) 1992-07-17 1993-04-23 Getter-pumpe mit hoher leistung

Country Status (11)

Country Link
EP (1) EP0650639B1 (de)
JP (1) JP2655012B2 (de)
KR (1) KR100203018B1 (de)
CN (1) CN1057147C (de)
AT (1) ATE141025T1 (de)
CA (1) CA2128416C (de)
DE (1) DE69303901T2 (de)
ES (1) ES2090998T3 (de)
IT (1) IT1255439B (de)
RU (1) RU2082251C1 (de)
WO (1) WO1994002957A1 (de)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5685963A (en) * 1994-10-31 1997-11-11 Saes Pure Gas, Inc. In situ getter pump system and method
US6109880A (en) * 1994-10-31 2000-08-29 Saes Pure Gas, Inc. Getter pump module and system including focus shields
US5911560A (en) * 1994-10-31 1999-06-15 Saes Pure Gas, Inc. Getter pump module and system
US6142742A (en) * 1994-10-31 2000-11-07 Saes Pure Gas, Inc. Getter pump module and system
US5972183A (en) * 1994-10-31 1999-10-26 Saes Getter S.P.A Getter pump module and system
FR2750248B1 (fr) * 1996-06-19 1998-08-28 Org Europeene De Rech Dispositif de pompage par getter non evaporable et procede de mise en oeuvre de ce getter
IT1295340B1 (it) * 1997-10-15 1999-05-12 Getters Spa Pompa getter ad elevata velocita' di assorbimento di gas
CA2254515A1 (en) * 1997-12-23 1999-06-23 Andrea Conte Getter system for purifying the work atmosphere in the processes of physical vapor deposition
IT1312248B1 (it) * 1999-04-12 2002-04-09 Getters Spa Metodo per aumentare la produttivita' di processi di deposizione distrati sottili su un substrato e dispositivi getter per la
US20030191056A1 (en) 2002-04-04 2003-10-09 Kenneth Walker Use of transthyretin peptide/protein fusions to increase the serum half-life of pharmacologically active peptides/proteins
KR100825080B1 (ko) * 2008-02-26 2008-04-25 하양호 충전물의 비중이 일정한 게터
ITMI20121732A1 (it) 2012-10-15 2014-04-16 Getters Spa Pompa getter
TWI660125B (zh) 2014-04-03 2019-05-21 義大利商沙斯格特斯公司 吸氣泵
JP2017101571A (ja) * 2015-11-30 2017-06-08 大学共同利用機関法人 高エネルギー加速器研究機構 非蒸発型ゲッタポンプ
GB2592655B (en) * 2020-03-05 2023-01-11 Edwards Vacuum Llc Pump module
EP4392673B1 (de) 2022-08-01 2024-11-27 Saes Getters S.p.A. Schnappgetterpumpenanordnung und deren verwendung

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB682556A (en) * 1950-07-05 1952-11-12 Cinema Television Ltd Improvements in or relating to methods and apparatus for mounting and firing getters
USB353291I5 (de) * 1967-04-07
US4137012A (en) * 1976-11-03 1979-01-30 S.A.E.S. Getters S.P.A. Modular getter pumps

Also Published As

Publication number Publication date
JPH07509036A (ja) 1995-10-05
WO1994002957A1 (en) 1994-02-03
KR100203018B1 (ko) 1999-07-01
JP2655012B2 (ja) 1997-09-17
KR950701131A (ko) 1995-02-20
IT1255439B (it) 1995-10-31
RU94045979A (ru) 1996-08-10
DE69303901D1 (de) 1996-09-05
CA2128416C (en) 2000-06-13
EP0650639B1 (de) 1996-07-31
CN1082668A (zh) 1994-02-23
ITMI921753A0 (it) 1992-07-17
ES2090998T3 (es) 1996-10-16
CN1057147C (zh) 2000-10-04
EP0650639A1 (de) 1995-05-03
DE69303901T2 (de) 1996-11-28
RU2082251C1 (ru) 1997-06-20
CA2128416A1 (en) 1994-02-03
ITMI921753A1 (it) 1994-01-17

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Legal Events

Date Code Title Description
UEP Publication of translation of european patent specification
REN Ceased due to non-payment of the annual fee