ES2090998T3 - Bomba rarefactora de alta capacidad. - Google Patents

Bomba rarefactora de alta capacidad.

Info

Publication number: ES2090998T3
Authority: ES; Spain
Prior art keywords: high capacity; pump; rarefactor; blades; spaced
Prior art date: 1992-07-17
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Lifetime

Application number

ES93910317T

Other languages

English (en)

Spanish (es)

Inventor

Bruno Ferrario

Paolo Manini

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

SAES Getters SpA

Original Assignee

SAES Getters SpA

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1992-07-17

Filing date

1993-04-23

Publication date

1996-10-16

1993-04-23 Application filed by SAES Getters SpA filed Critical SAES Getters SpA

1996-10-16 Application granted granted Critical

1996-10-16 Publication of ES2090998T3 publication Critical patent/ES2090998T3/es

2013-04-23 Anticipated expiration legal-status Critical

Status Expired - Lifetime legal-status Critical Current

Links

Classifications

- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J7/00—Details not provided for in the preceding groups and common to two or more basic types of discharge tubes or lamps
- H01J7/14—Means for obtaining or maintaining the desired pressure within the vessel
- H01J7/18—Means for absorbing or adsorbing gas, e.g. by gettering
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/02—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by absorption or adsorption

Landscapes

Engineering & Computer Science (AREA)
Mechanical Engineering (AREA)
General Engineering & Computer Science (AREA)
Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Non-Positive Displacement Air Blowers (AREA)

ES93910317T 1992-07-17 1993-04-23 Bomba rarefactora de alta capacidad. Expired - Lifetime ES2090998T3 (es)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
ITMI921753A IT1255439B (it)	1992-07-17	1992-07-17	Pompa getter non evaporabile

Publications (1)

Publication Number	Publication Date
ES2090998T3 true ES2090998T3 (es)	1996-10-16

Family

ID=11363695

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
ES93910317T Expired - Lifetime ES2090998T3 (es)	1992-07-17	1993-04-23	Bomba rarefactora de alta capacidad.

Country Status (11)

Country	Link
EP (1)	EP0650639B1 (de)
JP (1)	JP2655012B2 (de)
KR (1)	KR100203018B1 (de)
CN (1)	CN1057147C (de)
AT (1)	ATE141025T1 (de)
CA (1)	CA2128416C (de)
DE (1)	DE69303901T2 (de)
ES (1)	ES2090998T3 (de)
IT (1)	IT1255439B (de)
RU (1)	RU2082251C1 (de)
WO (1)	WO1994002957A1 (de)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US5685963A (en) *	1994-10-31	1997-11-11	Saes Pure Gas, Inc.	In situ getter pump system and method
US6109880A (en) *	1994-10-31	2000-08-29	Saes Pure Gas, Inc.	Getter pump module and system including focus shields
US5911560A (en) *	1994-10-31	1999-06-15	Saes Pure Gas, Inc.	Getter pump module and system
US6142742A (en) *	1994-10-31	2000-11-07	Saes Pure Gas, Inc.	Getter pump module and system
US5972183A (en) *	1994-10-31	1999-10-26	Saes Getter S.P.A	Getter pump module and system
FR2750248B1 (fr) *	1996-06-19	1998-08-28	Org Europeene De Rech	Dispositif de pompage par getter non evaporable et procede de mise en oeuvre de ce getter
IT1295340B1 (it) *	1997-10-15	1999-05-12	Getters Spa	Pompa getter ad elevata velocita' di assorbimento di gas
CA2254515A1 (en) *	1997-12-23	1999-06-23	Andrea Conte	Getter system for purifying the work atmosphere in the processes of physical vapor deposition
IT1312248B1 (it) *	1999-04-12	2002-04-09	Getters Spa	Metodo per aumentare la produttivita' di processi di deposizione distrati sottili su un substrato e dispositivi getter per la
US20030191056A1 (en)	2002-04-04	2003-10-09	Kenneth Walker	Use of transthyretin peptide/protein fusions to increase the serum half-life of pharmacologically active peptides/proteins
KR100825080B1 (ko) *	2008-02-26	2008-04-25	하양호	충전물의 비중이 일정한 게터
ITMI20121732A1 (it)	2012-10-15	2014-04-16	Getters Spa	Pompa getter
TWI660125B (zh)	2014-04-03	2019-05-21	義大利商沙斯格特斯公司	吸氣泵
JP2017101571A (ja) *	2015-11-30	2017-06-08	大学共同利用機関法人高エネルギー加速器研究機構	非蒸発型ゲッタポンプ
GB2592655B (en) *	2020-03-05	2023-01-11	Edwards Vacuum Llc	Pump module
EP4392673B1 (de)	2022-08-01	2024-11-27	Saes Getters S.p.A.	Schnappgetterpumpenanordnung und deren verwendung

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
GB682556A (en) *	1950-07-05	1952-11-12	Cinema Television Ltd	Improvements in or relating to methods and apparatus for mounting and firing getters
USB353291I5 (de) *	1967-04-07
US4137012A (en) *	1976-11-03	1979-01-30	S.A.E.S. Getters S.P.A.	Modular getter pumps

1992
- 1992-07-17 IT ITMI921753A patent/IT1255439B/it active IP Right Grant
1993
- 1993-04-23 CA CA002128416A patent/CA2128416C/en not_active Expired - Fee Related
- 1993-04-23 ES ES93910317T patent/ES2090998T3/es not_active Expired - Lifetime
- 1993-04-23 RU RU9394045979A patent/RU2082251C1/ru active
- 1993-04-23 DE DE69303901T patent/DE69303901T2/de not_active Expired - Lifetime
- 1993-04-23 AT AT93910317T patent/ATE141025T1/de not_active IP Right Cessation
- 1993-04-23 KR KR1019940702619A patent/KR100203018B1/ko not_active Expired - Lifetime
- 1993-04-23 JP JP6503948A patent/JP2655012B2/ja not_active Expired - Lifetime
- 1993-04-23 EP EP93910317A patent/EP0650639B1/de not_active Expired - Lifetime
- 1993-04-23 WO PCT/IT1993/000040 patent/WO1994002957A1/en not_active Ceased
- 1993-05-31 CN CN93106487A patent/CN1057147C/zh not_active Expired - Lifetime

Also Published As

Publication number	Publication date
JPH07509036A (ja)	1995-10-05
WO1994002957A1 (en)	1994-02-03
KR100203018B1 (ko)	1999-07-01
JP2655012B2 (ja)	1997-09-17
KR950701131A (ko)	1995-02-20
IT1255439B (it)	1995-10-31
RU94045979A (ru)	1996-08-10
DE69303901D1 (de)	1996-09-05
CA2128416C (en)	2000-06-13
EP0650639B1 (de)	1996-07-31
CN1082668A (zh)	1994-02-23
ATE141025T1 (de)	1996-08-15
ITMI921753A0 (it)	1992-07-17
CN1057147C (zh)	2000-10-04
EP0650639A1 (de)	1995-05-03
DE69303901T2 (de)	1996-11-28
RU2082251C1 (ru)	1997-06-20
CA2128416A1 (en)	1994-02-03
ITMI921753A1 (it)	1994-01-17

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1996-10-16

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