ATE141341T1 - Verfahren zur dampfabscheidung eine kohlenstoffschicht auf die oberfläche eines metallsubstrates - Google Patents

Verfahren zur dampfabscheidung eine kohlenstoffschicht auf die oberfläche eines metallsubstrates

Info

Publication number
ATE141341T1
ATE141341T1 AT92402723T AT92402723T ATE141341T1 AT E141341 T1 ATE141341 T1 AT E141341T1 AT 92402723 T AT92402723 T AT 92402723T AT 92402723 T AT92402723 T AT 92402723T AT E141341 T1 ATE141341 T1 AT E141341T1
Authority
AT
Austria
Prior art keywords
article
pretreatment
reactive species
atmosphere
vapor deposition
Prior art date
Application number
AT92402723T
Other languages
English (en)
Inventor
Francois Cellier
Jean-Francois Nowak
Patrick Choquet
Original Assignee
Nitruvid
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nitruvid filed Critical Nitruvid
Application granted granted Critical
Publication of ATE141341T1 publication Critical patent/ATE141341T1/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/006—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterized by the colour of the layer
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02—Pretreatment of the material to be coated
    • C23C16/0272—Deposition of sub-layers, e.g. to promote the adhesion of the main coating
    • C23C16/029—Graded interfaces
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/80—After-treatment
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12458—All metal or with adjacent metals having composition, density, or hardness gradient

Landscapes

  • Chemical & Material Sciences (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
  • Chemical Vapour Deposition (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Physical Vapour Deposition (AREA)
AT92402723T 1991-10-07 1992-10-06 Verfahren zur dampfabscheidung eine kohlenstoffschicht auf die oberfläche eines metallsubstrates ATE141341T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9112322A FR2682125A1 (fr) 1991-10-07 1991-10-07 Procede de traitement pour deposer une couche de carbone en phase vapeur sur la surface d'une piece metallique et piece ainsi obtenue.

Publications (1)

Publication Number Publication Date
ATE141341T1 true ATE141341T1 (de) 1996-08-15

Family

ID=9417664

Family Applications (1)

Application Number Title Priority Date Filing Date
AT92402723T ATE141341T1 (de) 1991-10-07 1992-10-06 Verfahren zur dampfabscheidung eine kohlenstoffschicht auf die oberfläche eines metallsubstrates

Country Status (6)

Country Link
US (1) US5308707A (de)
EP (1) EP0537062B1 (de)
AT (1) ATE141341T1 (de)
CA (1) CA2079978C (de)
DE (1) DE69212760T2 (de)
FR (1) FR2682125A1 (de)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4416525B4 (de) * 1993-05-27 2008-06-05 Oerlikon Trading Ag, Trübbach Verfahren zur Herstellung einer Beschichtung erhöhter Verschleißfestigkeit auf Werkstückoberflächen, und dessen Verwendung
JP2989746B2 (ja) * 1994-07-19 1999-12-13 株式会社ライムズ 鋼系複合表面処理製品とその製造方法
EP0703303A1 (de) * 1994-07-27 1996-03-27 Balzers Sa Korrosions- und verschleissfester Körper sowie Verfahren zu dessen Herstellung
EP0694629A3 (de) 1994-07-27 1998-09-23 Balzers Sa Korrosions- und verschleissfester Körper, Verfahren zu dessen Herstellung sowie Vakuumbehandlungsanlage
US5830540A (en) * 1994-09-15 1998-11-03 Eltron Research, Inc. Method and apparatus for reactive plasma surfacing
US5458927A (en) * 1995-03-08 1995-10-17 General Motors Corporation Process for the formation of wear- and scuff-resistant carbon coatings
CA2184206C (en) * 1995-08-29 2002-10-08 Yasuaki Sakamoto Molded glass plate produced by mold with modified surface
DE19601436A1 (de) * 1996-01-17 1997-07-24 Siegfried Dr Ing Straemke Verfahren und Vorrichtung zur Oberflächenbehandlung von Werkstücken
NZ314334A (en) * 1996-04-19 1997-09-22 Boc Group Inc Method of heat treating a metal with nitrogen rich gas preheated and then having oxygen-reactive gas added
JPH1082390A (ja) * 1996-07-18 1998-03-31 Sanyo Electric Co Ltd 摺動部材、圧縮機及び回転圧縮機
US6165597A (en) * 1998-08-12 2000-12-26 Swagelok Company Selective case hardening processes at low temperature
KR100754811B1 (ko) * 1999-09-07 2007-09-04 시티즌 홀딩스 가부시키가이샤 장식품, 시계 외장 부품 및 그 제조 방법
GB0205959D0 (en) * 2002-03-14 2002-04-24 Teer Coatings Ltd Apparatus and method for applying diamond-like carbon coatings
US7867627B2 (en) 2004-12-13 2011-01-11 Silcotek Corporation Process for the modification of substrate surfaces through the deposition of amorphous silicon layers followed by surface functionalization with organic molecules and functionalized structures
WO2006134066A1 (en) * 2005-06-13 2006-12-21 Nv Bekaert Sa Coated spinning ring
US7506440B2 (en) * 2005-06-28 2009-03-24 General Electric Company Titanium treatment to minimize fretting
US20070249507A1 (en) * 2006-04-24 2007-10-25 Nissan Motor Co., Ltd. Hard carbon film and hard carbon film sliding member
WO2008054787A2 (en) * 2006-10-31 2008-05-08 Restek Corporation Silicon-based decorative coatings
FR2980804B1 (fr) 2011-09-30 2014-06-27 Areva Np Procede de realisation a partir d'une ebauche en acier inoxydable austenitique a faible teneur en carbone d'une gaine resistant a l'usure et a la corrosion pour reacteur nucleaire, gaine et grappe de commande correspondantes
FR2980803B1 (fr) 2011-09-30 2013-10-25 Areva Np Procede de realisation d'une piece en acier inoxydable resistant a l'usure et a la corrosion pour reacteur nucleaire, piece et grappe de commande correspondantes.
JP2013155393A (ja) * 2012-01-27 2013-08-15 Toyota Central R&D Labs Inc 被覆部材およびその製造方法
KR101726236B1 (ko) 2012-11-07 2017-04-13 아레바 엔피 부분 및 대응 마스크를 마스킹하면서 부품을 열화학적으로 처리하기 위한 방법
US10605387B2 (en) * 2013-12-10 2020-03-31 Parker-Hannifin Corporation Multiple layer hardness ferrule and method

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3177094A (en) * 1961-07-14 1965-04-06 Philips Corp Method for coating a molybdenum wire with a carbon layer and the coated article
US3230110A (en) * 1962-01-22 1966-01-18 Temescal Metallurgical Corp Method of forming carbon vapor barrier
US3368914A (en) * 1964-08-05 1968-02-13 Texas Instruments Inc Process for adherently depositing a metal carbide on a metal substrate
US3656995A (en) * 1969-05-02 1972-04-18 Texas Instruments Inc Chemical vapor deposition coatings on titanium
US3684585A (en) * 1970-07-13 1972-08-15 Materials Technology Corp Method for forming adherent titanium carbide coatings on metal or composite substrates
US3900592A (en) * 1973-07-25 1975-08-19 Airco Inc Method for coating a substrate to provide a titanium or zirconium nitride or carbide deposit having a hardness gradient which increases outwardly from the substrate
JPS5138243A (ja) * 1974-09-30 1976-03-30 Toshiba Tungaloy Co Ltd Chokogokinbotainitankachitan oyobi chitsukachitankaranarufukugotaiohifukusuruhoho
US4414085A (en) * 1981-10-08 1983-11-08 Wickersham Charles E Method of depositing a high-emissivity layer
DD255446A3 (de) * 1985-12-23 1988-04-06 Hochvakuum Dresden Veb Hartstoffschicht mit hoher verschleissfestigkeit und dekorativ schwarzer eigenfarbe
FR2596775B1 (fr) * 1986-04-07 1992-11-13 Univ Limoges Revetement dur multicouches elabore par depot ionique de nitrure de titane, carbonitrure de titane et i-carbone
JP2610469B2 (ja) * 1988-02-26 1997-05-14 株式会社 半導体エネルギー研究所 炭素または炭素を主成分とする被膜を形成する方法
GB8823668D0 (en) * 1988-10-08 1988-11-16 Tecvac Ltd Surface treatment of metals & alloys
JP2689146B2 (ja) * 1988-10-31 1997-12-10 新日本製鐵株式会社 硬質炭素膜のコーティング方法
JP2608957B2 (ja) * 1989-06-19 1997-05-14 松下電器産業株式会社 ダイヤモンド薄膜堆積用基板の製造方法
DE3939809A1 (de) * 1989-12-01 1991-06-06 Kwo Werkzeuge Gmbh Verfahren zur herstellung eines werkzeuges fuer die holzbearbeitung und werkzeug
JPH07109034B2 (ja) * 1991-04-08 1995-11-22 ワイケイケイ株式会社 硬質多層膜形成体およびその製造方法

Also Published As

Publication number Publication date
CA2079978C (fr) 2002-11-26
CA2079978A1 (fr) 1993-04-08
US5308707A (en) 1994-05-03
EP0537062B1 (de) 1996-08-14
EP0537062A1 (de) 1993-04-14
DE69212760T2 (de) 1997-01-02
FR2682125A1 (fr) 1993-04-09
FR2682125B1 (de) 1995-01-06
DE69212760D1 (de) 1996-09-19

Similar Documents

Publication Publication Date Title
ATE141341T1 (de) Verfahren zur dampfabscheidung eine kohlenstoffschicht auf die oberfläche eines metallsubstrates
SE7403411L (de)
ATE122734T1 (de) Verfahren zur beschichtung eines werkzeuggrundkörpers und nach diesem verfahren hergestelltes werkzeug.
KR940703938A (ko) 저온 플라즈마 및 전착법을 이용한 금속의 피복방법(method of coating metal using low temperature plasma and electrodeposition)
DE69031629T2 (de) Niedertemperatur-plasmatechnologie zum korrosionsschutz für stahl
Capote et al. Deposition of amorphous hydrogenated carbon films on steel surfaces through the enhanced asymmetrical modified bipolar pulsed-DC PECVD method
ATE218608T1 (de) Verfahren zur versorgung eines rohres mit koksanlagerung- und kohlenmonoxidhemmenden eigenschaften bei dem thermische kracken von kohlenwasserstoffen
Bull et al. The influence of titanium interlayers on the adhesion of titanium nitride coatings obtained by plasma-assisted chemical vapour deposition
GB8601986D0 (en) Steel wire
Boeira et al. Influence of base pressure prior to deposition on the adhesion behaviour of carbon thin films on steel
DE59704123D1 (de) Verfahren zur Aufkohlung metallischer Werkstücke in einem Vakuum-Ofen
CN1219607A (zh) 高温合金的抗腐蚀强度
Koshel et al. Characterization of CFx films plasma chemically deposited from C3F8/C2H2 precursors
DE68908973D1 (de) Verfahren zur Herstellung eines Schutzfilmes auf einem Substrat auf Magnesiumbasis, Anwendung zum Schutz von Magnesiumlegierungen, dabei erhaltene Substrate.
Yasumaru et al. Mechanical properties of type 304 austenitic stainless steel coated with titanium nitride after ion-nitriding
Höck et al. Process technological aspects of the production and properties of in situ combined plasma-nitrided and PVD hard-coated high alloy tool steels
Li et al. Effect of gas inlet positions on plasma carburizing of AISI 1020 steel
Reynoldson Advances in surface treatments using fluidised beds
CA1283816C (en) Method and apparatus for plating and coating and articles produced thereby
CN1201480A (zh) 减少碳沉积物形成的方法
Subrahmanyam Boronizing to Improve Wear Resistance of Steel Parts
Ortner et al. Dynamic PACVD coating of strip metal with silicon oxide, titanium oxide and amorphous carbon films
DE60001673D1 (de) Verfahren zur herstellung eines diamant-beschichteten metallischen gegenstandes und solcher gegenstand so hergestellt
Corre et al. Improvement of tribological properties with duplex treatments
EP1172455A2 (de) Oberflächenbehandlungsverfahren von Titan

Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties