ATE148950T1 - Diamanttemperatursensor - Google Patents
DiamanttemperatursensorInfo
- Publication number
- ATE148950T1 ATE148950T1 AT93306482T AT93306482T ATE148950T1 AT E148950 T1 ATE148950 T1 AT E148950T1 AT 93306482 T AT93306482 T AT 93306482T AT 93306482 T AT93306482 T AT 93306482T AT E148950 T1 ATE148950 T1 AT E148950T1
- Authority
- AT
- Austria
- Prior art keywords
- contacts
- diamond
- temperature
- layer
- sensor
- Prior art date
Links
- 229910003460 diamond Inorganic materials 0.000 title abstract 5
- 239000010432 diamond Substances 0.000 title abstract 5
- 230000005855 radiation Effects 0.000 abstract 2
- 239000000758 substrate Substances 0.000 abstract 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract 1
- 239000004020 conductor Substances 0.000 abstract 1
- 239000013078 crystal Substances 0.000 abstract 1
- 230000001419 dependent effect Effects 0.000 abstract 1
- 239000000463 material Substances 0.000 abstract 1
- 229910052710 silicon Inorganic materials 0.000 abstract 1
- 239000010703 silicon Substances 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
- G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
- G01T1/16—Measuring radiation intensity
- G01T1/26—Measuring radiation intensity with resistance detectors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
- G01K7/34—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using capacitative elements
- G01K7/343—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using capacitative elements the dielectric constant of which is temperature dependant
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- High Energy & Nuclear Physics (AREA)
- Power Engineering (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Molecular Biology (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Thermistors And Varistors (AREA)
- Radiation Pyrometers (AREA)
- Cutting Tools, Boring Holders, And Turrets (AREA)
- Inorganic Insulating Materials (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB929217436A GB9217436D0 (en) | 1992-08-17 | 1992-08-17 | Diamond temperature sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ATE148950T1 true ATE148950T1 (de) | 1997-02-15 |
Family
ID=10720464
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AT93306482T ATE148950T1 (de) | 1992-08-17 | 1993-08-17 | Diamanttemperatursensor |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US5407276A (de) |
| EP (1) | EP0583974B1 (de) |
| JP (1) | JPH0749270A (de) |
| AT (1) | ATE148950T1 (de) |
| DE (1) | DE69308087T2 (de) |
| GB (1) | GB9217436D0 (de) |
| ZA (1) | ZA936006B (de) |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2327306A (en) * | 1996-04-26 | 1999-01-20 | Austin Taylor Communicat Ltd | Electrical socket for two plugs |
| GB9608640D0 (en) * | 1996-04-26 | 1996-07-03 | Austin Taylor Communicat Ltd | An electrical connector |
| FI101831B (fi) * | 1997-02-20 | 1998-08-31 | Quantronics Oy | Menetelmä, laite ja järjestely säteilyn määrittämiseksi |
| US5883844A (en) * | 1997-05-23 | 1999-03-16 | Stmicroelectronics, Inc. | Method of stress testing integrated circuit having memory and integrated circuit having stress tester for memory thereof |
| US7195339B2 (en) * | 1997-07-15 | 2007-03-27 | Silverbrook Research Pty Ltd | Ink jet nozzle assembly with a thermal bend actuator |
| US6505914B2 (en) * | 1997-10-02 | 2003-01-14 | Merckle Gmbh | Microactuator based on diamond |
| EP1052502A4 (de) * | 1998-09-02 | 2003-02-26 | Maekawa Seisakusho Kk | Berührungsloser temperaturmessfühler für nahrungsmittel |
| US6390672B1 (en) * | 2000-01-20 | 2002-05-21 | Harris Corporation | Space vehicle with temperature sensitive oscillator and associated method of sensing temperature in space |
| GB0006318D0 (en) * | 2000-03-15 | 2000-05-03 | De Beers Ind Diamond | Radiation detector |
| JP4528943B2 (ja) * | 2004-04-27 | 2010-08-25 | 独立行政法人産業技術総合研究所 | キャパシタンス温度センサ及び温度測定装置 |
| DE102009018210C5 (de) | 2009-04-21 | 2022-08-18 | Khs Gmbh | Verfahren und Vorrichtung zur Überwachung der Intensität eines Elektronenstrahles |
| US9515243B2 (en) | 2014-12-22 | 2016-12-06 | Infineon Technologies Ag | Temperature sensor |
| US20170097252A1 (en) * | 2015-10-05 | 2017-04-06 | Wisenstech Ltd. | Composite mems flow sensor on silicon-on-insulator device and method of making the same |
| US10480974B2 (en) * | 2015-10-05 | 2019-11-19 | Siargo Ltd. | Composite MEMS flow sensor on silicon-on-insulator device and method of making the same |
Family Cites Families (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR959423A (fr) * | 1947-05-14 | 1950-03-29 | Western Electric Co | Procédés et appareils pour induire une conductibilité électrique dans les isolants. |
| US2760078A (en) * | 1952-05-27 | 1956-08-21 | Well Surveys Inc | Conduction counter for radioactivity well logging |
| US3065402A (en) * | 1959-12-21 | 1962-11-20 | Ibm | Temperature stabilized non-linear reactance elements and circuits |
| GB998534A (en) * | 1961-03-27 | 1965-07-14 | Intron Int Inc | Thermally sensitive capacitive circuit element |
| US3493913A (en) * | 1968-10-17 | 1970-02-03 | Orvin E Wagner | Thermally sensitive material of the semiconductor or dielectric type |
| GB1260730A (en) * | 1969-06-13 | 1972-01-19 | Max Charles Robinson | Improvements in and relating to capacitance thermometers |
| US3649891A (en) * | 1970-06-18 | 1972-03-14 | Corning Glass Works | Capacitive cryogenic thermometer |
| US3728641A (en) * | 1970-08-06 | 1973-04-17 | Suwa Seikosha Kk | Variable temperature compensating capacitor for crystal oscillators |
| US3716759A (en) * | 1970-10-12 | 1973-02-13 | Gen Electric | Electronic device with thermally conductive dielectric barrier |
| US4213797A (en) * | 1978-03-23 | 1980-07-22 | Arden Sher | Radiant energy to electric energy converter |
| US4545254A (en) * | 1984-06-01 | 1985-10-08 | Ceramphysics, Inc. | Materials and methods for pressure and temperature sensors at cryogenic temperatures |
| JPS6488128A (en) * | 1987-09-29 | 1989-04-03 | Murata Manufacturing Co | Temperature sensor |
| CA1289683C (en) * | 1987-10-27 | 1991-09-24 | De Beers Industrial Diamond Division (Proprietary) | Diamond radiation probe |
| JP2695000B2 (ja) * | 1989-04-11 | 1997-12-24 | 住友電気工業株式会社 | サーミスタ及びその製造方法 |
| US5102720A (en) * | 1989-09-22 | 1992-04-07 | Cornell Research Foundation, Inc. | Co-fired multilayer ceramic tapes that exhibit constrained sintering |
| US5027253A (en) * | 1990-04-09 | 1991-06-25 | Ibm Corporation | Printed circuit boards and cards having buried thin film capacitors and processing techniques for fabricating said boards and cards |
-
1992
- 1992-08-17 GB GB929217436A patent/GB9217436D0/en active Pending
-
1993
- 1993-08-17 JP JP5235981A patent/JPH0749270A/ja active Pending
- 1993-08-17 ZA ZA936006A patent/ZA936006B/xx unknown
- 1993-08-17 DE DE69308087T patent/DE69308087T2/de not_active Expired - Fee Related
- 1993-08-17 EP EP93306482A patent/EP0583974B1/de not_active Expired - Lifetime
- 1993-08-17 US US08/107,525 patent/US5407276A/en not_active Expired - Fee Related
- 1993-08-17 AT AT93306482T patent/ATE148950T1/de not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| DE69308087D1 (de) | 1997-03-27 |
| GB9217436D0 (en) | 1992-09-30 |
| JPH0749270A (ja) | 1995-02-21 |
| EP0583974B1 (de) | 1997-02-12 |
| DE69308087T2 (de) | 1997-08-28 |
| ZA936006B (en) | 1994-03-10 |
| US5407276A (en) | 1995-04-18 |
| EP0583974A1 (de) | 1994-02-23 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| ATE148950T1 (de) | Diamanttemperatursensor | |
| US5719033A (en) | Thin film transistor bio/chemical sensor | |
| AU511235B2 (en) | Semiconductor device including an amorphous silicon layer | |
| DE69111960D1 (de) | Neutronendetektor aus Diamant. | |
| ATE252244T1 (de) | Elektrochrome vorrichtung | |
| GB1536717A (en) | Surface acoustic wave devices | |
| DE3171252D1 (en) | Method for making an electrical contact to a silicon substrate through a relatively thin layer of silicon dioxide on the surface of the substrate and method for making a field effect transistor | |
| EP0157489A3 (de) | Feldeffekttransistoren aus amorphem Silicium, ihre Herstellung und ihre Anwendung bei Flüssigkristall-Anzeigetafeln | |
| EP0081992A3 (de) | Halbleiteranordnung mit keramischer Packung | |
| JPS6486053A (en) | Sensitive element | |
| WO1988008965A3 (fr) | Dispositif de mesure de la temperature de corps semi-conducteurs, son procede de fabrication et procede de mesure de la temperature de corps semi-conducteurs lors de processus de malleabilisation | |
| SG66275A1 (en) | Semiconductor device containing electrostatic capacitive element and method for manufacturing same | |
| TW529773U (en) | Semiconductor device | |
| JPS55121669A (en) | Method of forming inactive layer on integrated circuit device having substrate of semiconductor material | |
| FR2487123B1 (fr) | Dispositif semi-conducteur et procede pour relier celui-ci a un support | |
| JPS5650533A (en) | Semiconductor device | |
| JPS5762053A (en) | Photoconductive member | |
| JPS5387188A (en) | Semiconductor device | |
| JPS5350979A (en) | Method of treatment of thin oxide layer on silicon substrate | |
| JPS5759389A (en) | Semiconductor strain gauge type pressure sensor | |
| JPS53129981A (en) | Production of semiconductor device | |
| GB1513371A (en) | Sensor or detector element for an electrical hygrometer | |
| JPS6420558A (en) | Photosensitive body and its manufacture | |
| JPS5339879A (en) | Production of silicon gate mis semiconductor device | |
| KR960008734B1 (en) | Thin film transistor and manufacturing method thereof |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |