ATE157450T1 - Vorrichtung zum selektiven nachweis von gasen - Google Patents

Vorrichtung zum selektiven nachweis von gasen

Info

Publication number
ATE157450T1
ATE157450T1 AT93913090T AT93913090T ATE157450T1 AT E157450 T1 ATE157450 T1 AT E157450T1 AT 93913090 T AT93913090 T AT 93913090T AT 93913090 T AT93913090 T AT 93913090T AT E157450 T1 ATE157450 T1 AT E157450T1
Authority
AT
Austria
Prior art keywords
voltage
face
pct
gas
substrate
Prior art date
Application number
AT93913090T
Other languages
English (en)
Inventor
Muriel Loesch
Francis Menil
Claude Lucat
Pascale Dutronc
Veronique Marteau
Original Assignee
Gaz De France
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Gaz De France filed Critical Gaz De France
Application granted granted Critical
Publication of ATE157450T1 publication Critical patent/ATE157450T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/122—Circuits particularly adapted therefor, e.g. linearising circuits
    • G01N27/123—Circuits particularly adapted therefor, e.g. linearising circuits for controlling the temperature

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
AT93913090T 1992-06-04 1993-06-04 Vorrichtung zum selektiven nachweis von gasen ATE157450T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9206791A FR2692047B1 (fr) 1992-06-04 1992-06-04 Capteur de detection selective de gaz et dispositif pour sa mise en óoeuvre.

Publications (1)

Publication Number Publication Date
ATE157450T1 true ATE157450T1 (de) 1997-09-15

Family

ID=9430444

Family Applications (1)

Application Number Title Priority Date Filing Date
AT93913090T ATE157450T1 (de) 1992-06-04 1993-06-04 Vorrichtung zum selektiven nachweis von gasen

Country Status (9)

Country Link
US (1) US5573728A (de)
EP (1) EP0597078B1 (de)
JP (1) JPH07500916A (de)
AT (1) ATE157450T1 (de)
CA (1) CA2114633A1 (de)
DE (1) DE69313406D1 (de)
ES (1) ES2107036T3 (de)
FR (1) FR2692047B1 (de)
WO (1) WO1993024827A1 (de)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5977687A (en) * 1996-07-12 1999-11-02 Advanced Technology Materials, Inc. Piezoelectric end point sensor for detection of breakthrough of fluid, and fluid processing apparatus comprising same
US5827947A (en) * 1997-01-17 1998-10-27 Advanced Technology Materials, Inc. Piezoelectric sensor for hydride gases, and fluid monitoring apparatus comprising same
US6244121B1 (en) * 1998-03-06 2001-06-12 Applied Materials, Inc. Sensor device for non-intrusive diagnosis of a semiconductor processing system
DE19818474A1 (de) * 1998-04-24 1999-11-25 Siemens Ag Gassensor und Verwendung
US6029500A (en) * 1998-05-19 2000-02-29 Advanced Technology Materials, Inc. Piezoelectric quartz crystal hydrogen sensor, and hydrogen sensing method utilizing same
US6079252A (en) * 1998-05-20 2000-06-27 Advanced Technology Materials, Inc. Leak detection device, and fluid vessel assembly comprising same
US6156578A (en) * 1998-06-01 2000-12-05 Advanced Technology Materials, Inc. Quartz crystal microbalance system for detecting concentration of a selected gas component in a multicomponent gas stream
ITMI981248A1 (it) * 1998-06-04 1999-12-04 Enitecnologie Spa Processo per la determinazione di mtbe nei terreni e nell'aria
US6095681A (en) * 1998-07-28 2000-08-01 The United States Of America As Represented By The Secretary Of Commerce Method for operating a sensor to differentiate between analytes in a sample
US6295861B1 (en) 1999-01-28 2001-10-02 Advanced Technology Materials, Inc. Quartz crystal microbalance sensors and semiconductor manufacturing process systems comprising same
US6166356A (en) * 1999-04-19 2000-12-26 Hewlett-Packard Temperature monitoring system
DE10066163B4 (de) * 1999-04-19 2004-12-16 Hewlett-Packard Co. (N.D.Ges.D.Staates Delaware), Palo Alto Temperaturüberwachungssystem
US20050233770A1 (en) * 2002-02-06 2005-10-20 Ramsey Craig C Wireless substrate-like sensor
US7289230B2 (en) * 2002-02-06 2007-10-30 Cyberoptics Semiconductors, Inc. Wireless substrate-like sensor
US20050224902A1 (en) * 2002-02-06 2005-10-13 Ramsey Craig C Wireless substrate-like sensor
KR101259218B1 (ko) 2006-02-21 2013-04-29 싸이버옵틱스 쎄미콘덕터 인코퍼레이티드 반도체 처리 툴의 용량성 거리 감지 장치 및 방법
US7893697B2 (en) 2006-02-21 2011-02-22 Cyberoptics Semiconductor, Inc. Capacitive distance sensing in semiconductor processing tools
WO2008042199A2 (en) * 2006-09-29 2008-04-10 Cyberoptics Semiconductor, Inc. Particles sensor integrated with substrate
US7778793B2 (en) * 2007-03-12 2010-08-17 Cyberoptics Semiconductor, Inc. Wireless sensor for semiconductor processing systems
EP2105733A1 (de) * 2008-03-26 2009-09-30 Micronas GmbH Verfahren zum Messen der Konzentration eines Gases
EP2762868B1 (de) * 2013-01-31 2017-03-15 Sensirion AG Diffusionsbasierter Metalloxidgassensor

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2737385A1 (de) * 1977-08-19 1979-03-22 Licentia Gmbh Gasspuerelement zum nachweis von fetten und geruchsstoffen in duensten
US4443791A (en) * 1978-01-05 1984-04-17 Risgin Ojars Self-compensating gas detection apparatus
JPS5766347A (en) * 1980-10-09 1982-04-22 Hitachi Ltd Detector for mixture gas
JPS6014148A (ja) * 1983-07-05 1985-01-24 Nippon Soken Inc ガスセンサ
US4541988A (en) * 1983-12-13 1985-09-17 Bacharach Instrument Company Constant temperature catalytic gas detection instrument
JPH01109250A (ja) * 1987-10-22 1989-04-26 Toshiba Corp ガスセンサ
US4911892A (en) * 1987-02-24 1990-03-27 American Intell-Sensors Corporation Apparatus for simultaneous detection of target gases
JPH07104309B2 (ja) * 1987-03-20 1995-11-13 株式会社東芝 ガスセンサの製造方法
US4847783A (en) * 1987-05-27 1989-07-11 Richard Grace Gas sensing instrument
US5047214A (en) * 1989-03-08 1991-09-10 New Cosmos Electric Co., Ltd. Smell sensing element and smell sensing device
IT1241405B (it) * 1990-03-02 1994-01-14 Eniricerche Spa Sensori di gas per determinare idrocarburi gassosi realizzati con film sottili di ossido di stagno
IT1256759B (it) * 1992-12-23 1995-12-15 Eniricerche Spa Sensore di gas a base di ossido semiconduttore per determinare idrocarburi gassosi

Also Published As

Publication number Publication date
US5573728A (en) 1996-11-12
FR2692047B1 (fr) 1995-08-04
CA2114633A1 (fr) 1993-12-09
WO1993024827A1 (fr) 1993-12-09
EP0597078B1 (de) 1997-08-27
DE69313406D1 (de) 1997-10-02
FR2692047A1 (fr) 1993-12-10
JPH07500916A (ja) 1995-01-26
ES2107036T3 (es) 1997-11-16
EP0597078A1 (de) 1994-05-18

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