ATE157465T1 - Lichtfilter für die mikroelektronik - Google Patents

Lichtfilter für die mikroelektronik

Info

Publication number
ATE157465T1
ATE157465T1 AT88901669T AT88901669T ATE157465T1 AT E157465 T1 ATE157465 T1 AT E157465T1 AT 88901669 T AT88901669 T AT 88901669T AT 88901669 T AT88901669 T AT 88901669T AT E157465 T1 ATE157465 T1 AT E157465T1
Authority
AT
Austria
Prior art keywords
microelectronics
light filter
filters
resin
substrates
Prior art date
Application number
AT88901669T
Other languages
English (en)
Inventor
Terry L Brewer
Dan W Hawley
James E Lamb
William J Latham
Lynn K Stichnote
Original Assignee
Brewer Science Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US07/002,107 external-priority patent/US4876165A/en
Application filed by Brewer Science Inc filed Critical Brewer Science Inc
Application granted granted Critical
Publication of ATE157465T1 publication Critical patent/ATE157465T1/de

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0005—Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
    • G03F7/0007—Filters, e.g. additive colour filters; Components for display devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00—Constructional details of devices covered by this subclass
    • H10F77/30—Coatings
    • H10F77/306—Coatings for devices having potential barriers
    • H10F77/331—Coatings for devices having potential barriers for filtering or shielding light, e.g. multicolour filters for photodetectors

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Filters (AREA)
  • Silicon Polymers (AREA)
  • Glass Compositions (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Microscoopes, Condenser (AREA)
  • Gyroscopes (AREA)
AT88901669T 1987-01-12 1988-01-12 Lichtfilter für die mikroelektronik ATE157465T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/002,107 US4876165A (en) 1982-09-30 1987-01-12 Light filters for microelectronics

Publications (1)

Publication Number Publication Date
ATE157465T1 true ATE157465T1 (de) 1997-09-15

Family

ID=21699277

Family Applications (1)

Application Number Title Priority Date Filing Date
AT88901669T ATE157465T1 (de) 1987-01-12 1988-01-12 Lichtfilter für die mikroelektronik

Country Status (6)

Country Link
EP (1) EP0298116B1 (de)
JP (1) JPH01501973A (de)
KR (1) KR960005891B1 (de)
AT (1) ATE157465T1 (de)
DE (1) DE3856007T2 (de)
WO (1) WO1988005180A1 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0434273B1 (de) * 1989-12-22 1997-08-20 Texas Instruments Incorporated Filter für elektromagnetische Strahlung und Herstellungsverfahren
DE4021556A1 (de) * 1990-07-06 1992-01-09 Draegerwerk Ag Vorrichtung zur messung der konzentration von gas- und/oder dampffoermigen komponenten eines gasgemisches
KR19990007801A (ko) * 1995-04-17 1999-01-25 테리 엘.블루어 색필터용 기재로 사용 가능한 개질된 폴리(말레산 무수물-코-스티렌) 및 관련 중합체
JP4111281B2 (ja) * 1997-04-15 2008-07-02 共同印刷株式会社 液晶表示用カラーフィルタ
JP2002278056A (ja) * 2001-03-16 2002-09-27 Sumitomo Chem Co Ltd 着色感光性樹脂組成物
CN1529833A (zh) * 2001-05-15 2004-09-15 昭和电工株式会社 光敏着色组合物、使用该组合物的滤色器及其生产方法
WO2003047273A2 (de) * 2001-11-15 2003-06-05 Stmicroelectronics Nv Farbfiltermatrix für einen optischen bildsensor
JP4657147B2 (ja) * 2006-05-24 2011-03-23 住友化学株式会社 着色感光性樹脂組成物、カラーフィルタ、イメージセンサおよびカメラシステム
KR101368585B1 (ko) 2009-06-15 2014-02-28 제이에스알 가부시끼가이샤 감방사선성 수지 조성물, 레지스트 패턴 형성 방법, 화합물 및 중합체

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4345011A (en) * 1978-01-30 1982-08-17 Eastman Kodak Company Color imaging devices and color filter arrays using photo-bleachable dyes
JPS55126487A (en) * 1979-03-26 1980-09-30 Fuji Photo Film Co Ltd Colored-picture forming method
US4315978A (en) * 1980-03-06 1982-02-16 Eastman Kodak Company Solid-state color imaging device having a color filter array using a photocrosslinkable barrier
NL8103146A (nl) * 1980-07-03 1982-02-01 Dainippon Screen Mfg Werkwijze voor het vervaardigen van streepzeven.
JPS5840507A (ja) * 1981-09-02 1983-03-09 Sharp Corp 固体撮像素子におけるカラ−フイルタ−の製造方法
US4355087A (en) * 1981-09-04 1982-10-19 Eastman Kodak Company Color imaging device having a color filter array using a metal salt of a long-chain fatty acid as a barrier
JPS58100108A (ja) * 1981-12-10 1983-06-14 Victor Co Of Japan Ltd 色フイルタ素子
JPS6033506A (ja) * 1983-08-04 1985-02-20 Seiko Instr & Electronics Ltd カラ−固体撮像素子の製造方法
JPH0690324B2 (ja) * 1984-03-02 1994-11-14 東レ株式会社 カラ−フイルタ用耐熱着色ペ−スト
JPS60184204A (ja) * 1984-03-02 1985-09-19 Toray Ind Inc カラ−フイルタ用耐熱性着色ペ−スト
JPS60237403A (ja) * 1984-05-10 1985-11-26 Toppan Printing Co Ltd カラ−フィルタ−およびその製造方法
JPS6177804A (ja) * 1984-09-25 1986-04-21 Kyodo Printing Co Ltd カラ−フィルタの製造方法
JPS6199102A (ja) * 1984-10-17 1986-05-17 Sanyo Kokusaku Pulp Co Ltd カラ−フイルタ−の製法
JPH0782124B2 (ja) * 1985-02-05 1995-09-06 共同印刷株式会社 カラーフィルタの製造方法
JPH0690325B2 (ja) * 1985-05-08 1994-11-14 東レ株式会社 カラ−フイルタ
JPS62150202A (ja) * 1985-12-24 1987-07-04 Seiko Epson Corp カラ−フイルタ−の製造方法
FR2595148B1 (fr) * 1986-02-28 1988-04-29 Commissariat Energie Atomique Filtres colores, leur procede de fabrication et solution utilisable pour la mise en oeuvre de ce procede

Also Published As

Publication number Publication date
EP0298116A4 (de) 1990-06-26
DE3856007D1 (de) 1997-10-02
KR890700856A (ko) 1989-04-27
EP0298116B1 (de) 1997-08-27
JPH01501973A (ja) 1989-07-06
WO1988005180A1 (en) 1988-07-14
DE3856007T2 (de) 1998-02-05
EP0298116A1 (de) 1989-01-11
KR960005891B1 (ko) 1996-05-03

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