ATE158134T1 - Verfahren und vorrichtung zur bestimmung der absoluten plasmaparameter - Google Patents

Verfahren und vorrichtung zur bestimmung der absoluten plasmaparameter

Info

Publication number
ATE158134T1
ATE158134T1 AT95119294T AT95119294T ATE158134T1 AT E158134 T1 ATE158134 T1 AT E158134T1 AT 95119294 T AT95119294 T AT 95119294T AT 95119294 T AT95119294 T AT 95119294T AT E158134 T1 ATE158134 T1 AT E158134T1
Authority
AT
Austria
Prior art keywords
plasma parameters
reactor
plasma
radio frequency
digital signals
Prior art date
Application number
AT95119294T
Other languages
English (en)
Inventor
Michael Dr Klick
Original Assignee
Adolf Slaby Inst Forschungsges
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Adolf Slaby Inst Forschungsges filed Critical Adolf Slaby Inst Forschungsges
Application granted granted Critical
Publication of ATE158134T1 publication Critical patent/ATE158134T1/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32917—Plasma diagnostics
    • H01J37/32935—Monitoring and controlling tubes by information coming from the object and/or discharge
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/0006—Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature
    • H05H1/0012—Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature using electromagnetic or particle radiation, e.g. interferometry
    • H05H1/0062—Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature using electromagnetic or particle radiation, e.g. interferometry by using microwaves
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/0006—Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature
    • H05H1/0081—Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature by electric means

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Electromagnetism (AREA)
  • General Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Plasma Technology (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
  • Discharge Heating (AREA)
  • Drying Of Semiconductors (AREA)
AT95119294T 1994-12-21 1995-12-07 Verfahren und vorrichtung zur bestimmung der absoluten plasmaparameter ATE158134T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE4445762A DE4445762A1 (de) 1994-12-21 1994-12-21 Verfahren und Vorrichtung zum Bestimmen absoluter Plasmaparameter

Publications (1)

Publication Number Publication Date
ATE158134T1 true ATE158134T1 (de) 1997-09-15

Family

ID=6536566

Family Applications (1)

Application Number Title Priority Date Filing Date
AT95119294T ATE158134T1 (de) 1994-12-21 1995-12-07 Verfahren und vorrichtung zur bestimmung der absoluten plasmaparameter

Country Status (6)

Country Link
US (2) US5705931A (de)
EP (1) EP0719077B1 (de)
JP (1) JP2872954B2 (de)
AT (1) ATE158134T1 (de)
DE (2) DE4445762A1 (de)
ES (1) ES2109045T3 (de)

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RU2515539C1 (ru) * 2012-12-14 2014-05-10 Федеральное Государственное Бюджетное Образовательное Учреждение Высшего Профессионального Образования "Нижегородский Государственный Университет Им. Н.И. Лобачевского" Способ модификации ионосферной плазмы
US11432732B2 (en) 2016-06-28 2022-09-06 Chiscan Holdings, Llc System and method of measuring millimeter wave of cold atmospheric pressure plasma
US11166762B2 (en) * 2016-06-28 2021-11-09 Chiscan Holdings, L.L.C. Non-thermal plasma generator for detection and treatment of maladies
CN106851953B (zh) * 2017-02-22 2018-12-21 大连理工大学 一种凸凹探针及其等离子体诊断方法
DE102018115389B3 (de) 2018-06-26 2019-08-14 RUHR-UNIVERSITäT BOCHUM Sonde zur Messung von Plasmaparametern
JP2020136144A (ja) * 2019-02-22 2020-08-31 株式会社アルバック プラズマ状態測定装置、および、成膜装置
CN114025664A (zh) 2019-05-06 2022-02-08 智像控股有限责任公司 使用非热等离子体阵列的推定的能量场分析
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CN113648051B (zh) * 2021-08-13 2022-08-02 卡本(深圳)医疗器械有限公司 一种基于emc-emi的自适应射频信号数据处理设备
US12567572B2 (en) * 2023-07-11 2026-03-03 Advanced Energy Industries, Inc. Plasma behaviors predicted by current measurements during asymmetric bias waveform application
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Also Published As

Publication number Publication date
EP0719077A1 (de) 1996-06-26
JPH08222396A (ja) 1996-08-30
ES2109045T3 (es) 1998-01-01
DE69500694D1 (de) 1997-10-16
EP0719077B1 (de) 1997-09-10
DE4445762A1 (de) 1996-06-27
JP2872954B2 (ja) 1999-03-24
US5861752A (en) 1999-01-19
DE69500694T2 (de) 1998-03-26
US5705931A (en) 1998-01-06

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Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties
EEWE Authorization for restitution
UEP Publication of translation of european patent specification
EEIH Change in the person of patent owner