ES2109045T3 - Metodo y aparato para determinar parametros absolutos de un plasma. - Google Patents

Metodo y aparato para determinar parametros absolutos de un plasma.

Info

Publication number
ES2109045T3
ES2109045T3 ES95119294T ES95119294T ES2109045T3 ES 2109045 T3 ES2109045 T3 ES 2109045T3 ES 95119294 T ES95119294 T ES 95119294T ES 95119294 T ES95119294 T ES 95119294T ES 2109045 T3 ES2109045 T3 ES 2109045T3
Authority
ES
Spain
Prior art keywords
plasma
reactor
radio frequency
digital signals
present
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES95119294T
Other languages
English (en)
Inventor
Michael Dr Klick
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ADOLF SLABY INST FORSCHUNGSGES
Original Assignee
ADOLF SLABY INST FORSCHUNGSGES
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ADOLF SLABY INST FORSCHUNGSGES filed Critical ADOLF SLABY INST FORSCHUNGSGES
Application granted granted Critical
Publication of ES2109045T3 publication Critical patent/ES2109045T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32917—Plasma diagnostics
    • H01J37/32935—Monitoring and controlling tubes by information coming from the object and/or discharge
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/0006—Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature
    • H05H1/0012—Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature using electromagnetic or particle radiation, e.g. interferometry
    • H05H1/0062—Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature using electromagnetic or particle radiation, e.g. interferometry by using microwaves
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/0006—Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature
    • H05H1/0081—Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature by electric means

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Electromagnetism (AREA)
  • General Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Plasma Technology (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
  • Discharge Heating (AREA)
  • Drying Of Semiconductors (AREA)

Abstract

LA INVENCION SE REFIERE A UN METODO Y APARATO PARA DETERMINAR PARAMETROS ABSOLUTOS DE PLASMA EN PLASMAS DE BAJA PRESION DE RADIOFRECUENCIA (RF) NO SIMETRICA. DE ACUERDO CON EL METODO DE LA PRESENTE INVENCION, LA CORRIENTE DE DESCARGA DE RADIOFRECUENCIA GENERADA EN UN REACTOR DE PLASMA SE MIDE EN FORMA DE SEÑALES ANALOGICAS EN UNA PORCION DEL REACTOR QUE ACTUA COMO ELECTRODO DE TIERRA, LAS SEÑALES ANALOGICAS SE CONVIERTEN EN SEÑALES DIGITALES Y LOS PARAMETROS DE PLASMA DESEADOS SE EVALUAN DESDE LAS SEÑALES DIGITALES POR MEDIO DE UN ALGORITMO MATEMATICO. EL APARATO DE ACUERDO CON LA PRESENTE INVENCION COMPRENDE UN ELECTRODO DE MEDIDA QUE ESTA COLOCADO DE FORMA AISLADA EN UN REBORDE O RECESO DE LA PARED DEL REACTOR QUE ACTUA AL MENOS COMO UNA PARTE DEL ELECTRODO DE TIERRA. LA INVENCION PUEDE UTILIZARSE CON RESPECTO A UN ATAQUE QUIMICO DE PLASMA EN EL CAMPO TECNICO DE LA TECNOLOGIA SEMICONDUCTORA.
ES95119294T 1994-12-21 1995-12-07 Metodo y aparato para determinar parametros absolutos de un plasma. Expired - Lifetime ES2109045T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE4445762A DE4445762A1 (de) 1994-12-21 1994-12-21 Verfahren und Vorrichtung zum Bestimmen absoluter Plasmaparameter

Publications (1)

Publication Number Publication Date
ES2109045T3 true ES2109045T3 (es) 1998-01-01

Family

ID=6536566

Family Applications (1)

Application Number Title Priority Date Filing Date
ES95119294T Expired - Lifetime ES2109045T3 (es) 1994-12-21 1995-12-07 Metodo y aparato para determinar parametros absolutos de un plasma.

Country Status (6)

Country Link
US (2) US5705931A (es)
EP (1) EP0719077B1 (es)
JP (1) JP2872954B2 (es)
AT (1) ATE158134T1 (es)
DE (2) DE4445762A1 (es)
ES (1) ES2109045T3 (es)

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CN113648051B (zh) * 2021-08-13 2022-08-02 卡本(深圳)医疗器械有限公司 一种基于emc-emi的自适应射频信号数据处理设备
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CN117545157B (zh) * 2024-01-09 2024-03-12 西南交通大学 一种用于测量等离子体电势和电场的诊断方法及系统
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Also Published As

Publication number Publication date
EP0719077A1 (en) 1996-06-26
JPH08222396A (ja) 1996-08-30
DE69500694D1 (de) 1997-10-16
EP0719077B1 (en) 1997-09-10
DE4445762A1 (de) 1996-06-27
JP2872954B2 (ja) 1999-03-24
US5861752A (en) 1999-01-19
ATE158134T1 (de) 1997-09-15
DE69500694T2 (de) 1998-03-26
US5705931A (en) 1998-01-06

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