ATE158410T1 - Einrichtung zum teilchennachweis mit spiegelnder zeile-zu-fleck umsetzender sammeloptik - Google Patents

Einrichtung zum teilchennachweis mit spiegelnder zeile-zu-fleck umsetzender sammeloptik

Info

Publication number
ATE158410T1
ATE158410T1 AT94905946T AT94905946T ATE158410T1 AT E158410 T1 ATE158410 T1 AT E158410T1 AT 94905946 T AT94905946 T AT 94905946T AT 94905946 T AT94905946 T AT 94905946T AT E158410 T1 ATE158410 T1 AT E158410T1
Authority
AT
Austria
Prior art keywords
article
spot
light
mirror
scan line
Prior art date
Application number
AT94905946T
Other languages
English (en)
Inventor
Kevin E Moran
Original Assignee
Ade Optical Syst Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ade Optical Syst Corp filed Critical Ade Optical Syst Corp
Application granted granted Critical
Publication of ATE158410T1 publication Critical patent/ATE158410T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/94—Investigating contamination, e.g. dust

Landscapes

  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Physics & Mathematics (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Image Input (AREA)
  • Measurement Of Radiation (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
AT94905946T 1993-03-22 1993-12-21 Einrichtung zum teilchennachweis mit spiegelnder zeile-zu-fleck umsetzender sammeloptik ATE158410T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/034,081 US5448364A (en) 1993-03-22 1993-03-22 Particle detection system with reflective line-to-spot collector

Publications (1)

Publication Number Publication Date
ATE158410T1 true ATE158410T1 (de) 1997-10-15

Family

ID=21874184

Family Applications (1)

Application Number Title Priority Date Filing Date
AT94905946T ATE158410T1 (de) 1993-03-22 1993-12-21 Einrichtung zum teilchennachweis mit spiegelnder zeile-zu-fleck umsetzender sammeloptik

Country Status (9)

Country Link
US (1) US5448364A (de)
EP (1) EP0690982B1 (de)
JP (1) JP3192426B2 (de)
KR (1) KR960701358A (de)
AT (1) ATE158410T1 (de)
AU (1) AU5985594A (de)
CA (1) CA2153774C (de)
DE (1) DE69314059T2 (de)
WO (1) WO1994022003A1 (de)

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US7586596B2 (en) * 2005-06-24 2009-09-08 Applied Materials, Israel, Ltd. Field folding optical method for imaging system
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FR2892191B1 (fr) * 2005-10-17 2008-04-04 Vai Clecim Soc Par Actions Sim Dispositif compact et procede d'inspection d'un produit en defilement, pour la detection automatique de defauts.
ITUD20070151A1 (it) * 2007-08-31 2009-03-01 Ri Te S P A Ricambi Tessili Apparecchiatura automatica di ispezione ottica per tessuti
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US8836934B1 (en) * 2012-05-15 2014-09-16 The Boeing Company Contamination identification system
CN113189013B (zh) * 2021-04-07 2023-03-24 山西大学 一种光声传感装置及方法

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Also Published As

Publication number Publication date
JPH08508099A (ja) 1996-08-27
US5448364A (en) 1995-09-05
KR960701358A (ko) 1996-02-24
JP3192426B2 (ja) 2001-07-30
DE69314059D1 (de) 1997-10-23
CA2153774A1 (en) 1994-09-29
CA2153774C (en) 2000-02-08
EP0690982B1 (de) 1997-09-17
AU5985594A (en) 1994-10-11
WO1994022003A1 (en) 1994-09-29
DE69314059T2 (de) 1998-04-16
EP0690982A1 (de) 1996-01-10

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