ATE161636T1 - Optisches nahfeldabtastmikroskop - Google Patents

Optisches nahfeldabtastmikroskop

Info

Publication number
ATE161636T1
ATE161636T1 AT92810813T AT92810813T ATE161636T1 AT E161636 T1 ATE161636 T1 AT E161636T1 AT 92810813 T AT92810813 T AT 92810813T AT 92810813 T AT92810813 T AT 92810813T AT E161636 T1 ATE161636 T1 AT E161636T1
Authority
AT
Austria
Prior art keywords
sample
probe tip
microscope
scaning
lightwaves
Prior art date
Application number
AT92810813T
Other languages
English (en)
Inventor
Daniel Dr Courjon
Optics Lab Duffieux
Wolfgang Dieter Dr Pohl
Original Assignee
Ibm
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ibm filed Critical Ibm
Application granted granted Critical
Publication of ATE161636T1 publication Critical patent/ATE161636T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/18—SNOM [Scanning Near-Field Optical Microscopy] or apparatus therefor, e.g. SNOM probes
    • G01Q60/22—Probes, their manufacture, or their related instrumentation, e.g. holders
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/862—Near-field probe

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Nanotechnology (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • General Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biophysics (AREA)
  • Analytical Chemistry (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Microscoopes, Condenser (AREA)
  • Lenses (AREA)
AT92810813T 1992-10-22 1992-10-22 Optisches nahfeldabtastmikroskop ATE161636T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP92810813A EP0593835B1 (de) 1992-10-22 1992-10-22 Optisches Nahfeldabtastmikroskop

Publications (1)

Publication Number Publication Date
ATE161636T1 true ATE161636T1 (de) 1998-01-15

Family

ID=8212010

Family Applications (1)

Application Number Title Priority Date Filing Date
AT92810813T ATE161636T1 (de) 1992-10-22 1992-10-22 Optisches nahfeldabtastmikroskop

Country Status (5)

Country Link
US (1) US5539197A (de)
EP (1) EP0593835B1 (de)
JP (1) JP2555531B2 (de)
AT (1) ATE161636T1 (de)
DE (1) DE69223789T2 (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0722574B1 (de) * 1993-10-04 1998-09-09 International Business Machines Corporation Optisches nahfeldmikroskop
EP0763742B1 (de) * 1994-05-31 2008-04-02 Kanagawa Academy Of Science And Technology Optische faser und deren herstellung
US5479024A (en) * 1994-08-11 1995-12-26 The Regents Of The University Of California Method and apparatus for performing near-field optical microscopy
JP2936311B2 (ja) * 1994-09-09 1999-08-23 セイコーインスツルメンツ株式会社 液中観察機能付き走査型近視野原子間力顕微鏡
US5859364A (en) * 1995-06-05 1999-01-12 Olympus Optical Co., Ltd. Scanning probe microscope
US5625617A (en) * 1995-09-06 1997-04-29 Lucent Technologies Inc. Near-field optical apparatus with a laser having a non-uniform emission face
US5952562A (en) * 1995-11-22 1999-09-14 Olympus Optical Co., Ltd. Scanning probe microscope incorporating an optical microscope
US5796487A (en) * 1996-06-28 1998-08-18 Polaroid Corporation Dark field, photon tunneling imaging systems and methods for optical recording and retrieval
DE19741122C2 (de) * 1997-09-12 2003-09-25 Forschungsverbund Berlin Ev Anordnung zur Vermessung und Strukturierung (Nahfeldanordnung)
JP3416589B2 (ja) 1999-09-14 2003-06-16 理化学研究所 部材の先端部に金属微粒子を生成して固定する方法およびその装置ならびにプローブ
US7170842B2 (en) * 2001-02-15 2007-01-30 Hewlett-Packard Development Company, L.P. Methods for conducting current between a scanned-probe and storage medium
US7234343B2 (en) * 2004-03-08 2007-06-26 Virginia Tech Intellectual Properties, Inc. Method and apparatus for evanescent filed measuring of particle-solid separation

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3276138D1 (en) * 1982-12-27 1987-05-27 Ibm Optical near-field scanning microscope
US5202004A (en) * 1989-12-20 1993-04-13 Digital Instruments, Inc. Scanning electrochemical microscopy
US5105305A (en) * 1991-01-10 1992-04-14 At&T Bell Laboratories Near-field scanning optical microscope using a fluorescent probe

Also Published As

Publication number Publication date
JP2555531B2 (ja) 1996-11-20
JPH07140155A (ja) 1995-06-02
DE69223789D1 (de) 1998-02-05
US5539197A (en) 1996-07-23
EP0593835A1 (de) 1994-04-27
DE69223789T2 (de) 1998-06-25
EP0593835B1 (de) 1997-12-29

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Legal Events

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