ATE164233T1 - Durch reaktives gleichstrom-aufstäuben erzeugte antireflektionsschichten - Google Patents

Durch reaktives gleichstrom-aufstäuben erzeugte antireflektionsschichten

Info

Publication number
ATE164233T1
ATE164233T1 AT91919070T AT91919070T ATE164233T1 AT E164233 T1 ATE164233 T1 AT E164233T1 AT 91919070 T AT91919070 T AT 91919070T AT 91919070 T AT91919070 T AT 91919070T AT E164233 T1 ATE164233 T1 AT E164233T1
Authority
AT
Austria
Prior art keywords
reactive
deposing
layers produced
antireflection layers
coating
Prior art date
Application number
AT91919070T
Other languages
English (en)
Inventor
Eric R Dickey
Original Assignee
Viratec Thin Films Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Viratec Thin Films Inc filed Critical Viratec Thin Films Inc
Application granted granted Critical
Publication of ATE164233T1 publication Critical patent/ATE164233T1/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11—Anti-reflection coatings
    • G02B1/113—Anti-reflection coatings using inorganic layer materials only
    • G02B1/115—Multilayers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11—Anti-reflection coatings
    • G02B1/113—Anti-reflection coatings using inorganic layer materials only
    • G02B1/115—Multilayers
    • G02B1/116—Multilayers including electrically conducting layers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Inorganic Chemistry (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Surface Treatment Of Optical Elements (AREA)
  • Surface Treatment Of Glass (AREA)
  • Physical Vapour Deposition (AREA)
  • Fuel Cell (AREA)
  • Golf Clubs (AREA)
  • Vessels, Lead-In Wires, Accessory Apparatuses For Cathode-Ray Tubes (AREA)
  • Road Signs Or Road Markings (AREA)
  • Heat-Pump Type And Storage Water Heaters (AREA)
  • Laminated Bodies (AREA)
AT91919070T 1990-10-11 1991-10-10 Durch reaktives gleichstrom-aufstäuben erzeugte antireflektionsschichten ATE164233T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/595,552 US5105310A (en) 1990-10-11 1990-10-11 Dc reactively sputtered antireflection coatings

Publications (1)

Publication Number Publication Date
ATE164233T1 true ATE164233T1 (de) 1998-04-15

Family

ID=24383697

Family Applications (1)

Application Number Title Priority Date Filing Date
AT91919070T ATE164233T1 (de) 1990-10-11 1991-10-10 Durch reaktives gleichstrom-aufstäuben erzeugte antireflektionsschichten

Country Status (9)

Country Link
US (1) US5105310A (de)
EP (1) EP0505547B1 (de)
JP (1) JPH05503372A (de)
AT (1) ATE164233T1 (de)
CA (1) CA2070637C (de)
DE (1) DE69129103T2 (de)
DK (1) DK0505547T3 (de)
ES (1) ES2115621T3 (de)
WO (1) WO1992007287A1 (de)

Families Citing this family (56)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5270858A (en) * 1990-10-11 1993-12-14 Viratec Thin Films Inc D.C. reactively sputtered antireflection coatings
US5332618A (en) * 1992-02-07 1994-07-26 Tru Vue, Inc. Antireflection layer system with integral UV blocking properties
US5667880A (en) * 1992-07-20 1997-09-16 Fuji Photo Optical Co., Ltd. Electroconductive antireflection film
US5508091A (en) * 1992-12-04 1996-04-16 Photran Corporation Transparent electrodes for liquid cells and liquid crystal displays
US5776594A (en) * 1992-12-04 1998-07-07 Photran Corporation Transparent electrodes for liquid cells and liquid crystal displays
WO1994019709A1 (en) * 1993-02-19 1994-09-01 Photran Corporation A light attenuating anti-reflection coating including electrically conductive layers
US5725959A (en) * 1993-03-18 1998-03-10 Canon Kabushiki Kaisha Antireflection film for plastic optical element
US5393675A (en) * 1993-05-10 1995-02-28 The University Of Toledo Process for RF sputtering of cadmium telluride photovoltaic cell
US5450238A (en) * 1993-12-10 1995-09-12 Viratec Thin Films, Inc. Four-layer antireflection coating for deposition in in-like DC sputtering apparatus
US5783360A (en) * 1994-04-13 1998-07-21 Flex Products, Inc. Flexible optical medium with dielectric protective overcoat
US5579162A (en) * 1994-10-31 1996-11-26 Viratec Thin Films, Inc. Antireflection coating for a temperature sensitive substrate
US5744227A (en) * 1995-04-03 1998-04-28 Southwall Technologies Inc. Antireflective coatings comprising a lubricating layer having a specific surface energy
US5662395A (en) * 1995-06-07 1997-09-02 Nova Solutions, Inc. Underdesk computer desk structure with antireflecting viewing window
GB9600210D0 (en) 1996-01-05 1996-03-06 Vanderstraeten E Bvba Improved sputtering targets and method for the preparation thereof
CA2202430C (en) * 1996-04-12 2007-07-03 Junichi Ebisawa Oxide film, laminate and methods for their production
DE19636970A1 (de) * 1996-09-12 1998-03-19 Leybold Systems Gmbh Optisch wirkendes Antireflexschichtsystem
US6266193B1 (en) 1997-07-24 2001-07-24 Cpfilms Inc. Anti-reflective composite
US5851674A (en) * 1997-07-30 1998-12-22 Minnesota Mining And Manufacturing Company Antisoiling coatings for antireflective surfaces and methods of preparation
EP0913712A1 (de) * 1997-10-29 1999-05-06 N.V. Bekaert S.A. Mehrschichtige elektrisch leitende antireflektierende Beschichtung
US6074730A (en) * 1997-12-31 2000-06-13 The Boc Group, Inc. Broad-band antireflection coating having four sputtered layers
US6277485B1 (en) 1998-01-27 2001-08-21 3M Innovative Properties Company Antisoiling coatings for antireflective surfaces and methods of preparation
US6583935B1 (en) 1998-05-28 2003-06-24 Cpfilms Inc. Low reflection, high transmission, touch-panel membrane
EP0994368A3 (de) * 1998-10-13 2000-05-03 Nikon Corporation Antireflektionsschichten, optische Elementen und diese vewendendes, verkleinerndes Projektionsbelichtungssystem
US6144479A (en) * 1998-12-16 2000-11-07 3M Innovative Properties Company Low reflectivity contrast enhancement filter
FR2793889B1 (fr) * 1999-05-20 2002-06-28 Saint Gobain Vitrage Substrat transparent a revetement anti-reflets
FR2810118B1 (fr) 2000-06-07 2005-01-21 Saint Gobain Vitrage Substrat transparent comportant un revetement antireflet
US6416872B1 (en) 2000-08-30 2002-07-09 Cp Films, Inc. Heat reflecting film with low visible reflectance
US6441964B1 (en) * 2001-01-10 2002-08-27 Applied Vacuum Coating Technologies Co., Ltd. Anti-reflection high conductivity multi-layer coating for flat CRT products
US6586101B2 (en) 2001-04-18 2003-07-01 Applied Vacuum Coating Technologies Co., Ltd. Anti-reflection coating with transparent surface conductive layer
US6478932B1 (en) 2001-06-21 2002-11-12 Applied Vacuum Coating Technologies Co., Ltd. Combination process of vacuum sputtering and wet coating for high conductivity and light attenuation anti-reflection coating on CRT surface
US6589657B2 (en) 2001-08-31 2003-07-08 Von Ardenne Anlagentechnik Gmbh Anti-reflection coatings and associated methods
US6783253B2 (en) 2002-03-21 2004-08-31 Guardian Industries Corp. First surface mirror with DLC coating
US20050008784A1 (en) * 2003-06-27 2005-01-13 3M Innovative Properties Company Removal and replacement of antisoiling coatings
CA2544165A1 (en) * 2003-10-28 2005-05-19 Tru Vue, Inc. Anti-reflective coating for a substrate
US20050136180A1 (en) * 2003-12-19 2005-06-23 3M Innovative Properties Company Method of coating a substrate with a fluoropolymer
US7294404B2 (en) * 2003-12-22 2007-11-13 Cardinal Cg Company Graded photocatalytic coatings
ATE377580T1 (de) * 2004-07-12 2007-11-15 Cardinal Cg Co Wartungsarme beschichtungen
US7923114B2 (en) * 2004-12-03 2011-04-12 Cardinal Cg Company Hydrophilic coatings, methods for depositing hydrophilic coatings, and improved deposition technology for thin films
US8092660B2 (en) * 2004-12-03 2012-01-10 Cardinal Cg Company Methods and equipment for depositing hydrophilic coatings, and deposition technologies for thin films
CN101111783B (zh) * 2005-01-31 2010-12-08 旭硝子株式会社 带防反射膜的基体
US20070236798A1 (en) * 2006-04-05 2007-10-11 Shelestak Larry J Antireflective coating and substrates coated therewith
JP2009534563A (ja) 2006-04-19 2009-09-24 日本板硝子株式会社 同等の単独の表面反射率を有する対向機能コーティング
US20080011599A1 (en) 2006-07-12 2008-01-17 Brabender Dennis M Sputtering apparatus including novel target mounting and/or control
US8504153B2 (en) 2007-04-04 2013-08-06 Pacesetter, Inc. System and method for estimating cardiac pressure based on cardiac electrical conduction delays using an implantable medical device
US7662464B2 (en) * 2007-04-04 2010-02-16 Innovation & Infinity Global Corp. Anti-reflection coating with low resistivity function and transparent conductive coating as outermost layer
CA2664369A1 (en) 2007-09-14 2009-03-19 Cardinal Cg Company Low-maintenance coatings, and methods for producing low-maintenance coatings
TW200920796A (en) * 2007-11-12 2009-05-16 Onid Technology Corp Transparent aqueous nanometer sol-gel paint composition without reducing visible light and sunlight transmittance of transparent substrates and coating method thereof
JP2012128135A (ja) * 2010-12-15 2012-07-05 Seiko Epson Corp 光学物品およびその製造方法
US9957609B2 (en) 2011-11-30 2018-05-01 Corning Incorporated Process for making of glass articles with optical and easy-to-clean coatings
US10077207B2 (en) 2011-11-30 2018-09-18 Corning Incorporated Optical coating method, apparatus and product
TWI588112B (zh) * 2011-11-30 2017-06-21 康寧公司 用於製造具光學及易於清潔之塗層的玻璃製品之製程
US20130183489A1 (en) * 2012-01-13 2013-07-18 Melissa Danielle Cremer Reflection-resistant glass articles and methods for making and using same
US9025100B2 (en) * 2012-11-30 2015-05-05 Apple Inc. Display with shielding antireflection layer
CN104166285A (zh) * 2014-08-07 2014-11-26 宜昌南玻显示器件有限公司 Ito导电玻璃及其制备方法
MY189914A (en) 2015-12-17 2022-03-21 Alcon Inc Reusable lens molds and methods of use thereof
US10604442B2 (en) 2016-11-17 2020-03-31 Cardinal Cg Company Static-dissipative coating technology

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2478385A (en) * 1946-12-07 1949-08-09 Libbey Owens Ford Glass Co Multilayer low light reflecting film
US3432225A (en) * 1964-05-04 1969-03-11 Optical Coating Laboratory Inc Antireflection coating and assembly having synthesized layer of index of refraction
US3604784A (en) * 1969-01-21 1971-09-14 Bausch & Lomb Antireflection coatings
US3565509A (en) * 1969-03-27 1971-02-23 Bausch & Lomb Four layered antireflection coatings
US3960441A (en) * 1972-10-06 1976-06-01 Canon Kabushiki Kaisha Anti-reflection coating having pseudo-inhomogeneous layers
US3781090A (en) * 1972-11-06 1973-12-25 Minolta Camera Kk Four layer anti-reflection coating
JPS5314227B2 (de) * 1973-06-18 1978-05-16
US4012119A (en) * 1975-12-12 1977-03-15 Xerox Corporation Direct current liquid crystal display with highly reflecting dielectric mirror
US4313647A (en) * 1975-12-23 1982-02-02 Mamiya Koki Kabushiki Kaisha Nonreflective coating
JPS60181704A (ja) * 1984-02-29 1985-09-17 Canon Inc 真空紫外用反射ミラー
JPS62124503A (ja) * 1985-11-25 1987-06-05 Minolta Camera Co Ltd 多層反射防止膜
JP2719367B2 (ja) * 1988-10-31 1998-02-25 ホーヤ株式会社 多層膜表面反射鏡
JP2620712B2 (ja) * 1988-11-08 1997-06-18 株式会社 トプコン ２波長反射防止多層膜

Also Published As

Publication number Publication date
EP0505547B1 (de) 1998-03-18
DE69129103D1 (de) 1998-04-23
CA2070637C (en) 2002-02-12
EP0505547A1 (de) 1992-09-30
CA2070637A1 (en) 1992-04-12
WO1992007287A1 (en) 1992-04-30
DK0505547T3 (da) 1998-11-30
ES2115621T3 (es) 1998-07-01
US5105310A (en) 1992-04-14
JPH05503372A (ja) 1993-06-03
DE69129103T2 (de) 1998-10-29
EP0505547A4 (en) 1993-02-24

Similar Documents

Publication Publication Date Title
DE69129103D1 (de) Durch reaktives gleichstrom-aufstäuben erzeugte antireflektionsschichten
EP0748260A4 (de) Ionenstrahlverfahren zur herstellung hochabriebfester beschichtungen
DE69112081D1 (de) Wärmehärtende überzugszusammensetzungen mit verbesserter härte.
FI110937B (fi) Moniosainen lasitus, jossa on läpinäkyvä pohja varustettuna ohuilla päällekkäisillä kerroksilla
ATE457961T1 (de) Mehrschichtbekleidung für transparente substrate
AU2003250246A8 (en) Method for production of a glazed piece provided with a multi-layer coating
FI960827A0 (fi) Heijastamattomalla pinnoitteella varustettu läpikuultava substraatti
FR2810118B1 (fr) Substrat transparent comportant un revetement antireflet
ES2108570T3 (es) Procedimiento de metalizacion de materias plasticas, y productos asi obtenidos.
SE9103197D0 (sv) Reflective articles and methods of manufacturing same
JPS56116003A (en) Optical part of synthetic resin having reflection preventing film
TW200608387A (en) Vacuum processing apparatus
DE60143816D1 (de) Flüchtige metallorganische komplexe mit herabgesetzter reaktivität, die zur verwndung bei der cvd-abscheidung von metalloxidfilmen geeignet sind
CA2210604C (en) An article of manufacture having at least in part the surface appearance of brass with a ceramic barrier coating
AU3290695A (en) Alkali metal diffusion barrier layer
DE69219467D1 (de) Verfahren zum Herstellen dünner Schichten durch Mehrlagen-Abscheidung
GB8333752D0 (en) Matte surface on metal layer
EP0852809A4 (de) Metall-schicht-stapel mit zwei dünnen titan-lagen für integrierte schaltung und zugehörige kammerabscheidung
CN108531858A (zh) 具有透明抗菌多层膜的镀膜器件及抗菌多层膜的形成方法
Knotek et al. Arc-ion-plated and magnetron-sputtered Ti-V-N hard coatings
KR101619127B1 (ko) 플라스틱재 표면의 경면보호층 형성방법
JPS589977A (ja) 時計用外装部品
JPS56146879A (en) Vapor deposition method
Zorc et al. A comparative study of the stability of hard oxide coatings produced with and without ion assist
CN119439340A (zh) 一种滤光片及其制作方法与应用

Legal Events

Date Code Title Description
UEP Publication of translation of european patent specification
EELA Cancelled due to lapse of time