ATE168467T1 - Ionisationswandler mit sich gegenuberliegenden magneten - Google Patents

Ionisationswandler mit sich gegenuberliegenden magneten

Info

Publication number
ATE168467T1
ATE168467T1 AT94301848T AT94301848T ATE168467T1 AT E168467 T1 ATE168467 T1 AT E168467T1 AT 94301848 T AT94301848 T AT 94301848T AT 94301848 T AT94301848 T AT 94301848T AT E168467 T1 ATE168467 T1 AT E168467T1
Authority
AT
Austria
Prior art keywords
gauge
magnetic field
magnetic
electrode
common axis
Prior art date
Application number
AT94301848T
Other languages
English (en)
Inventor
Emil Drubetsky
Donald R Taylor Jr
Original Assignee
Fredericks Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fredericks Co filed Critical Fredericks Co
Application granted granted Critical
Publication of ATE168467T1 publication Critical patent/ATE168467T1/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/02—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas
    • H01J41/06—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas with ionisation by means of cold cathodes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges
    • G01L21/30—Vacuum gauges by making use of ionisation effects
    • G01L21/34—Vacuum gauges by making use of ionisation effects using electric discharge tubes with cold cathodes

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Water Treatment By Electricity Or Magnetism (AREA)
  • Hard Magnetic Materials (AREA)
AT94301848T 1993-04-28 1994-03-15 Ionisationswandler mit sich gegenuberliegenden magneten ATE168467T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US5433693A 1993-04-28 1993-04-28

Publications (1)

Publication Number Publication Date
ATE168467T1 true ATE168467T1 (de) 1998-08-15

Family

ID=21990357

Family Applications (1)

Application Number Title Priority Date Filing Date
AT94301848T ATE168467T1 (de) 1993-04-28 1994-03-15 Ionisationswandler mit sich gegenuberliegenden magneten

Country Status (4)

Country Link
US (1) US5568053A (de)
EP (1) EP0622621B1 (de)
AT (1) ATE168467T1 (de)
DE (1) DE69411620T2 (de)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4445828A1 (de) * 1994-12-22 1996-06-27 Leybold Ag Penning-Meßzelle mit Zündhilfe
DE19734914C1 (de) * 1997-08-12 1998-12-10 Saskia Solar Und Energietechni Vakuumsensor nach dem Penning-Prinzip
DE10243634B4 (de) * 2002-09-19 2005-02-03 Otto-Von-Guericke-Universität Magdeburg Kaltkatoden-Ionisationsmanometer
SI21714A (en) 2004-02-23 2005-08-31 Inst Jozef Stefan Procedure and device for measuring ultrahigh vacuum
EP1698878A1 (de) * 2005-03-04 2006-09-06 Inficon GmbH Elektrodenanordnung und Druckmessvorrichtung
JP2006266980A (ja) * 2005-03-25 2006-10-05 Tomoo Matsuo 地嵐発生装置及び該地嵐発生装置を用いた内部探査装置
CN101126668B (zh) * 2007-09-20 2010-06-16 复旦大学 一种放电气体环境离子真空规管辅助仪器
FR2964242B1 (fr) * 2010-08-27 2013-11-22 Areva T & D Sas Dispositif pour mesurer la pression residuelle dans une enceinte a vide scellee, notamment une ampoule a vide
US8453493B2 (en) * 2010-11-02 2013-06-04 Agilent Technologies, Inc. Trace gas sensing apparatus and methods for leak detection
CH705474A1 (de) * 2011-09-08 2013-03-15 Inficon Gmbh Ionisations - Vakuummesszelle.
US8997576B2 (en) * 2013-01-18 2015-04-07 Reno Technologies, Inc. Method and system for monitoring gas pressure for reference cavity of capacitance diaphragm gauge
CH707685A1 (de) 2013-03-06 2014-09-15 Inficon Gmbh Ionisations-Vakuummesszelle mit Abschirmvorrichtung.
CN103325653A (zh) * 2013-06-27 2013-09-25 成都国光电气股份有限公司 一种磁铁型冷阴极真空电离规管
US9671302B2 (en) 2013-09-30 2017-06-06 Mks Instruments, Inc. Cold cathode ionization vacuum gauge
US9588004B2 (en) * 2014-11-07 2017-03-07 Mks Instruments, Inc. Long lifetime cold cathode ionization vacuum gauge design
TWI795918B (zh) 2015-01-15 2023-03-11 美商Ｍｋｓ儀器公司 製造測量裝置之方法
CN105489465B (zh) * 2016-01-14 2017-07-04 成都国光电气股份有限公司 一种真空规管
US10337940B2 (en) * 2016-05-02 2019-07-02 Mks Instruments, Inc. Cold cathode ionization vacuum gauge with multiple cathodes
US10928265B2 (en) 2018-05-29 2021-02-23 Mks Instruments, Inc. Gas analysis with an inverted magnetron source
US10948456B1 (en) 2019-11-27 2021-03-16 Mks Instruments, Inc. Gas analyzer system with ion source
FR3120125B1 (fr) * 2021-02-25 2023-09-08 Saint Gobain Dispositif de mesure de pression vide secondaire et système embarqué pour mesure de pression de vide résiduel

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB638178A (en) * 1947-08-21 1950-05-31 Emi Ltd Improvements relating to apparatus for measuring low gas pressure
US2884550A (en) * 1957-10-17 1959-04-28 Gen Electric Ionization gauges and method of operation thereof
US3171081A (en) * 1962-02-19 1965-02-23 Donald C Garwood Ionization vacuum gauge
US3216652A (en) * 1962-09-10 1965-11-09 Hughes Aircraft Co Ionic vacuum pump
US3435334A (en) * 1966-04-04 1969-03-25 Varian Associates Method and apparatus for measuring high vacuums
US3378712A (en) * 1966-11-18 1968-04-16 Gen Electric Field emission ionization gauge with restricted line of sight between field emissionanode and ion collector
US3505554A (en) * 1968-01-05 1970-04-07 Sergei Arkadievich Vekshinsky Ionization pressure gauge
US3575656A (en) * 1968-08-30 1971-04-20 Ite Imperial Corp Method and apparatus for measuring pressure in vacuum interrupters
US3796917A (en) * 1972-08-21 1974-03-12 Nat Electrostatics Corp Devices for ionizing residual gases in vacuum systems
US3872377A (en) * 1972-10-11 1975-03-18 Tokyo Shibaura Electric Co Cold cathode ionization gauge
US4000457A (en) * 1975-10-06 1976-12-28 Varian Associates Cold cathode ionization gauge control for vacuum measurement
SU637749A1 (ru) * 1977-06-13 1978-12-15 Агрофизический научно-исследовательский институт Магниторазр дный манометр
US4270091A (en) * 1978-01-25 1981-05-26 Varian Associates, Inc. Apparatus and method for measuring pressures and indicating leaks with optical analysis
SU940263A1 (ru) * 1980-12-16 1982-06-30 Агрофизический научно-исследовательский институт Магниторазр дный насос
DE3347176A1 (de) * 1983-12-27 1985-07-04 Siemens AG, 1000 Berlin und 8000 München Vorrichtung zum messen des innendrucks eines betriebsmaessig eingebauten vakuumschalters
US4967157A (en) * 1988-08-29 1990-10-30 Mks Instruments, Inc. Method and circuit for extending the range of a cold cathode discharge vacuum gauge

Also Published As

Publication number Publication date
EP0622621A2 (de) 1994-11-02
EP0622621A3 (de) 1995-03-29
EP0622621B1 (de) 1998-07-15
US5568053A (en) 1996-10-22
DE69411620T2 (de) 1999-02-04
DE69411620D1 (de) 1998-08-20

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Legal Events

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