ATE173197T1 - Tintenstrahlkopfherstellungsverfahren mittels bearbeitung durch ionen und tintenstrahlkopf - Google Patents

Tintenstrahlkopfherstellungsverfahren mittels bearbeitung durch ionen und tintenstrahlkopf

Info

Publication number
ATE173197T1
ATE173197T1 AT93113841T AT93113841T ATE173197T1 AT E173197 T1 ATE173197 T1 AT E173197T1 AT 93113841 T AT93113841 T AT 93113841T AT 93113841 T AT93113841 T AT 93113841T AT E173197 T1 ATE173197 T1 AT E173197T1
Authority
AT
Austria
Prior art keywords
ink jet
jet head
manufacturing
ink
ion machining
Prior art date
Application number
AT93113841T
Other languages
English (en)
Inventor
Keiichi Murakami
Tadayoshi Inamoto
Hirokazu Komuro
Hideaki Mashio
Toshio Suzuki
Original Assignee
Canon Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP23205692A external-priority patent/JPH0671886A/ja
Priority claimed from JP23205492A external-priority patent/JPH0671891A/ja
Priority claimed from JP23205592A external-priority patent/JP3037512B2/ja
Priority claimed from JP23205792A external-priority patent/JPH0671892A/ja
Application filed by Canon Kk filed Critical Canon Kk
Application granted granted Critical
Publication of ATE173197T1 publication Critical patent/ATE173197T1/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1604—Production of bubble jet print heads of the edge shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1643—Manufacturing processes thin film formation thin film formation by plating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/11—Embodiments of or processes related to ink-jet heads characterised by specific geometrical characteristics
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49401—Fluid pattern dispersing device making, e.g., ink jet

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
AT93113841T 1992-08-31 1993-08-30 Tintenstrahlkopfherstellungsverfahren mittels bearbeitung durch ionen und tintenstrahlkopf ATE173197T1 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP23205692A JPH0671886A (ja) 1992-08-31 1992-08-31 インクジェット記録ヘッド
JP23205492A JPH0671891A (ja) 1992-08-31 1992-08-31 インクジェット記録ヘッド、その製造方法、及び記録装置
JP23205592A JP3037512B2 (ja) 1992-08-31 1992-08-31 インクジェット記録ヘッド、その製造方法、及び記録装置
JP23205792A JPH0671892A (ja) 1992-08-31 1992-08-31 インクジェット記録ヘッド

Publications (1)

Publication Number Publication Date
ATE173197T1 true ATE173197T1 (de) 1998-11-15

Family

ID=27477487

Family Applications (1)

Application Number Title Priority Date Filing Date
AT93113841T ATE173197T1 (de) 1992-08-31 1993-08-30 Tintenstrahlkopfherstellungsverfahren mittels bearbeitung durch ionen und tintenstrahlkopf

Country Status (4)

Country Link
US (2) US5649359A (de)
EP (1) EP0585854B1 (de)
AT (1) ATE173197T1 (de)
DE (1) DE69322025T2 (de)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69723764T2 (de) 1996-05-13 2004-04-15 Canon K.K. Tintenstrahldruckkopf und damit versehene Tintenstrahlvorrichtung
US6243112B1 (en) 1996-07-01 2001-06-05 Xerox Corporation High density remote plasma deposited fluoropolymer films
JPH1044419A (ja) * 1996-07-31 1998-02-17 Canon Inc 液体吐出ヘッド、液体吐出ヘッドの製造方法、液体吐出装置、および記録装置
US6382756B1 (en) 1996-07-31 2002-05-07 Canon Kabushiki Kaisha Recording head and recording method
US6084612A (en) * 1996-07-31 2000-07-04 Canon Kabushiki Kaisha Liquid ejection head, liquid ejection head cartridge, printing apparatus, printing system and fabrication process of liquid ejection head
JP3094933B2 (ja) * 1997-01-17 2000-10-03 キヤノン株式会社 光加工機及びそれを用いたオリフィスプレートの製造方法
US5976392A (en) * 1997-03-07 1999-11-02 Yageo Corporation Method for fabrication of thin film resistor
JP3480235B2 (ja) * 1997-04-15 2003-12-15 セイコーエプソン株式会社 インクジェットプリンタヘッドおよびその製造方法
US6154234A (en) * 1998-01-09 2000-11-28 Hewlett-Packard Company Monolithic ink jet nozzle formed from an oxide and nitride composition
US6474780B1 (en) * 1998-04-16 2002-11-05 Canon Kabushiki Kaisha Liquid discharge head, cartridge having such head, liquid discharge apparatus provided with such cartridge, and method for manufacturing liquid discharge heads
US6449831B1 (en) 1998-06-19 2002-09-17 Lexmark International, Inc Process for making a heater chip module
US6039439A (en) * 1998-06-19 2000-03-21 Lexmark International, Inc. Ink jet heater chip module
US6513915B1 (en) * 1998-10-27 2003-02-04 Matsushita Electric Industrial Co., Ltd. Variable dot ink-jet printer
US6652069B2 (en) * 2000-11-22 2003-11-25 Konica Corporation Method of surface treatment, device of surface treatment, and head for use in ink jet printer
JP4669138B2 (ja) * 2001-02-22 2011-04-13 キヤノン株式会社 インクジェット記録ヘッドの製造方法
US7273267B2 (en) * 2003-09-30 2007-09-25 Fujifilm Corporation Bubble-eliminating liquid filling method, droplet discharging apparatus, and inkjet recording apparatus
US7052122B2 (en) * 2004-02-19 2006-05-30 Dimatix, Inc. Printhead
CN1968815B (zh) * 2004-06-28 2013-05-01 佳能株式会社 排液头制造方法，和使用该方法得到的排液头
JP2006142804A (ja) * 2004-10-19 2006-06-08 Ricoh Co Ltd 除去部材及び画像記録装置
KR101054974B1 (ko) * 2006-04-24 2011-08-05 캐논 가부시끼가이샤 잉크 제트 기록 헤드, 잉크 제트 카트리지, 및 잉크 제트 기록 헤드 제조 방법
JP5350205B2 (ja) * 2009-12-16 2013-11-27 キヤノン株式会社 液体吐出ヘッド用基板及び液体吐出ヘッド、およびその製造方法

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3921916A (en) * 1974-12-31 1975-11-25 Ibm Nozzles formed in monocrystalline silicon
US4047184A (en) * 1976-01-28 1977-09-06 International Business Machines Corporation Charge electrode array and combination for ink jet printing and method of manufacture
US4450455A (en) * 1981-06-18 1984-05-22 Canon Kabushiki Kaisha Ink jet head
JPS58220756A (ja) * 1982-06-18 1983-12-22 Canon Inc インクジエツト記録ヘツドの製造方法
JPS58220754A (ja) * 1982-06-18 1983-12-22 Canon Inc インクジエツト記録ヘツド
US4609427A (en) * 1982-06-25 1986-09-02 Canon Kabushiki Kaisha Method for producing ink jet recording head
JPS5919168A (ja) * 1982-07-26 1984-01-31 Canon Inc インクジエツト記録ヘツド
JPS59123672A (ja) * 1982-12-28 1984-07-17 Canon Inc 液体噴射ヘッド及び液体噴射記録装置
US4583690A (en) * 1983-04-05 1986-04-22 Hewlett-Packard Company Anti-wetting in fluid nozzles
JPH0643129B2 (ja) * 1984-03-01 1994-06-08 キヤノン株式会社 インクジェット記録ヘッド
US4881318A (en) * 1984-06-11 1989-11-21 Canon Kabushiki Kaisha Method of manufacturing a liquid jet recording head
US4737644A (en) * 1985-10-30 1988-04-12 International Business Machines Corporation Conductive coated semiconductor electrostatic deflection plates
EP0268213B1 (de) * 1986-11-13 1993-09-01 Canon Kabushiki Kaisha Verfahren zur Oberflächenbehandlung eines Tintenstrahl-Aufzeichnungskopfes
US4860033A (en) * 1987-02-04 1989-08-22 Canon Kabushiki Kaisha Base plate having an oxidation film and an insulating film for ink jet recording head and ink jet recording head using said base plate
JP2527774B2 (ja) * 1987-12-29 1996-08-28 キヤノン株式会社 インクジェット記録装置
JPH02204048A (ja) * 1989-02-03 1990-08-14 Canon Inc インクジェット記録ヘッドおよびその製造方法
DE69027363T2 (de) * 1989-03-24 1996-11-14 Canon Kk Verfahren für die Herstellung von Tintenstrahl-Aufzeichnungsköpfen
US4985710A (en) * 1989-11-29 1991-01-15 Xerox Corporation Buttable subunits for pagewidth "Roofshooter" printheads
US5073785A (en) * 1990-04-30 1991-12-17 Xerox Corporation Coating processes for an ink jet printhead
EP0463866A3 (en) * 1990-06-27 1993-04-28 Mitsubishi Kasei Corporation A fiber-reinforced resin composition
US5136310A (en) * 1990-09-28 1992-08-04 Xerox Corporation Thermal ink jet nozzle treatment
ATE157046T1 (de) * 1991-01-18 1997-09-15 Canon Kk Verfahren zur herstellung eines farbstrahlaufzeichnungskopfes
JP3227703B2 (ja) * 1991-02-04 2001-11-12 セイコーエプソン株式会社 親水性インク流路
JP3264971B2 (ja) * 1991-03-28 2002-03-11 セイコーエプソン株式会社 インクジェット記録ヘッドの製造方法

Also Published As

Publication number Publication date
US5649359A (en) 1997-07-22
DE69322025D1 (de) 1998-12-17
EP0585854B1 (de) 1998-11-11
DE69322025T2 (de) 1999-06-10
US5703630A (en) 1997-12-30
EP0585854A1 (de) 1994-03-09

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Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties