ATE177983T1 - Verfahren und gerät zur automatischen ankopplung eines testkopfs an ein schaltungsbehandlungsgerät - Google Patents

Verfahren und gerät zur automatischen ankopplung eines testkopfs an ein schaltungsbehandlungsgerät

Info

Publication number
ATE177983T1
ATE177983T1 AT95308206T AT95308206T ATE177983T1 AT E177983 T1 ATE177983 T1 AT E177983T1 AT 95308206 T AT95308206 T AT 95308206T AT 95308206 T AT95308206 T AT 95308206T AT E177983 T1 ATE177983 T1 AT E177983T1
Authority
AT
Austria
Prior art keywords
test head
automatically coupling
treatment device
circuit treatment
axis
Prior art date
Application number
AT95308206T
Other languages
English (en)
Inventor
Daniel J Graham
Alyn R Holt
Robert E Matthiessen
I Marvin Weilerstein
Christopher L West
Original Assignee
Intest Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Intest Corp filed Critical Intest Corp
Application granted granted Critical
Publication of ATE177983T1 publication Critical patent/ATE177983T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/04—Housings; Supporting members; Arrangements of terminals
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/16—Program controls
    • B25J9/1694—Program controls characterised by use of sensors other than normal servo-feedback from position, speed or acceleration sensors, perception control, multi-sensor controlled systems, sensor fusion
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2887—Features relating to contacting the IC under test, e.g. probe heads; chucks involving moving the probe head or the IC under test; docking stations
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06705—Apparatus for holding or moving single probes
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/37—Measurements
    • G05B2219/37133—Linear, rotary variable differential transformer, lvdt, rvdt
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/37—Measurements
    • G05B2219/37404—Orientation of workpiece or tool, surface sensor
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/40—Robotics, robotics mapping to robotics vision
    • G05B2219/40082—Docking, align object on end effector with target
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/45—Nc applications
    • G05B2219/45089—Testing robot
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/49—Nc machine tool, till multiple
    • G05B2219/49117—Alignment of surfaces to get them parallel

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Tests Of Electronic Circuits (AREA)
AT95308206T 1994-12-12 1995-11-16 Verfahren und gerät zur automatischen ankopplung eines testkopfs an ein schaltungsbehandlungsgerät ATE177983T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/355,501 US5600258A (en) 1993-09-15 1994-12-12 Method and apparatus for automated docking of a test head to a device handler

Publications (1)

Publication Number Publication Date
ATE177983T1 true ATE177983T1 (de) 1999-04-15

Family

ID=23397664

Family Applications (1)

Application Number Title Priority Date Filing Date
AT95308206T ATE177983T1 (de) 1994-12-12 1995-11-16 Verfahren und gerät zur automatischen ankopplung eines testkopfs an ein schaltungsbehandlungsgerät

Country Status (10)

Country Link
US (2) US5600258A (de)
EP (1) EP0716905B1 (de)
JP (1) JP2878169B2 (de)
KR (1) KR100225805B1 (de)
CN (1) CN1107231C (de)
AT (1) ATE177983T1 (de)
DE (1) DE69508542T2 (de)
MY (1) MY112312A (de)
PH (1) PH31538A (de)
SG (1) SG34322A1 (de)

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US5321352A (en) * 1991-08-01 1994-06-14 Tokyo Electron Yamanashi Limited Probe apparatus and method of alignment for the same
US5404111A (en) * 1991-08-03 1995-04-04 Tokyo Electron Limited Probe apparatus with a swinging holder for an object of examination
US5440943A (en) * 1993-09-15 1995-08-15 Intest Corporation Electronic test head manipulator

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JPH08220190A (ja) 1996-08-30
DE69508542T2 (de) 1999-12-23
MY112312A (en) 2001-05-31
CN1136665A (zh) 1996-11-27
KR100225805B1 (ko) 1999-10-15
SG34322A1 (en) 1996-12-06
EP0716905A3 (de) 1996-08-14
DE69508542D1 (de) 1999-04-29
JP2878169B2 (ja) 1999-04-05
PH31538A (en) 1998-11-03
EP0716905B1 (de) 1999-03-24
EP0716905A2 (de) 1996-06-19
CN1107231C (zh) 2003-04-30
KR960024441A (ko) 1996-07-20
US5900737A (en) 1999-05-04
US5600258A (en) 1997-02-04

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