ATE180923T1 - Gerät und verfahren zum aufbringen durch zerstäubung eines filmes auf einen substrat - Google Patents

Gerät und verfahren zum aufbringen durch zerstäubung eines filmes auf einen substrat

Info

Publication number
ATE180923T1
ATE180923T1 AT95309064T AT95309064T ATE180923T1 AT E180923 T1 ATE180923 T1 AT E180923T1 AT 95309064 T AT95309064 T AT 95309064T AT 95309064 T AT95309064 T AT 95309064T AT E180923 T1 ATE180923 T1 AT E180923T1
Authority
AT
Austria
Prior art keywords
substrate
target
edge
tube
sputting
Prior art date
Application number
AT95309064T
Other languages
English (en)
Inventor
Avi Tepman
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Application granted granted Critical
Publication of ATE180923T1 publication Critical patent/ATE180923T1/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3411—Constructional aspects of the reactor
    • H01J37/3447—Collimators, shutters, apertures
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/32—Processing objects by plasma generation
    • H01J2237/33—Processing objects by plasma generation characterised by the type of processing
    • H01J2237/332—Coating
    • H01J2237/3322—Problems associated with coating
    • H01J2237/3327—Coating high aspect ratio workpieces

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Electrodes Of Semiconductors (AREA)
AT95309064T 1994-12-16 1995-12-13 Gerät und verfahren zum aufbringen durch zerstäubung eines filmes auf einen substrat ATE180923T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/357,001 US5527438A (en) 1994-12-16 1994-12-16 Cylindrical sputtering shield

Publications (1)

Publication Number Publication Date
ATE180923T1 true ATE180923T1 (de) 1999-06-15

Family

ID=23403886

Family Applications (1)

Application Number Title Priority Date Filing Date
AT95309064T ATE180923T1 (de) 1994-12-16 1995-12-13 Gerät und verfahren zum aufbringen durch zerstäubung eines filmes auf einen substrat

Country Status (6)

Country Link
US (1) US5527438A (de)
EP (1) EP0717432B1 (de)
JP (1) JPH08264451A (de)
KR (1) KR100371994B1 (de)
AT (1) ATE180923T1 (de)
DE (1) DE69510018T2 (de)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0837491A3 (de) * 1996-10-21 2000-11-15 Nihon Shinku Gijutsu Kabushiki Kaisha Vorrichtung zusammengesetzter Zerstäubungskathode und Zerstäubungsgerät mit solcher zusammengesetzten Kathode
SG54602A1 (en) * 1996-11-26 1998-11-16 Applied Materials Inc Coated deposition chamber equipment
WO1998031845A1 (en) 1997-01-16 1998-07-23 Bottomfield, Layne, F. Vapor deposition components and corresponding methods
US6139698A (en) 1997-02-03 2000-10-31 Applied Materials, Inc. Method and apparatus for reducing the first wafer effect
US6592728B1 (en) * 1998-08-04 2003-07-15 Veeco-Cvc, Inc. Dual collimated deposition apparatus and method of use
US7294242B1 (en) * 1998-08-24 2007-11-13 Applied Materials, Inc. Collimated and long throw magnetron sputtering of nickel/iron films for magnetic recording head applications
US10047430B2 (en) * 1999-10-08 2018-08-14 Applied Materials, Inc. Self-ionized and inductively-coupled plasma for sputtering and resputtering
US8696875B2 (en) * 1999-10-08 2014-04-15 Applied Materials, Inc. Self-ionized and inductively-coupled plasma for sputtering and resputtering
US6428663B1 (en) 2000-07-03 2002-08-06 Applied Materials, Inc. Preventing defect generation from targets through applying metal spray coatings on sidewalls
US9051641B2 (en) 2001-07-25 2015-06-09 Applied Materials, Inc. Cobalt deposition on barrier surfaces
US20030029715A1 (en) 2001-07-25 2003-02-13 Applied Materials, Inc. An Apparatus For Annealing Substrates In Physical Vapor Deposition Systems
JP2005504885A (ja) 2001-07-25 2005-02-17 アプライド　マテリアルズ　インコーポレイテッド 新規なスパッタ堆積方法を使用したバリア形成
US8110489B2 (en) 2001-07-25 2012-02-07 Applied Materials, Inc. Process for forming cobalt-containing materials
US20090004850A1 (en) 2001-07-25 2009-01-01 Seshadri Ganguli Process for forming cobalt and cobalt silicide materials in tungsten contact applications
US6743340B2 (en) * 2002-02-05 2004-06-01 Applied Materials, Inc. Sputtering of aligned magnetic materials and magnetic dipole ring used therefor
PT1350863E (pt) * 2002-03-19 2006-12-29 Scheuten Glasgroep Bv Dispositivo e processo para a aplicação orientada de um material a depositar num substrato
US7504006B2 (en) * 2002-08-01 2009-03-17 Applied Materials, Inc. Self-ionized and capacitively-coupled plasma for sputtering and resputtering
US8273222B2 (en) * 2006-05-16 2012-09-25 Southwest Research Institute Apparatus and method for RF plasma enhanced magnetron sputter deposition
US8277617B2 (en) * 2007-08-14 2012-10-02 Southwest Research Institute Conformal magnetron sputter deposition
US9567666B2 (en) 2009-01-12 2017-02-14 Guardian Industries Corp Apparatus and method for making sputtered films with reduced stress asymmetry
US8747631B2 (en) * 2010-03-15 2014-06-10 Southwest Research Institute Apparatus and method utilizing a double glow discharge plasma for sputter cleaning
JP6948126B2 (ja) * 2016-12-26 2021-10-13 キヤノントッキ株式会社 スパッタ装置及び電極膜の製造方法
US20220406583A1 (en) * 2021-06-18 2022-12-22 Taiwan Semiconductor Manufacturing Co., Ltd. Deposition system and method
US11851751B2 (en) 2021-07-23 2023-12-26 Taiwan Semiconductor Manufacturing Co., Ltd. Deposition system and method

Family Cites Families (24)

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Publication number Priority date Publication date Assignee Title
US3410774A (en) * 1965-10-23 1968-11-12 Ibm Method and apparatus for reverse sputtering selected electrically exposed areas of a cathodically biased workpiece
US3640812A (en) * 1970-09-02 1972-02-08 Rca Corp Method of making electrical contacts on the surface of a semiconductor device
JPS601397B2 (ja) * 1981-01-16 1985-01-14 三菱電機株式会社 スパツタリング装置
JPS5867016A (ja) * 1981-10-19 1983-04-21 Nippon Telegr & Teleph Corp <Ntt> 薄膜の製造方法
US4521286A (en) * 1983-03-09 1985-06-04 Unisearch Limited Hollow cathode sputter etcher
US4508612A (en) * 1984-03-07 1985-04-02 International Business Machines Corporation Shield for improved magnetron sputter deposition into surface recesses
US4523971A (en) * 1984-06-28 1985-06-18 International Business Machines Corporation Programmable ion beam patterning system
JPS61117276A (ja) * 1984-11-14 1986-06-04 Hitachi Ltd スパツタリング用タ−ゲツト
JPH0660390B2 (ja) * 1984-11-14 1994-08-10 株式会社日立製作所 プレーナマグネトロン方式の微小孔を有する成膜対象基板への成膜方法およびその装置
KR900001825B1 (ko) * 1984-11-14 1990-03-24 가부시끼가이샤 히다찌세이사꾸쇼 성막 지향성을 고려한 스퍼터링장치
JPH0348204Y2 (de) * 1985-03-20 1991-10-15
US4588490A (en) * 1985-05-22 1986-05-13 International Business Machines Corporation Hollow cathode enhanced magnetron sputter device
JP2515731B2 (ja) * 1985-10-25 1996-07-10 株式会社日立製作所 薄膜形成装置および薄膜形成方法
JPH0647722B2 (ja) * 1986-09-24 1994-06-22 富士電機株式会社 磁気記録媒体の製造方法
JPS63255368A (ja) * 1987-04-13 1988-10-21 Hitachi Ltd 成膜装置
JPS63307256A (ja) * 1987-06-04 1988-12-14 Seiko Epson Corp 合金薄膜の製造方法
US4824544A (en) * 1987-10-29 1989-04-25 International Business Machines Corporation Large area cathode lift-off sputter deposition device
JPH01208460A (ja) * 1988-02-16 1989-08-22 Mitsubishi Electric Corp スパッタ装置
US4988424A (en) * 1989-06-07 1991-01-29 Ppg Industries, Inc. Mask and method for making gradient sputtered coatings
JPH04371578A (ja) * 1991-06-19 1992-12-24 Sony Corp マグネトロンスパッタリング装置
US5223108A (en) * 1991-12-30 1993-06-29 Materials Research Corporation Extended lifetime collimator
JPH0660390A (ja) * 1992-08-10 1994-03-04 Toshiba Corp 光学ヘッド装置
JP3231900B2 (ja) * 1992-10-28 2001-11-26 株式会社アルバック 成膜装置
US5516403A (en) * 1994-12-16 1996-05-14 Applied Materials Reversing orientation of sputtering screen to avoid contamination

Also Published As

Publication number Publication date
EP0717432A1 (de) 1996-06-19
DE69510018T2 (de) 1999-11-11
DE69510018D1 (de) 1999-07-08
KR100371994B1 (ko) 2003-04-10
KR960026266A (ko) 1996-07-22
EP0717432B1 (de) 1999-06-02
JPH08264451A (ja) 1996-10-11
US5527438A (en) 1996-06-18

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