ATE181427T1 - Röntgenstrahlmaske, verfahren zu derer herstellung und belichtungsverfahren - Google Patents

Röntgenstrahlmaske, verfahren zu derer herstellung und belichtungsverfahren

Info

Publication number
ATE181427T1
ATE181427T1 AT92116781T AT92116781T ATE181427T1 AT E181427 T1 ATE181427 T1 AT E181427T1 AT 92116781 T AT92116781 T AT 92116781T AT 92116781 T AT92116781 T AT 92116781T AT E181427 T1 ATE181427 T1 AT E181427T1
Authority
AT
Austria
Prior art keywords
ray
production
ray mask
permeable film
absorber
Prior art date
Application number
AT92116781T
Other languages
English (en)
Inventor
Tsutomu Ikeda
Original Assignee
Canon Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Kk filed Critical Canon Kk
Application granted granted Critical
Publication of ATE181427T1 publication Critical patent/ATE181427T1/de

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/22—Masks or mask blanks for imaging by radiation of 100nm or shorter wavelength, e.g. X-ray masks, extreme ultraviolet [EUV] masks; Preparation thereof

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Drying Of Semiconductors (AREA)
  • Formation Of Insulating Films (AREA)
  • Electroplating And Plating Baths Therefor (AREA)
AT92116781T 1991-10-04 1992-09-30 Röntgenstrahlmaske, verfahren zu derer herstellung und belichtungsverfahren ATE181427T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP28409491A JP3073067B2 (ja) 1991-10-04 1991-10-04 Ｘ線露光用マスク及びその製造方法

Publications (1)

Publication Number Publication Date
ATE181427T1 true ATE181427T1 (de) 1999-07-15

Family

ID=17674143

Family Applications (1)

Application Number Title Priority Date Filing Date
AT92116781T ATE181427T1 (de) 1991-10-04 1992-09-30 Röntgenstrahlmaske, verfahren zu derer herstellung und belichtungsverfahren

Country Status (6)

Country Link
US (1) US5247557A (de)
EP (1) EP0536635B1 (de)
JP (1) JP3073067B2 (de)
AT (1) ATE181427T1 (de)
CA (1) CA2079725C (de)
DE (1) DE69229430T2 (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5422921A (en) * 1991-11-15 1995-06-06 Canon Kabushiki Kaisha X-ray mask structure and manufacturing methods including forming a metal oxide film on a portion of an X-ray permeable film having no X-ray absorber thereon
JPH07117605B2 (ja) * 1992-03-13 1995-12-18 日本ピラー工業株式会社 回折格子
US5318687A (en) * 1992-08-07 1994-06-07 International Business Machines Corporation Low stress electrodeposition of gold for X-ray mask fabrication
ZA94614B (en) * 1993-02-11 1994-08-12 Sasol Chem Ind Pty Solvent extraction
JP3586031B2 (ja) * 1996-03-27 2004-11-10 株式会社東芝 サセプタおよび熱処理装置および熱処理方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5760839A (en) * 1980-09-30 1982-04-13 Nec Corp Manufacture of x-ray exposure mask
JPH0715880B2 (ja) * 1989-12-26 1995-02-22 信越化学工業株式会社 Ｘ線リソグラフィー用ＳｉＣ膜、その製造方法およびＸ線リソグラフィー用マスク
US5124561A (en) * 1991-04-04 1992-06-23 International Business Machines Corporation Process for X-ray mask warpage reduction

Also Published As

Publication number Publication date
EP0536635A1 (de) 1993-04-14
JPH05102012A (ja) 1993-04-23
JP3073067B2 (ja) 2000-08-07
CA2079725A1 (en) 1993-04-05
EP0536635B1 (de) 1999-06-16
DE69229430D1 (de) 1999-07-22
DE69229430T2 (de) 1999-12-23
US5247557A (en) 1993-09-21
CA2079725C (en) 1998-02-03

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Legal Events

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