ATE182031T1 - Ionenpumpe und vakuumpumpanlage dafür - Google Patents

Ionenpumpe und vakuumpumpanlage dafür

Info

Publication number
ATE182031T1
ATE182031T1 AT92102346T AT92102346T ATE182031T1 AT E182031 T1 ATE182031 T1 AT E182031T1 AT 92102346 T AT92102346 T AT 92102346T AT 92102346 T AT92102346 T AT 92102346T AT E182031 T1 ATE182031 T1 AT E182031T1
Authority
AT
Austria
Prior art keywords
vacuum
pump
vacuum pump
ion
high vacuum
Prior art date
Application number
AT92102346T
Other languages
English (en)
Inventor
Kazutoshi Nagai
Tohru Satake
Hideaki Hayashi
Takanari Yasui
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp filed Critical Ebara Corp
Application granted granted Critical
Publication of ATE182031T1 publication Critical patent/ATE182031T1/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/14—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of thermionic cathodes

Landscapes

  • Electron Tubes For Measurement (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
AT92102346T 1991-02-12 1992-02-12 Ionenpumpe und vakuumpumpanlage dafür ATE182031T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP3884791 1991-02-12
JP3884891 1991-02-12

Publications (1)

Publication Number Publication Date
ATE182031T1 true ATE182031T1 (de) 1999-07-15

Family

ID=26378132

Family Applications (1)

Application Number Title Priority Date Filing Date
AT92102346T ATE182031T1 (de) 1991-02-12 1992-02-12 Ionenpumpe und vakuumpumpanlage dafür

Country Status (4)

Country Link
EP (1) EP0499239B1 (de)
JP (1) JPH05174780A (de)
AT (1) ATE182031T1 (de)
DE (1) DE69229511T2 (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4820996B2 (ja) * 2005-05-30 2011-11-24 大学共同利用機関法人自然科学研究機構 希ガスの固定化装置及び固定化方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2578009A (en) * 1947-12-23 1951-12-11 Rca Corp Electronic high vacuum apparatus
FR968943A (fr) * 1948-07-02 1950-12-08 Csf Perfectionnements aux dispositifs de pompage à vide élevé
GB684710A (en) * 1950-07-19 1952-12-24 Ass Elect Ind Improvements relating to high vacuum pumps
GB762365A (en) * 1953-07-10 1956-11-28 Edwards And Co London Ltd W Improvements in and relating to ionic vacuum pumping apparatus
AT288066B (de) * 1968-03-27 1971-02-25 Erich Ing Jakopic Ein- oder mehrstufige komprimierende Ionenpumpe
JPH0675386B2 (ja) * 1990-08-03 1994-09-21 株式会社荏原製作所 高真空装置及び該高真空装置を用いた真空ポンプ装置

Also Published As

Publication number Publication date
DE69229511D1 (de) 1999-08-12
EP0499239A2 (de) 1992-08-19
EP0499239B1 (de) 1999-07-07
JPH05174780A (ja) 1993-07-13
EP0499239A3 (en) 1993-03-03
DE69229511T2 (de) 2000-02-03

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Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties