ATE183020T1 - Verfahren zur herstellung integrierter schaltungsbauelemente - Google Patents

Verfahren zur herstellung integrierter schaltungsbauelemente

Info

Publication number
ATE183020T1
ATE183020T1 AT95906334T AT95906334T ATE183020T1 AT E183020 T1 ATE183020 T1 AT E183020T1 AT 95906334 T AT95906334 T AT 95906334T AT 95906334 T AT95906334 T AT 95906334T AT E183020 T1 ATE183020 T1 AT E183020T1
Authority
AT
Austria
Prior art keywords
integrated circuit
wafer
pct
circuit devices
integrated circuits
Prior art date
Application number
AT95906334T
Other languages
English (en)
Inventor
Pierre Badehi
Original Assignee
Shellcase Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shellcase Ltd filed Critical Shellcase Ltd
Application granted granted Critical
Publication of ATE183020T1 publication Critical patent/ATE183020T1/de

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00—Encapsulations, e.g. protective coatings
    • H10W74/01—Manufacture or treatment
    • H10W74/019—Manufacture or treatment using temporary auxiliary substrates
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P54/00—Cutting or separating of wafers, substrates or parts of devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
    • H10P72/74—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using temporarily an auxiliary support
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/01—Manufacture or treatment
    • H10W72/0198—Manufacture or treatment batch processes

Landscapes

  • Dicing (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Bipolar Transistors (AREA)
  • Design And Manufacture Of Integrated Circuits (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Stabilization Of Oscillater, Synchronisation, Frequency Synthesizers (AREA)
  • Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
  • Transmitters (AREA)
AT95906334T 1994-01-17 1995-01-10 Verfahren zur herstellung integrierter schaltungsbauelemente ATE183020T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IL10835994A IL108359A (en) 1994-01-17 1994-01-17 Method and apparatus for producing integrated circuit devices

Publications (1)

Publication Number Publication Date
ATE183020T1 true ATE183020T1 (de) 1999-08-15

Family

ID=11065715

Family Applications (1)

Application Number Title Priority Date Filing Date
AT95906334T ATE183020T1 (de) 1994-01-17 1995-01-10 Verfahren zur herstellung integrierter schaltungsbauelemente

Country Status (13)

Country Link
US (1) US6040235A (de)
EP (1) EP0740852B1 (de)
JP (1) JPH09511097A (de)
AT (1) ATE183020T1 (de)
AU (1) AU1456495A (de)
CA (1) CA2181339A1 (de)
DE (1) DE69511241T2 (de)
IL (1) IL108359A (de)
MX (1) MX9602801A (de)
MY (1) MY130185A (de)
SG (1) SG50376A1 (de)
TW (1) TW360957B (de)
WO (1) WO1995019645A1 (de)

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Also Published As

Publication number Publication date
EP0740852B1 (de) 1999-08-04
EP0740852A1 (de) 1996-11-06
DE69511241D1 (de) 1999-09-09
CA2181339A1 (en) 1995-07-20
WO1995019645A1 (en) 1995-07-20
JPH09511097A (ja) 1997-11-04
IL108359A (en) 2001-04-30
US6040235A (en) 2000-03-21
AU1456495A (en) 1995-08-01
TW360957B (en) 1999-06-11
MY130185A (en) 2007-06-29
MX9602801A (es) 1997-12-31
IL108359A0 (en) 1994-04-12
DE69511241T2 (de) 2000-04-20
SG50376A1 (en) 1998-07-20

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