ATE185021T1 - Mikrofocus-röntgeneinrichtung - Google Patents

Mikrofocus-röntgeneinrichtung

Info

Publication number
ATE185021T1
ATE185021T1 AT96907493T AT96907493T ATE185021T1 AT E185021 T1 ATE185021 T1 AT E185021T1 AT 96907493 T AT96907493 T AT 96907493T AT 96907493 T AT96907493 T AT 96907493T AT E185021 T1 ATE185021 T1 AT E185021T1
Authority
AT
Austria
Prior art keywords
pct
retarding
electron beam
layer
impinges
Prior art date
Application number
AT96907493T
Other languages
English (en)
Inventor
Alfred Reinhold
Original Assignee
Medixtec Gmbh Medizinische Ger
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Medixtec Gmbh Medizinische Ger filed Critical Medixtec Gmbh Medizinische Ger
Application granted granted Critical
Publication of ATE185021T1 publication Critical patent/ATE185021T1/de

Links

Classifications

    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—HANDLING OF PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K7/00—Gamma- or X-ray microscopes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/08—Anodes; Anti cathodes
    • H01J35/112—Non-rotating anodes
    • H01J35/116—Transmissive anodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/24—Tubes wherein the point of impact of the cathode ray on the anode or anticathode is movable relative to the surface thereof

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • High Energy & Nuclear Physics (AREA)
  • X-Ray Techniques (AREA)
  • Radiation-Therapy Devices (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
AT96907493T 1995-03-20 1996-03-16 Mikrofocus-röntgeneinrichtung ATE185021T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19509516A DE19509516C1 (de) 1995-03-20 1995-03-20 Mikrofokus-Röntgeneinrichtung

Publications (1)

Publication Number Publication Date
ATE185021T1 true ATE185021T1 (de) 1999-10-15

Family

ID=7756825

Family Applications (1)

Application Number Title Priority Date Filing Date
AT96907493T ATE185021T1 (de) 1995-03-20 1996-03-16 Mikrofocus-röntgeneinrichtung

Country Status (6)

Country Link
US (1) US5857008A (de)
EP (1) EP0815582B1 (de)
JP (1) JP3150703B2 (de)
AT (1) ATE185021T1 (de)
DE (2) DE19509516C1 (de)
WO (1) WO1996029723A1 (de)

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DE10352334B4 (de) * 2003-11-06 2010-07-29 Comet Gmbh Verfahren zur Regelung einer Mikrofokus-Röntgeneinrichtung
JP2005276760A (ja) * 2004-03-26 2005-10-06 Shimadzu Corp Ｘ線発生装置
US7139365B1 (en) 2004-12-28 2006-11-21 Kla-Tencor Technologies Corporation X-ray reflectivity system with variable spot
DE102005053386A1 (de) * 2005-11-07 2007-05-16 Comet Gmbh Nanofocus-Röntgenröhre
DE202005017496U1 (de) * 2005-11-07 2007-03-15 Comet Gmbh Target für eine Mikrofocus- oder Nanofocus-Röntgenröhre
DE102006062452B4 (de) * 2006-12-28 2008-11-06 Comet Gmbh Röntgenröhre und Verfahren zur Prüfung eines Targets einer Röntgenröhre
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JP5687001B2 (ja) * 2009-08-31 2015-03-18 浜松ホトニクス株式会社 Ｘ線発生装置
US9271689B2 (en) * 2010-01-20 2016-03-01 General Electric Company Apparatus for wide coverage computed tomography and method of constructing same
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JP5763032B2 (ja) * 2012-10-02 2015-08-12 双葉電子工業株式会社 Ｘ線管
US10295485B2 (en) 2013-12-05 2019-05-21 Sigray, Inc. X-ray transmission spectrometer system
US9570265B1 (en) 2013-12-05 2017-02-14 Sigray, Inc. X-ray fluorescence system with high flux and high flux density
US9448190B2 (en) 2014-06-06 2016-09-20 Sigray, Inc. High brightness X-ray absorption spectroscopy system
US10269528B2 (en) 2013-09-19 2019-04-23 Sigray, Inc. Diverging X-ray sources using linear accumulation
US10297359B2 (en) 2013-09-19 2019-05-21 Sigray, Inc. X-ray illumination system with multiple target microstructures
US9449781B2 (en) 2013-12-05 2016-09-20 Sigray, Inc. X-ray illuminators with high flux and high flux density
US10304580B2 (en) 2013-10-31 2019-05-28 Sigray, Inc. Talbot X-ray microscope
USRE48612E1 (en) 2013-10-31 2021-06-29 Sigray, Inc. X-ray interferometric imaging system
US9594036B2 (en) 2014-02-28 2017-03-14 Sigray, Inc. X-ray surface analysis and measurement apparatus
US9823203B2 (en) 2014-02-28 2017-11-21 Sigray, Inc. X-ray surface analysis and measurement apparatus
KR102120400B1 (ko) * 2014-03-26 2020-06-09 한국전자통신연구원 타깃 유닛 및 그를 구비하는 엑스 선 튜브
US10401309B2 (en) 2014-05-15 2019-09-03 Sigray, Inc. X-ray techniques using structured illumination
TWI629474B (zh) 2014-05-23 2018-07-11 財團法人工業技術研究院 Ｘ光光源以及ｘ光成像的方法
US9748070B1 (en) 2014-09-17 2017-08-29 Bruker Jv Israel Ltd. X-ray tube anode
US10352880B2 (en) 2015-04-29 2019-07-16 Sigray, Inc. Method and apparatus for x-ray microscopy
US10295486B2 (en) 2015-08-18 2019-05-21 Sigray, Inc. Detector for X-rays with high spatial and high spectral resolution
US11282668B2 (en) * 2016-03-31 2022-03-22 Nano-X Imaging Ltd. X-ray tube and a controller thereof
US10247683B2 (en) 2016-12-03 2019-04-02 Sigray, Inc. Material measurement techniques using multiple X-ray micro-beams
WO2018175570A1 (en) 2017-03-22 2018-09-27 Sigray, Inc. Method of performing x-ray spectroscopy and x-ray absorption spectrometer system
US10578566B2 (en) 2018-04-03 2020-03-03 Sigray, Inc. X-ray emission spectrometer system
US10845491B2 (en) 2018-06-04 2020-11-24 Sigray, Inc. Energy-resolving x-ray detection system
GB2591630B (en) 2018-07-26 2023-05-24 Sigray Inc High brightness x-ray reflection source
US10656105B2 (en) 2018-08-06 2020-05-19 Sigray, Inc. Talbot-lau x-ray source and interferometric system
US10962491B2 (en) 2018-09-04 2021-03-30 Sigray, Inc. System and method for x-ray fluorescence with filtering
DE112019004478T5 (de) 2018-09-07 2021-07-08 Sigray, Inc. System und verfahren zur röntgenanalyse mit wählbarer tiefe
KR102278305B1 (ko) * 2018-10-22 2021-07-19 캐논 아네르바 가부시키가이샤 X선 발생 장치 및 x선 촬영 시스템
JP7270637B2 (ja) * 2018-10-25 2023-05-10 株式会社堀場製作所 Ｘ線分析装置及びｘ線発生ユニット
US11302508B2 (en) 2018-11-08 2022-04-12 Bruker Technologies Ltd. X-ray tube
US11152183B2 (en) 2019-07-15 2021-10-19 Sigray, Inc. X-ray source with rotating anode at atmospheric pressure
CN118541772A (zh) 2022-01-13 2024-08-23 斯格瑞公司 用于生成高通量低能量x射线的微焦x射线源
US12360067B2 (en) 2022-03-02 2025-07-15 Sigray, Inc. X-ray fluorescence system and x-ray source with electrically insulative target material
JP7337312B1 (ja) 2022-03-31 2023-09-01 キヤノンアネルバ株式会社 Ｘ線発生装置、ｘ線撮像装置、および、ｘ線発生装置の調整方法
US12181423B1 (en) 2023-09-07 2024-12-31 Sigray, Inc. Secondary image removal using high resolution x-ray transmission sources

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Also Published As

Publication number Publication date
EP0815582A1 (de) 1998-01-07
JP3150703B2 (ja) 2001-03-26
DE19509516C1 (de) 1996-09-26
JPH10503618A (ja) 1998-03-31
US5857008A (en) 1999-01-05
EP0815582B1 (de) 1999-09-22
DE59603163D1 (de) 1999-10-28
WO1996029723A1 (de) 1996-09-26

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