ATE207134T1 - Verfahren und vorrichtung für die beschichtung von hohlen behältern mit inerter oder undurchlässiger innenfläche hergestellt durch plasmaunterstützte beschichtung mit einer hauptsächlich anorganischen substanz - Google Patents

Verfahren und vorrichtung für die beschichtung von hohlen behältern mit inerter oder undurchlässiger innenfläche hergestellt durch plasmaunterstützte beschichtung mit einer hauptsächlich anorganischen substanz

Info

Publication number
ATE207134T1
ATE207134T1 AT95910216T AT95910216T ATE207134T1 AT E207134 T1 ATE207134 T1 AT E207134T1 AT 95910216 T AT95910216 T AT 95910216T AT 95910216 T AT95910216 T AT 95910216T AT E207134 T1 ATE207134 T1 AT E207134T1
Authority
AT
Austria
Prior art keywords
coating
container
plasma
inert
interior surface
Prior art date
Application number
AT95910216T
Other languages
English (en)
Inventor
George Plester
Horst Ehrich
Original Assignee
Coca Cola Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Coca Cola Co filed Critical Coca Cola Co
Application granted granted Critical
Publication of ATE207134T1 publication Critical patent/ATE207134T1/de

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021Reactive sputtering or evaporation
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04Coating on selected surface areas, e.g. using masks
    • C23C14/046Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24Vacuum evaporation
    • C23C14/32Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Chemical Vapour Deposition (AREA)
  • Physical Vapour Deposition (AREA)
  • Details Of Rigid Or Semi-Rigid Containers (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Containers Having Bodies Formed In One Piece (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
AT95910216T 1994-02-09 1995-02-09 Verfahren und vorrichtung für die beschichtung von hohlen behältern mit inerter oder undurchlässiger innenfläche hergestellt durch plasmaunterstützte beschichtung mit einer hauptsächlich anorganischen substanz ATE207134T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/194,225 US5565248A (en) 1994-02-09 1994-02-09 Method and apparatus for coating hollow containers through plasma-assisted deposition of an inorganic substance
PCT/US1995/001647 WO1995021948A1 (en) 1994-02-09 1995-02-09 Hollow containers with inert or impermeable inner surface through plasma-assisted deposition of a primarily inorganic substance

Publications (1)

Publication Number Publication Date
ATE207134T1 true ATE207134T1 (de) 2001-11-15

Family

ID=22716787

Family Applications (1)

Application Number Title Priority Date Filing Date
AT95910216T ATE207134T1 (de) 1994-02-09 1995-02-09 Verfahren und vorrichtung für die beschichtung von hohlen behältern mit inerter oder undurchlässiger innenfläche hergestellt durch plasmaunterstützte beschichtung mit einer hauptsächlich anorganischen substanz

Country Status (13)

Country Link
US (1) US5565248A (de)
EP (1) EP0693137B1 (de)
JP (1) JP3334054B2 (de)
AT (1) ATE207134T1 (de)
BR (1) BR9505647A (de)
CO (1) CO4370033A1 (de)
DE (1) DE69523226T2 (de)
ES (1) ES2161868T3 (de)
MX (1) MX9504278A (de)
NO (1) NO954008L (de)
PE (1) PE31695A1 (de)
WO (1) WO1995021948A1 (de)
ZA (1) ZA951047B (de)

Families Citing this family (85)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ES2131810T5 (es) * 1994-02-16 2004-02-16 The Coca-Cola Company Recipientes huecos con superficies interiores inertes o impermeables producidas por reaccion superficial asistida por plasma o polimerizacion sobre la superficie.
JP2788412B2 (ja) * 1994-08-11 1998-08-20 麒麟麦酒株式会社 炭素膜コーティングプラスチック容器の製造装置および製造方法
DE4437050A1 (de) * 1994-10-17 1996-04-18 Leybold Ag Vorrichtung zum Behandeln von Oberflächen von Hohlkörpern, insbesondere von Innenflächen von Kraftstofftanks
US5702770A (en) * 1996-01-30 1997-12-30 Becton, Dickinson And Company Method for plasma processing
US6112695A (en) * 1996-10-08 2000-09-05 Nano Scale Surface Systems, Inc. Apparatus for plasma deposition of a thin film onto the interior surface of a container
US6223683B1 (en) 1997-03-14 2001-05-01 The Coca-Cola Company Hollow plastic containers with an external very thin coating of low permeability to gases and vapors through plasma-assisted deposition of inorganic substances and method and system for making the coating
DE19722205A1 (de) 1997-05-27 1998-12-03 Leybold Systems Gmbh Verfahren und Vorrichtung zur Beschichtung von Kunststoff- oder Glasbehältern mittels eines PCVD-Beschichtungsverfahrens
US6251233B1 (en) 1998-08-03 2001-06-26 The Coca-Cola Company Plasma-enhanced vacuum vapor deposition system including systems for evaporation of a solid, producing an electric arc discharge and measuring ionization and evaporation
US6113885A (en) * 1998-12-18 2000-09-05 Colgate Palmolive Company Polyolefin packaged dentifrice having reduced flavor loss
FR2792854B1 (fr) * 1999-04-29 2001-08-03 Sidel Sa Dispositif pour le depot par plasma micro-ondes d'un revetement sur un recipient en materiau thermoplastique
US6475579B1 (en) * 1999-08-06 2002-11-05 Plastipak Packaging, Inc. Multi-layer plastic container having a carbon-treated internal surface and method for making the same
CA2341861C (en) * 1999-08-06 2006-09-19 Plastipak Packaging, Inc. Plastic container having a carbon-treated internal surface
GB9920758D0 (en) * 1999-09-03 1999-11-03 Nycomed Amersham Plc Improved container composition for diagnostic agents
GB9920772D0 (en) * 1999-09-03 1999-11-03 Nycomed Amersham Plc Improved container composition for radiopharmaceutical agents
US20010030876A1 (en) 1999-12-03 2001-10-18 Ing-Feng Hu Self-cleaning automotive head lamp
FR2801814B1 (fr) * 1999-12-06 2002-04-19 Cebal Procede de depot d'un revetement sur la surface interne des boitiers distributeurs aerosols
AU2403001A (en) * 1999-12-27 2001-07-09 Mitsubishi Shoji Plastics Corporation Pet container for foods and drinks containing recycled resin and having dlc coating film formed on surface thereof
JP2001240115A (ja) * 2000-02-24 2001-09-04 Mitsubishi Shoji Plast Kk 乾燥固体食品用プラスチック容器
DE10010642B4 (de) * 2000-03-03 2007-07-26 Tetra Laval Holdings & Finance S.A. Maschine zum Beschichten von Hohlkörpern
US6833031B2 (en) 2000-03-21 2004-12-21 Wavezero, Inc. Method and device for coating a substrate
US6720052B1 (en) * 2000-08-24 2004-04-13 The Coca-Cola Company Multilayer polymeric/inorganic oxide structure with top coat for enhanced gas or vapor barrier and method for making same
US6740378B1 (en) 2000-08-24 2004-05-25 The Coca-Cola Company Multilayer polymeric/zero valent material structure for enhanced gas or vapor barrier and uv barrier and method for making same
FR2814382B1 (fr) * 2000-09-28 2003-05-09 Cebal Procede de depot d'un revetement interne dans un recipient en matiere plastique
US6461699B1 (en) 2000-10-06 2002-10-08 Plastipak Packaging, Inc. Plastic container having a carbon-treated internal surface for non-carbonated food products
EP1357042A4 (de) * 2000-12-25 2008-06-25 Mitsubishi Shoji Plastics Corp Herstellungsvorrichtung für mit dlc-film beschichteten kunststoffbehälter und herstellungsverfahren dafür
AU2002315263A1 (en) 2001-03-23 2002-10-15 Alcove Surfaces Gmbh Aluminium implant and use thereof
US6599584B2 (en) * 2001-04-27 2003-07-29 The Coca-Cola Company Barrier coated plastic containers and coating methods therefor
JP4804654B2 (ja) * 2001-06-27 2011-11-02 株式会社ユーテック 容器内面成膜用cvd装置及び容器内面成膜方法
US20030044553A1 (en) 2001-08-23 2003-03-06 Ravi Ramanathan Fuel tanks
US6758910B2 (en) * 2001-11-13 2004-07-06 Thomas E. Schmoyer Apparatus and method for sulfonating an article and articles made therefrom
DE10206822B4 (de) * 2002-02-18 2009-02-26 Khs Ag Vorrichtung zum Beschichten von Flaschen oder sonstigen Hohlkörpern
DE10231345A1 (de) 2002-03-18 2003-10-16 Tetra Laval Holdings & Finance Vorrichtung zur Herstellung von Kunstoffbehältern mittels Streckblasformen und Vorrichtung zum Beschichten der Innenwände eines Kunstoffbehälters
WO2003089502A1 (en) * 2002-04-15 2003-10-30 The Coca-Cola Company Coating composition containing an epoxide additive and structures coated therewith
DE10225609A1 (de) * 2002-06-07 2003-12-24 Sig Technology Ltd Verfahren und Vorrichtung zur Plasmabehandlung von Werkstücken
DE10314067A1 (de) * 2003-03-28 2004-10-14 Schott Glas Beschichtungsvorrichtung mit Transporteinrichtung
DE10224547B4 (de) * 2002-05-24 2020-06-25 Khs Corpoplast Gmbh Verfahren und Vorrichtung zur Plasmabehandlung von Werkstücken
DE50303336D1 (de) * 2002-05-24 2006-06-22 Schott Ag Vorrichtung für CVD-Behandlungen
CN100412230C (zh) * 2002-05-24 2008-08-20 肖特股份公司 用于等离子涂层的多位涂层装置和方法
JP4149748B2 (ja) * 2002-06-24 2008-09-17 三菱商事プラスチック株式会社 ロータリー型量産用cvd成膜装置及びプラスチック容器内表面へのcvd膜成膜方法
DE10243022A1 (de) * 2002-09-17 2004-03-25 Degussa Ag Abscheidung eines Feststoffs durch thermische Zersetzung einer gasförmigen Substanz in einem Becherreaktor
EP1572786A2 (de) * 2002-11-12 2005-09-14 Dow Global Technologies Inc. Verfahren und apparat zur plasmabeschichtung eines behälters
CN100347229C (zh) * 2002-11-12 2007-11-07 陶氏环球技术公司 在容器中沉积等离子体涂层的方法和设备
US20060172085A1 (en) * 2003-03-12 2006-08-03 Toyo Seikan Kaisha, Ltd Method and apparatus for chemical plasma processing of plastic container
DE10354625A1 (de) * 2003-11-22 2005-06-30 Sig Technology Ltd. Verfahren zur Bestimmung der Gasdurchlässigkeit von Behälterwandungen, Behälter mit Oberflächenbeschichtung sowie Beschichtungseinrichtung mit Messvorrichtung
US7513953B1 (en) * 2003-11-25 2009-04-07 Nano Scale Surface Systems, Inc. Continuous system for depositing films onto plastic bottles and method
US7360552B2 (en) * 2004-04-23 2008-04-22 Dow Global Technologies Inc. Injectable structural adhesive
EP1722006A1 (de) * 2005-05-10 2006-11-15 S.I.C.C. Societa' Per Azioni Verfahren zur korrosionsschutzenden Oberflächebehandlung von Behälter für Flüssigkeiten, dadurch erhaltene Behälter und Vorrichtung zur Ausführung des Verfahrens
DE102005050432A1 (de) * 2005-10-21 2007-05-03 Rap.Id Particle Systems Gmbh Vorrichtung und Verfahren zur Charakterisierung von Gleitmittel und Hydrophobierungsfilmen in pharmazeutischen Behältnissen bezüglich Dicke und Homogenität
FR2907531B1 (fr) * 2006-10-18 2009-02-27 Sidel Participations Dispositif a double etancheite pour une machine de traitement de recipients par plasma
FR2930121B1 (fr) * 2008-04-18 2010-05-21 Shiseido Int France Flacon de parfum
WO2013170052A1 (en) 2012-05-09 2013-11-14 Sio2 Medical Products, Inc. Saccharide protective coating for pharmaceutical package
US7985188B2 (en) 2009-05-13 2011-07-26 Cv Holdings Llc Vessel, coating, inspection and processing apparatus
MX350703B (es) 2009-05-13 2017-09-14 Sio2 Medical Products Inc Metodo de gasificacion para inspeccionar una superficie revestida.
US9458536B2 (en) 2009-07-02 2016-10-04 Sio2 Medical Products, Inc. PECVD coating methods for capped syringes, cartridges and other articles
US11624115B2 (en) 2010-05-12 2023-04-11 Sio2 Medical Products, Inc. Syringe with PECVD lubrication
WO2011151374A1 (en) 2010-06-03 2011-12-08 Cryovac, Inc. Plate and apparatus for forming a plastic material flanged hollow article
US9878101B2 (en) 2010-11-12 2018-01-30 Sio2 Medical Products, Inc. Cyclic olefin polymer vessels and vessel coating methods
US10081864B2 (en) 2011-03-10 2018-09-25 Kaiatech, Inc Method and apparatus for treating containers
US9272095B2 (en) 2011-04-01 2016-03-01 Sio2 Medical Products, Inc. Vessels, contact surfaces, and coating and inspection apparatus and methods
DE102011100635A1 (de) 2011-05-05 2012-11-08 Beiersdorf Ag Behältnisse für kosmetische und dermatologische Produkte
US8986785B2 (en) 2011-06-23 2015-03-24 Surface Activation Technologies Method and apparatus for continuous sulfonization of discrete article
US11116695B2 (en) 2011-11-11 2021-09-14 Sio2 Medical Products, Inc. Blood sample collection tube
EP2776603B1 (de) 2011-11-11 2019-03-06 SiO2 Medical Products, Inc. Passivierungs-, ph-schutz- oder schmierbeschichtung für arzneimittelverpackung, beschichtungsverfahren und vorrichtung
AU2012361615B2 (en) * 2011-12-27 2015-08-06 Kirin Beer Kabushiki Kaisha Apparatus for forming thin film
US20150297800A1 (en) 2012-07-03 2015-10-22 Sio2 Medical Products, Inc. SiOx BARRIER FOR PHARMACEUTICAL PACKAGE AND COATING PROCESS
DE102012217713A1 (de) 2012-09-28 2014-04-03 Beiersdorf Ag Verhinderung von Wechselwirkungen durch SiOx-Beschichtung von Behältnissen
DE102012217694A1 (de) 2012-09-28 2014-06-12 Beiersdorf Ag Verhinderung von Wechselwirkungen durch SiOx-Beschichtung von Behältnissen
DE102012217695A1 (de) 2012-09-28 2014-04-03 Beiersdorf Ag Reduktion von Parfümölzugaben durch SiOx-Beschichtung
CA2890066C (en) 2012-11-01 2021-11-09 Sio2 Medical Products, Inc. Coating inspection method
US9903782B2 (en) 2012-11-16 2018-02-27 Sio2 Medical Products, Inc. Method and apparatus for detecting rapid barrier coating integrity characteristics
US9764093B2 (en) 2012-11-30 2017-09-19 Sio2 Medical Products, Inc. Controlling the uniformity of PECVD deposition
JP6382830B2 (ja) 2012-11-30 2018-08-29 エスアイオーツー・メディカル・プロダクツ・インコーポレイテッド 医療シリンジ、カートリッジ等上でのpecvd堆積の均一性制御
US9662450B2 (en) 2013-03-01 2017-05-30 Sio2 Medical Products, Inc. Plasma or CVD pre-treatment for lubricated pharmaceutical package, coating process and apparatus
EP2971228B1 (de) 2013-03-11 2023-06-21 Si02 Medical Products, Inc. Beschichtete verpackung
US9937099B2 (en) 2013-03-11 2018-04-10 Sio2 Medical Products, Inc. Trilayer coated pharmaceutical packaging with low oxygen transmission rate
US20160017490A1 (en) 2013-03-15 2016-01-21 Sio2 Medical Products, Inc. Coating method
EP2999551B1 (de) 2013-05-20 2017-10-11 Unilever PLC Verfahren zum beschichten von behältern
SG11201605837TA (en) * 2014-03-03 2016-08-30 Picosun Oy Protecting an interior of a gas container with an ald coating
WO2015148471A1 (en) 2014-03-28 2015-10-01 Sio2 Medical Products, Inc. Antistatic coatings for plastic vessels
WO2017002151A1 (ja) * 2015-06-30 2017-01-05 三菱重工食品包装機械株式会社 成膜装置及び成膜方法
EP3337915B1 (de) 2015-08-18 2021-11-03 SiO2 Medical Products, Inc. Pharmazeutische und andere verpackungen mit niedriger sauerstoffübertragungsrate
JP6535384B2 (ja) * 2015-10-01 2019-06-26 三菱重工機械システム株式会社 成膜装置
JP6625656B2 (ja) * 2015-10-19 2019-12-25 三菱重工機械システム株式会社 成膜装置
DE102016114292A1 (de) * 2016-08-02 2018-02-08 Khs Corpoplast Gmbh Verfahren zum Beschichten von Kunststoffbehältern
EP3946767A4 (de) 2019-04-03 2023-01-18 Kaiatech, Inc. Vorrichtung, sondenanordnung und verfahren zur behandlung von behältern

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5594474A (en) * 1979-01-12 1980-07-17 Ishikawajima Harima Heavy Ind Co Ltd Ion plating apparatus for tube inside using laser beam
CA1159012A (en) * 1980-05-02 1983-12-20 Seitaro Matsuo Plasma deposition apparatus
US4737379A (en) * 1982-09-24 1988-04-12 Energy Conversion Devices, Inc. Plasma deposited coatings, and low temperature plasma method of making same
US4585668A (en) * 1983-02-28 1986-04-29 Michigan State University Method for treating a surface with a microwave or UHF plasma and improved apparatus
DE3316693A1 (de) * 1983-05-06 1984-11-08 Leybold-Heraeus GmbH, 5000 Köln Verfahren zum herstellen von amorphen kohlenstoffschichten auf substraten und durch das verfahren beschichtete substrate
US4599135A (en) * 1983-09-30 1986-07-08 Hitachi, Ltd. Thin film deposition
US4478874A (en) * 1983-12-09 1984-10-23 Cosden Technology, Inc. Methods for improving the gas barrier properties of polymeric containers
US4637895A (en) * 1985-04-01 1987-01-20 Energy Conversion Devices, Inc. Gas mixtures for the vapor deposition of semiconductor material
US4752426A (en) * 1985-06-27 1988-06-21 Yoshito Ikada Process for manufacture of plastic resinous tubes
US4667620A (en) * 1985-10-29 1987-05-26 Cosden Technology, Inc. Method and apparatus for making plastic containers having decreased gas permeability
US4715937A (en) * 1986-05-05 1987-12-29 The Board Of Trustees Of The Leland Stanford Junior University Low-temperature direct nitridation of silicon in nitrogen plasma generated by microwave discharge
DE3632748A1 (de) * 1986-09-26 1988-04-07 Ver Foerderung Inst Kunststoff Verfahren zur beschichtung von hohlkoerpern
US4756964A (en) * 1986-09-29 1988-07-12 The Dow Chemical Company Barrier films having an amorphous carbon coating and methods of making
US5041303A (en) * 1988-03-07 1991-08-20 Polyplasma Incorporated Process for modifying large polymeric surfaces
DE3908418C2 (de) * 1989-03-15 1999-06-02 Buck Chem Tech Werke Verfahren zum Innenbeschichten von Kunststoff-Behältern und Vorrichtung zum Beschichten
MX9303141A (es) * 1992-05-28 1994-04-29 Polar Materials Inc Metodos y aparatos para depositar recubrimientos de barrera.

Also Published As

Publication number Publication date
DE69523226T2 (de) 2002-07-04
CO4370033A1 (es) 1996-10-07
ES2161868T3 (es) 2001-12-16
DE69523226D1 (de) 2001-11-22
MX9504278A (es) 1997-04-30
NO954008D0 (no) 1995-10-09
JPH08508964A (ja) 1996-09-24
JP3334054B2 (ja) 2002-10-15
NO954008L (no) 1995-10-09
US5565248A (en) 1996-10-15
ZA951047B (en) 1996-05-02
BR9505647A (pt) 1996-01-16
EP0693137B1 (de) 2001-10-17
PE31695A1 (es) 1995-10-31
EP0693137A1 (de) 1996-01-24
WO1995021948A1 (en) 1995-08-17

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