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Priority claimed from JP16825380Aexternal-prioritypatent/JPS5792441A/en
Priority claimed from JP17097180Aexternal-prioritypatent/JPS5794939A/en
Application filed by Hitachi LtdfiledCriticalHitachi Ltd
Priority claimed from EP81305578Aexternal-prioritypatent/EP0053476B1/en
Application grantedgrantedCritical
Publication of ATE21294T1publicationCriticalpatent/ATE21294T1/en