ATE21530T1 - Verfahren zum aetzen von hoehlen und oeffnungen in substraten. - Google Patents

Verfahren zum aetzen von hoehlen und oeffnungen in substraten.

Info

Publication number
ATE21530T1
ATE21530T1 AT83201569T AT83201569T ATE21530T1 AT E21530 T1 ATE21530 T1 AT E21530T1 AT 83201569 T AT83201569 T AT 83201569T AT 83201569 T AT83201569 T AT 83201569T AT E21530 T1 ATE21530 T1 AT E21530T1
Authority
AT
Austria
Prior art keywords
etching
caves
substrates
openings
apertures
Prior art date
Application number
AT83201569T
Other languages
English (en)
Inventor
Hendrik Klaas Kuiken
Rudolf Paulus Tijburg
Original Assignee
Philips Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Nv filed Critical Philips Nv
Application granted granted Critical
Publication of ATE21530T1 publication Critical patent/ATE21530T1/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C23F1/02—Local etching

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • ing And Chemical Polishing (AREA)
  • Prostheses (AREA)
  • Gas-Filled Discharge Tubes (AREA)
  • Materials For Medical Uses (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Weting (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
AT83201569T 1982-11-08 1983-11-02 Verfahren zum aetzen von hoehlen und oeffnungen in substraten. ATE21530T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
NL8204307A NL8204307A (nl) 1982-11-08 1982-11-08 Werkwijze voor het etsen van holten en openingen in substraten en inrichting voor het uitvoeren van deze werkwijze.
EP83201569A EP0108458B1 (de) 1982-11-08 1983-11-02 Verfahren zum Ätzen von Höhlen und Öffnungen in Substraten

Publications (1)

Publication Number Publication Date
ATE21530T1 true ATE21530T1 (de) 1986-09-15

Family

ID=19840541

Family Applications (1)

Application Number Title Priority Date Filing Date
AT83201569T ATE21530T1 (de) 1982-11-08 1983-11-02 Verfahren zum aetzen von hoehlen und oeffnungen in substraten.

Country Status (8)

Country Link
US (1) US4448635A (de)
EP (1) EP0108458B1 (de)
JP (1) JPS5999724A (de)
AT (1) ATE21530T1 (de)
AU (1) AU557830B2 (de)
CA (1) CA1230285A (de)
DE (1) DE3365471D1 (de)
NL (1) NL8204307A (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4746397A (en) * 1986-01-17 1988-05-24 Matsushita Electric Industrial Co., Ltd. Treatment method for plate-shaped substrate
US4927784A (en) * 1987-05-01 1990-05-22 Raytheon Company Simultaneous formation of via hole and tube structures for GaAs monolithic microwave integrated circuits
US4944986A (en) * 1988-09-23 1990-07-31 Zuel Company Anti-reflective glass surface
US5120605A (en) * 1988-09-23 1992-06-09 Zuel Company, Inc. Anti-reflective glass surface
US5746876A (en) * 1996-06-03 1998-05-05 Taiwan Semiconductor Manufacturing Company, Ltd. Safety sampler for hot acid in semiconductor manufacturing fab
US7857972B2 (en) * 2003-09-05 2010-12-28 Foret Plasma Labs, Llc Apparatus for treating liquids with wave energy from an electrical arc
US7422695B2 (en) * 2003-09-05 2008-09-09 Foret Plasma Labs, Llc Treatment of fluids with wave energy from a carbon arc
US6929861B2 (en) 2002-03-05 2005-08-16 Zuel Company, Inc. Anti-reflective glass surface with improved cleanability
CA2683165C (en) * 2006-04-05 2013-06-11 Foret Plasma Labs, Llc System, method and apparatus for treating liquids with wave energy from plasma
JP5980012B2 (ja) * 2012-06-27 2016-08-31 キヤノン株式会社 シリコンウェハの加工方法
KR101665384B1 (ko) * 2014-04-03 2016-10-12 한국지질자원연구원 중력계를 이용한 지하물질의 밀도변화 측정방법

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE143333C (de) *
US2869266A (en) * 1954-10-04 1959-01-20 Turco Products Inc Method for removing metal from the surface of a metal object
US2867929A (en) * 1956-12-20 1959-01-13 Gen Dynamics Corp Method and apparatus for chemically boring metallic material
US3383255A (en) * 1964-11-05 1968-05-14 North American Rockwell Planar etching of fused silica
FR1523245A (fr) * 1967-03-02 1968-05-03 Corning Glass Works Procédé de gravure à l'acide
US3674579A (en) * 1970-07-02 1972-07-04 Ncr Co Method of forming electrical conductors
US3730799A (en) * 1971-07-07 1973-05-01 Collins Radio Co Method for metallic pattern definition
US4113549A (en) * 1977-04-06 1978-09-12 Chem-Tronics, Inc. Chemical milling process

Also Published As

Publication number Publication date
EP0108458B1 (de) 1986-08-20
EP0108458A1 (de) 1984-05-16
DE3365471D1 (en) 1986-09-25
US4448635A (en) 1984-05-15
JPS5999724A (ja) 1984-06-08
AU557830B2 (en) 1987-01-08
CA1230285A (en) 1987-12-15
NL8204307A (nl) 1984-06-01
AU2097983A (en) 1984-05-17

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Legal Events

Date Code Title Description
UEP Publication of translation of european patent specification
REN Ceased due to non-payment of the annual fee