ATE223514T1 - Organisches substrat mit optischen schichten hergestellt mittels magnetron-zerstäubung und verfahren zu seiner herstellung - Google Patents

Organisches substrat mit optischen schichten hergestellt mittels magnetron-zerstäubung und verfahren zu seiner herstellung

Info

Publication number
ATE223514T1
ATE223514T1 AT99913276T AT99913276T ATE223514T1 AT E223514 T1 ATE223514 T1 AT E223514T1 AT 99913276 T AT99913276 T AT 99913276T AT 99913276 T AT99913276 T AT 99913276T AT E223514 T1 ATE223514 T1 AT E223514T1
Authority
AT
Austria
Prior art keywords
magnetron
organic substrate
sputting
production
optical layers
Prior art date
Application number
AT99913276T
Other languages
English (en)
Inventor
Joem-Steffen Liebig
Klaus Goedicke
Volker Kirchhoff
Gerhard Keller
Richard Bosmans
Pascal Comble
Original Assignee
Essilor Int
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=8235310&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=ATE223514(T1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Essilor Int filed Critical Essilor Int
Application granted granted Critical
Publication of ATE223514T1 publication Critical patent/ATE223514T1/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C23C14/0036—Reactive sputtering
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11—Anti-reflection coatings
    • G02B1/113—Anti-reflection coatings using inorganic layer materials only
    • G02B1/115—Multilayers
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S428/00—Stock material or miscellaneous articles
    • Y10S428/90—Magnetic feature
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31504—Composite [nonstructural laminate]
    • Y10T428/31507—Of polycarbonate

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Inorganic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Surface Treatment Of Optical Elements (AREA)
AT99913276T 1998-03-26 1999-03-18 Organisches substrat mit optischen schichten hergestellt mittels magnetron-zerstäubung und verfahren zu seiner herstellung ATE223514T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP98400721A EP0947601A1 (de) 1998-03-26 1998-03-26 Organisches Substrat mit optischen Schichten hergestellt mittels Magnetron-Zerstäubung und Verfahren
PCT/EP1999/001817 WO1999049097A1 (en) 1998-03-26 1999-03-18 Organic substrate having optical layers deposited by magnetron sputtering and method for preparing it

Publications (1)

Publication Number Publication Date
ATE223514T1 true ATE223514T1 (de) 2002-09-15

Family

ID=8235310

Family Applications (1)

Application Number Title Priority Date Filing Date
AT99913276T ATE223514T1 (de) 1998-03-26 1999-03-18 Organisches substrat mit optischen schichten hergestellt mittels magnetron-zerstäubung und verfahren zu seiner herstellung

Country Status (7)

Country Link
US (1) US6596368B1 (de)
EP (2) EP0947601A1 (de)
JP (1) JP4727813B2 (de)
AT (1) ATE223514T1 (de)
AU (1) AU3146399A (de)
DE (1) DE19983075B3 (de)
WO (1) WO1999049097A1 (de)

Families Citing this family (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2817267B1 (fr) 2000-11-28 2003-08-29 Essilor Int Procede de depot de couche anti-reflets a froid sur substrat organique
EP1401901B1 (de) 2001-05-29 2007-08-01 Essilor International Compagnie Generale D'optique Ophtalmische linse enthaltend eine epoxid/acrylat basierte grundierungszusammensetzung
CA2550446A1 (en) * 2003-12-18 2005-07-07 Afg Industries, Inc. Protective layer for optical coatings with enhanced corrosion and scratch resistance
DE102005015631B4 (de) * 2005-04-05 2010-12-02 Von Ardenne Anlagentechnik Gmbh Verfahren zur Herstellung eines reflexionsvermindernden Kratzschutzschichtsystems für Kunststoffe
AU2006247708A1 (en) 2005-05-12 2006-11-23 Agc Flat Glass North America, Inc. Low emissivity coating with low solar heat gain coefficient, enhanced chemical and mechanical properties and method of making the same
US7901781B2 (en) 2007-11-23 2011-03-08 Agc Flat Glass North America, Inc. Low emissivity coating with low solar heat gain coefficient, enhanced chemical and mechanical properties and method of making the same
ES2302661B1 (es) * 2008-02-14 2009-10-29 Indo Internacional S.A. Lente de base polimerica que comprende una capa endurecedora, una multicapa interferencial y una capa dura intercalada entre ambas, y procedimiento de fabricacion correspondiente.
ES2324148B1 (es) * 2009-03-20 2010-07-08 Indo Internacional, S.A Lente de base polimerica que comprende una capa endurecedora, una capa absorbente y multicapa interferencial y procedimiento de fabricacion correspondiente.
FR2943798B1 (fr) 2009-03-27 2011-05-27 Essilor Int Article d'optique revetu d'un revetement antireflet ou reflechissant comprenant une couche electriquement conductrice a base d'oxyde d'etain et procede de fabrication
EA024640B1 (ru) 2011-06-13 2016-10-31 Эссилор Энтернасьональ (Компани Женераль Д'Оптик) Способ изготовления стойкого к истиранию оптического изделия
US9703011B2 (en) 2013-05-07 2017-07-11 Corning Incorporated Scratch-resistant articles with a gradient layer
US9366784B2 (en) 2013-05-07 2016-06-14 Corning Incorporated Low-color scratch-resistant articles with a multilayer optical film
US9359261B2 (en) 2013-05-07 2016-06-07 Corning Incorporated Low-color scratch-resistant articles with a multilayer optical film
US9110230B2 (en) 2013-05-07 2015-08-18 Corning Incorporated Scratch-resistant articles with retained optical properties
US9684097B2 (en) 2013-05-07 2017-06-20 Corning Incorporated Scratch-resistant articles with retained optical properties
US11267973B2 (en) 2014-05-12 2022-03-08 Corning Incorporated Durable anti-reflective articles
US9335444B2 (en) 2014-05-12 2016-05-10 Corning Incorporated Durable and scratch-resistant anti-reflective articles
US9790593B2 (en) 2014-08-01 2017-10-17 Corning Incorporated Scratch-resistant materials and articles including the same
FR3039828B1 (fr) 2015-08-05 2021-12-17 Essilor Int Article a proprietes thermomecaniques ameliorees comportant une couche de nature organique-inorganique
JP2018536177A (ja) 2015-09-14 2018-12-06 コーニング インコーポレイテッド 高光線透過性かつ耐擦傷性反射防止物品
EP3356306B1 (de) 2015-09-28 2021-06-16 Tru Vue, Inc. Nahinfrarotreflektierende beschichtete artikel
FR3045672B1 (fr) 2015-12-18 2018-03-16 Corporation De L'ecole Polytechnique De Montreal Article comprenant une couche organique-inorganique de bas indice de refraction
CN109311740B (zh) 2016-04-19 2022-01-11 顶峰实业股份有限公司 涂覆的玻璃表面和用于涂覆玻璃基板的方法
CN110573468B (zh) 2017-05-04 2022-09-02 顶峰实业股份有限公司 低发射率涂层，包括其的玻璃表面，及其制备方法
WO2020016620A1 (en) 2018-07-18 2020-01-23 Essilor International Optical article with improved antireflective coating, methods for making the same
CN114085038A (zh) 2018-08-17 2022-02-25 康宁股份有限公司 具有薄的耐久性减反射结构的无机氧化物制品
EP3640687B1 (de) 2018-10-18 2024-12-04 Essilor International Optischer artikel mit einer interferenziellen beschichtung mit hoher abriebfestigkeit
EP3640688B1 (de) 2018-10-18 2022-10-05 Essilor International Optischer gegenstand mit einer interferenziellen beschichtung mit verbesserter abriebfestigkeit
US12135407B2 (en) 2018-11-19 2024-11-05 Essilor International Optical lens having an enhanced interferential coating and a multilayer system for improving abrasion-resistance
EP3654072B1 (de) 2018-11-19 2024-09-04 Essilor International Optische linse mit einer filternden interferenziellen beschichtung und einem mehrschichtsystem zur verbesserung der abriebfestigkeit
KR102742005B1 (ko) 2018-11-19 2024-12-16 에씰로 앙터나시오날 내마모성을 개선하기 위한 거울 코팅 및 다층 시스템을 갖는 광학 렌즈
ES2991906T3 (es) 2018-11-19 2024-12-05 Essilor Int Lente óptica con revestimiento interferencial y sistema multicapa para mejorar la resistencia a la abrasión
US12386101B2 (en) 2020-07-09 2025-08-12 Corning Incorporated Textured region of a substrate to reduce specular reflectance incorporating surface features with an elliptical perimeter or segments thereof, and method of making the same
EP4571371A1 (de) 2023-12-14 2025-06-18 Essilor International Optischer artikel mit interferenzieller beschichtung mit farbrobustheit

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62240762A (ja) * 1986-04-11 1987-10-21 Toyota Central Res & Dev Lab Inc 薄膜形成方法
US4849081A (en) * 1988-06-22 1989-07-18 The Boc Group, Inc. Formation of oxide films by reactive sputtering
US5181141A (en) * 1989-03-31 1993-01-19 Hoya Corporation Anti-reflection optical element
DE69027004T2 (de) * 1989-11-13 1996-11-14 Optical Coating Laboratory Inc Geometrie und Gestaltungen eines Geräts zum Magnetronzerstäuben
US5170291A (en) * 1989-12-19 1992-12-08 Leybold Aktiengesellschaft Coating, composed of an optically effective layer system, for substrates, whereby the layer system has a high anti-reflective effect, and method for manufacturing the coating
ATE160107T1 (de) * 1990-08-30 1997-11-15 Viratec Thin Films Inc Verfahren zur abscheidung von nioboxid enthaltenden optischen beschichtungen mittels reaktiver gleichstromzerstäubung
GB9101106D0 (en) * 1991-01-18 1991-02-27 Cray Microcoat Ltd Ion vapour deposition apparatus and method
DE4204763C1 (de) * 1992-02-18 1993-06-03 Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung Ev, 8000 Muenchen, De
FR2702486B1 (fr) * 1993-03-08 1995-04-21 Essilor Int Compositions de revêtement antiabrasion à base d'hydrolysats de silanes et de composés de l'aluminium, et articles revêtus correspondants résistants à l'abrasion et aux chocs.
WO1995000677A1 (en) * 1993-06-17 1995-01-05 Deposition Sciences, Inc. Sputtering device
JPH07248415A (ja) * 1994-03-10 1995-09-26 Olympus Optical Co Ltd 光学薄膜の製造方法
JP3433845B2 (ja) * 1994-08-02 2003-08-04 尾池工業株式会社 耐擦傷性と耐久性に優れた反射防止フィルム
DE4430363A1 (de) 1994-08-26 1996-02-29 Leybold Ag Optische Linse aus einem klarsichtigen Kunststoff
JPH0894802A (ja) * 1994-09-27 1996-04-12 Canon Inc 光学素子
JPH08211201A (ja) * 1995-02-02 1996-08-20 Olympus Optical Co Ltd 光学薄膜およびその製造方法
JP3694882B2 (ja) * 1995-10-30 2005-09-14 セイコーエプソン株式会社 反射防止性能を有する防曇性物品及びその製造方法
DE19605932A1 (de) * 1996-02-17 1997-08-21 Leybold Systems Gmbh Verfahren zum Ablagern einer optisch transparenten und elektrisch leitenden Schicht auf einem Substrat aus durchscheinendem Werkstoff
US5670030A (en) * 1996-03-19 1997-09-23 Optical Coating Laboratory, Inc. Methods for preparing low scatter optical coatings
JPH1036962A (ja) * 1996-07-22 1998-02-10 Olympus Optical Co Ltd 光学薄膜の製造装置および製造方法

Also Published As

Publication number Publication date
DE19983075B3 (de) 2011-12-29
JP2002507665A (ja) 2002-03-12
JP4727813B2 (ja) 2011-07-20
WO1999049097A1 (en) 1999-09-30
AU3146399A (en) 1999-10-18
EP1071832B1 (de) 2002-09-04
EP1071832A1 (de) 2001-01-31
US6596368B1 (en) 2003-07-22
DE19983075T1 (de) 2001-05-10
EP0947601A1 (de) 1999-10-06

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Legal Events

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