ATE227470T1 - Rasterelektronenmikroskop mit farbsynthetisierung. - Google Patents

Rasterelektronenmikroskop mit farbsynthetisierung.

Info

Publication number: ATE227470T1
Authority: AT; Austria
Prior art keywords: signals; wide energy; detectors; energy bandwidth; specimen
Prior art date: 1991-07-29

Application number

AT92916653T

Other languages

English (en)

Inventor

David Scharf

Original Assignee

David Scharf

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1991-07-29

Filing date

1992-07-22

Publication date

2002-11-15

1992-07-22 Application filed by David Scharf filed Critical David Scharf

2002-11-15 Application granted granted Critical

2002-11-15 Publication of ATE227470T1 publication Critical patent/ATE227470T1/de

Links

230000002194 synthesizing effect Effects 0.000 abstract 2
239000003086 colorant Substances 0.000 abstract 1
238000010894 electron beam technology Methods 0.000 abstract 1

Classifications

- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/22—Optical, image processing or photographic arrangements associated with the tube
- H01J37/222—Image processing arrangements associated with the tube
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/244—Detection characterized by the detecting means
- H01J2237/2448—Secondary particle detectors
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/244—Detection characterized by the detecting means
- H01J2237/24495—Signal processing, e.g. mixing of two or more signals

Landscapes

Chemical & Material Sciences (AREA)
Analytical Chemistry (AREA)
Engineering & Computer Science (AREA)
Computer Vision & Pattern Recognition (AREA)
Analysing Materials By The Use Of Radiation (AREA)
Apparatus For Radiation Diagnosis (AREA)

AT92916653T 1991-07-29 1992-07-22 Rasterelektronenmikroskop mit farbsynthetisierung. ATE227470T1 (de)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
US07/737,942 US5212383A (en)	1991-07-29	1991-07-29	Color synthesizing scanning electron microscope
PCT/US1992/006103 WO1993003491A1 (en)	1991-07-29	1992-07-22	Color synthesizing scanning electron microscope

Publications (1)

Publication Number	Publication Date
ATE227470T1 true ATE227470T1 (de)	2002-11-15

Family

ID=24965901

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
AT92916653T ATE227470T1 (de)	1991-07-29	1992-07-22	Rasterelektronenmikroskop mit farbsynthetisierung.

Country Status (10)

Country	Link
US (1)	US5212383A (de)
EP (1)	EP0602058B1 (de)
JP (1)	JP3270046B2 (de)
KR (1)	KR100246633B1 (de)
AT (1)	ATE227470T1 (de)
AU (1)	AU657995B2 (de)
CA (1)	CA2114020C (de)
CZ (1)	CZ18094A3 (de)
DE (1)	DE69232841T2 (de)
WO (1)	WO1993003491A1 (de)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
GB9209500D0 (en) *	1992-05-01	1992-06-17	Link Analytical Ltd	X-ray analysis apparatus
GB2285169A (en) *	1993-12-21	1995-06-28	Secretary Trade Ind Brit	Scanning electron microscope grain imaging
JP3291880B2 (ja) *	1993-12-28	2002-06-17	株式会社日立製作所	走査形電子顕微鏡
EP0826145B1 (de) *	1995-05-13	2001-08-16	International Business Machines Corporation	Datenerfassungs- und steueranlage für rastenprobenmikroskop
US6353222B1 (en)	1998-09-03	2002-03-05	Applied Materials, Inc.	Determining defect depth and contour information in wafer structures using multiple SEM images
US6201240B1 (en)	1998-11-04	2001-03-13	Applied Materials, Inc.	SEM image enhancement using narrow band detection and color assignment
US6627886B1 (en) *	1999-05-14	2003-09-30	Applied Materials, Inc.	Secondary electron spectroscopy method and system
FR2800196B1 (fr) *	1999-10-21	2001-11-23	Mona Lisa Production	Procede de prise de vues par microscopie electronique et methode de realisation d'un film video sur au moins un animal de faible taille
US6930308B1 (en) *	2002-07-11	2005-08-16	Kla-Tencor Technologies Corporation	SEM profile and surface reconstruction using multiple data sets
DE102015116272A1 (de)	2015-09-25	2017-03-30	Heinrich-Pette-Institut Leibniz-Institut für experimentelle Virologie	Polychromatische Elektronenmikroskopie

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US3628014A (en) *	1969-12-22	1971-12-14	Boeing Co	Scanning electron microscope with color display means
US3812288A (en) *	1972-11-21	1974-05-21	Edax Int Inc	Television display system
US4068123A (en) *	1973-07-27	1978-01-10	Nihon Denshi Kabushiki Kaisha	Scanning electron microscope
GB1443562A (en) *	1973-08-14	1976-07-21	Ontario Research Foundation	Method and apparatus for displaying images stereoscopically and for deriving signals from a scanning electron microscope for producing steroscopic images
US4041311A (en) *	1976-07-12	1977-08-09	Iowa State University Research Foundation, Inc.	Scanning electron microscope with color image display
US4439680A (en) *	1980-06-26	1984-03-27	Regents Of The University Of Minnesota	Color-coded mapping system and method for identifying elements in a specimen
JPS57126056A (en) *	1981-01-29	1982-08-05	Akashi Seisakusho Co Ltd	Scanning-type electronic microscope which can display plural sample images simultaneously, and device similar to it
JPS58501396A (ja) *	1981-09-01	1983-08-18	コモンウエルス　サイエンテイフイツク　アンド　インダストリアル　リサ−チ　オ−ガニゼ−シヨン	画像形成方法および装置
US4588890A (en) *	1984-12-31	1986-05-13	International Business Machines Corporation	Apparatus and method for composite image formation by scanning electron beam
US4673988A (en) *	1985-04-22	1987-06-16	E.I. Du Pont De Nemours And Company	Electronic mosaic imaging process
GB8622976D0 (en) *	1986-09-24	1986-10-29	Trialsite Ltd	Scanning electron microscopes
US4857731A (en) *	1987-04-17	1989-08-15	Jeol Ltd.	Instrument for analyzing specimen
JPH01102841A (ja) *	1987-10-14	1989-04-20	Toshiba Corp	画像形成方法
JP2786207B2 (ja) *	1988-08-26	1998-08-13	株式会社日立製作所	走査型顕微鏡における表面形状算出方法

1991
- 1991-07-29 US US07/737,942 patent/US5212383A/en not_active Expired - Lifetime
1992
- 1992-07-22 CA CA002114020A patent/CA2114020C/en not_active Expired - Fee Related
- 1992-07-22 JP JP50361493A patent/JP3270046B2/ja not_active Expired - Fee Related
- 1992-07-22 CZ CS94180A patent/CZ18094A3/cs unknown
- 1992-07-22 KR KR1019940700250A patent/KR100246633B1/ko not_active Expired - Fee Related
- 1992-07-22 AT AT92916653T patent/ATE227470T1/de not_active IP Right Cessation
- 1992-07-22 DE DE69232841T patent/DE69232841T2/de not_active Expired - Fee Related
- 1992-07-22 AU AU23838/92A patent/AU657995B2/en not_active Ceased
- 1992-07-22 WO PCT/US1992/006103 patent/WO1993003491A1/en not_active Ceased
- 1992-07-22 EP EP92916653A patent/EP0602058B1/de not_active Expired - Lifetime

Also Published As

Publication number	Publication date
AU657995B2 (en)	1995-03-30
JP3270046B2 (ja)	2002-04-02
JPH06509903A (ja)	1994-11-02
EP0602058A4 (en)	1994-09-28
DE69232841D1 (de)	2002-12-12
AU2383892A (en)	1993-03-02
CZ18094A3 (en)	1994-06-15
CA2114020C (en)	1999-05-25
EP0602058B1 (de)	2002-11-06
WO1993003491A1 (en)	1993-02-18
CA2114020A1 (en)	1993-02-18
EP0602058A1 (de)	1994-06-22
US5212383A (en)	1993-05-18
DE69232841T2 (de)	2003-09-18
KR100246633B1 (ko)	2000-03-15

Legal Events

Date	Code	Title	Description
2003-05-15	RER	Ceased as to paragraph 5 lit. 3 law introducing patent treaties

Publication	Publication Date	Title
EP0769799A3 (de)	2004-11-24	Rasterelektronenmikroskop
Rose et al.	1946	The Image Orthicon-a sensitive television pickup tube
ATE227470T1 (de)	2002-11-15	Rasterelektronenmikroskop mit farbsynthetisierung.
DE69606391D1 (de)	2000-03-02	Elektronenstrahlsaüle zur musterschreibung
EP0269181A3 (de)	1989-03-01	Gerät zur Erzeugung eines Elektronenstrahlmusters zur variablen Abbildung des Strahlflecks
MY114546A (en)	2002-11-30	Color cathode-ray tube
JPS57145259A (en)	1982-09-08	Scanning type electron microscope and its similar device
KR830006803A (ko)	1983-10-06	컬러 영상관
EP0386894A3 (de)	1991-04-24	Fokussierung eines Elektronenstrahls
KR920017162A (ko)	1992-09-26	칼라 음극선관용 전자총
US3441786A (en)	1969-04-29	Camera tube having a variable resolving aperture
GB962086A (en)	1964-06-24	Energy-selecting electron microscopes
GB1328713A (en)	1973-08-30	Corpuscular beam scanning microscopes
USRE29500E (en)	1977-12-20	Scanning charged beam particle beam microscope
JPS52128053A (en)	1977-10-27	Electron microscope
JPS54138467A (en)	1979-10-26	Scanning type electron microscope or resembling apparatus
US3555344A (en)	1971-01-12	Image dissector for counteracting magnification due to range closure
US3423624A (en)	1969-01-21	Electron image correlation tube with dual storage screens
JPS54100669A (en)	1979-08-08	Electron-beam unit
JPS6056344A (ja)	1985-04-01	走査型反射電子回折顕微装置
ES8700498A1 (es)	1986-10-01	Un tuvo de presentacion visual.
JPS5732557A (en)	1982-02-22	Scan electron microscope
GB2322230A (en)	1998-08-19	Image multiplier
SU668026A1 (ru)	1979-06-15	Способ создани отметок на мишени передающей телевизионной трубки
JPS5448481A (en)	1979-04-17	Electron ray unit