ATE232331T1 - Substratparallel arbeitendes mikrorelais - Google Patents

Substratparallel arbeitendes mikrorelais

Info

Publication number
ATE232331T1
ATE232331T1 AT00908889T AT00908889T ATE232331T1 AT E232331 T1 ATE232331 T1 AT E232331T1 AT 00908889 T AT00908889 T AT 00908889T AT 00908889 T AT00908889 T AT 00908889T AT E232331 T1 ATE232331 T1 AT E232331T1
Authority
AT
Austria
Prior art keywords
micro relay
substrate parallel
parallel operating
operating micro
substrate
Prior art date
Application number
AT00908889T
Other languages
English (en)
Inventor
Ralf Struempler
Original Assignee
Abb Research Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Abb Research Ltd filed Critical Abb Research Ltd
Application granted granted Critical
Publication of ATE232331T1 publication Critical patent/ATE232331T1/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/12—Contacts characterised by the manner in which co-operating contacts engage
    • H01H1/14—Contacts characterised by the manner in which co-operating contacts engage by abutting
    • H01H1/20—Bridging contacts
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H9/00—Details of switching devices, not covered by groups H01H1/00 - H01H7/00
    • H01H9/30—Means for extinguishing or preventing arc between current-carrying parts
    • H01H9/34—Stationary parts for restricting or subdividing the arc, e.g. barrier plate

Landscapes

  • Micromachines (AREA)
  • Coupling Device And Connection With Printed Circuit (AREA)
  • Structure Of Printed Boards (AREA)
  • Shaping Of Tube Ends By Bending Or Straightening (AREA)
  • Relay Circuits (AREA)
  • Contacts (AREA)
AT00908889T 1999-03-20 2000-03-17 Substratparallel arbeitendes mikrorelais ATE232331T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19912669A DE19912669A1 (de) 1999-03-20 1999-03-20 Substratparallel arbeitendes Mikrorelais
PCT/CH2000/000152 WO2000057445A1 (de) 1999-03-20 2000-03-17 Substratparallel arbeitendes mikrorelais

Publications (1)

Publication Number Publication Date
ATE232331T1 true ATE232331T1 (de) 2003-02-15

Family

ID=7901818

Family Applications (1)

Application Number Title Priority Date Filing Date
AT00908889T ATE232331T1 (de) 1999-03-20 2000-03-17 Substratparallel arbeitendes mikrorelais

Country Status (5)

Country Link
US (1) US6613993B1 (de)
EP (1) EP1163692B1 (de)
AT (1) ATE232331T1 (de)
DE (2) DE19912669A1 (de)
WO (1) WO2000057445A1 (de)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10040867A1 (de) * 2000-08-21 2002-05-23 Abb Research Ltd Mikroschalter
US6917268B2 (en) * 2001-12-31 2005-07-12 International Business Machines Corporation Lateral microelectromechanical system switch
US20040027029A1 (en) * 2002-08-07 2004-02-12 Innovative Techology Licensing, Llc Lorentz force microelectromechanical system (MEMS) and a method for operating such a MEMS
RU2325722C2 (ru) * 2002-11-19 2008-05-27 Баолаб Микросистемс С.Л. Миниатюрное реле и соответствующие варианты его использования
US20050156191A1 (en) * 2004-01-21 2005-07-21 Sumitomo Electric Industries, Ltd. Actuator structure and optical device
JP4540443B2 (ja) * 2004-10-21 2010-09-08 富士通コンポーネント株式会社 静電リレー
KR100748747B1 (ko) 2006-02-17 2007-08-13 현대자동차주식회사 비접촉 ｒｆ ｍｅｍｓ 스위치
DE102007035633B4 (de) 2007-07-28 2012-10-04 Protron Mikrotechnik Gmbh Verfahren zur Herstellung mikromechanischer Strukturen sowie mikromechanische Struktur
WO2009148677A2 (en) * 2008-03-11 2009-12-10 The Regents Of The University Of California Microelectromechanical system (mems) resonant switches and applications for power converters and amplifiers
FR2950194B1 (fr) * 2009-09-11 2011-09-02 Commissariat Energie Atomique Actionneur electromecanique a electrodes interdigitees
CN104025238B (zh) * 2011-12-21 2016-05-18 西门子公司 一种接触器
KR101276369B1 (ko) * 2012-01-10 2013-06-18 현대중공업 주식회사 배선용 차단기
CN103956299A (zh) * 2014-03-31 2014-07-30 苏州锟恩电子科技有限公司 一种微机械rf开关

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5025346A (en) 1989-02-17 1991-06-18 Regents Of The University Of California Laterally driven resonant microstructures
DE4126107C2 (de) * 1991-08-07 1993-12-16 Bosch Gmbh Robert Beschleunigungssensor und Verfahren zur Herstellung
DE4205029C1 (en) * 1992-02-19 1993-02-11 Siemens Ag, 8000 Muenchen, De Micro-mechanical electrostatic relay - has tongue-shaped armature etched from surface of silicon@ substrate
DE4229068C2 (de) * 1992-09-01 1994-06-16 Bosch Gmbh Robert Beschleunigungsschalter und Verfahren zur Herstellung
FR2706075B1 (fr) * 1993-06-02 1995-07-21 Lewiner Jacques Dispositif de commande du type actionneur à pièce mobile conservant son orientation au cours du mouvement.
KR100252009B1 (ko) * 1997-09-25 2000-04-15 윤종용 마이크로 진동구조물과 그 공진주파수 조절방법 및 이를 이용한 마이크로 엑츄에이터
DE19800189C2 (de) * 1998-01-05 2000-05-18 Stefan Vogel Mikromechanischer Schalter

Also Published As

Publication number Publication date
DE19912669A1 (de) 2000-09-21
DE50001205D1 (de) 2003-03-13
WO2000057445A1 (de) 2000-09-28
EP1163692B1 (de) 2003-02-05
EP1163692A1 (de) 2001-12-19
US6613993B1 (en) 2003-09-02

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Legal Events

Date Code Title Description
REN Ceased due to non-payment of the annual fee