ATE238630T1 - Verfahren und vorrichtung zum örtlichen glühen einer auf einem substrat geformten mikrostruktur und dadurch hergestellte vorrichtung - Google Patents

Verfahren und vorrichtung zum örtlichen glühen einer auf einem substrat geformten mikrostruktur und dadurch hergestellte vorrichtung

Info

Publication number
ATE238630T1
ATE238630T1 AT98923858T AT98923858T ATE238630T1 AT E238630 T1 ATE238630 T1 AT E238630T1 AT 98923858 T AT98923858 T AT 98923858T AT 98923858 T AT98923858 T AT 98923858T AT E238630 T1 ATE238630 T1 AT E238630T1
Authority
AT
Austria
Prior art keywords
microstructure
micromechanical
substrate
produced therefrom
resonance frequency
Prior art date
Application number
AT98923858T
Other languages
English (en)
Inventor
Clark T-C Nguyen
Kun Wang
Original Assignee
Univ Michigan
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Univ Michigan filed Critical Univ Michigan
Application granted granted Critical
Publication of ATE238630T1 publication Critical patent/ATE238630T1/de

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H9/02393—Post-fabrication trimming of parameters, e.g. resonance frequency, Q factor
    • H03H9/02401—Post-fabrication trimming of parameters, e.g. resonance frequency, Q factor by annealing
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
    • H10P95/90—Thermal treatments, e.g. annealing or sintering

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Micromachines (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Glass Compositions (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Luminescent Compositions (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Apparatuses And Processes For Manufacturing Resistors (AREA)
  • Pressure Sensors (AREA)
  • Recrystallisation Techniques (AREA)
AT98923858T 1997-06-13 1998-05-29 Verfahren und vorrichtung zum örtlichen glühen einer auf einem substrat geformten mikrostruktur und dadurch hergestellte vorrichtung ATE238630T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/874,785 US5976994A (en) 1997-06-13 1997-06-13 Method and system for locally annealing a microstructure formed on a substrate and device formed thereby
PCT/US1998/011028 WO1998057423A1 (en) 1997-06-13 1998-05-29 Method and system for locally annealing a microstructure formed on a substrate and device formed thereby

Publications (1)

Publication Number Publication Date
ATE238630T1 true ATE238630T1 (de) 2003-05-15

Family

ID=25364575

Family Applications (1)

Application Number Title Priority Date Filing Date
AT98923858T ATE238630T1 (de) 1997-06-13 1998-05-29 Verfahren und vorrichtung zum örtlichen glühen einer auf einem substrat geformten mikrostruktur und dadurch hergestellte vorrichtung

Country Status (10)

Country Link
US (2) US5976994A (de)
EP (1) EP0988695B1 (de)
JP (2) JP2002505046A (de)
KR (1) KR100370602B1 (de)
CN (1) CN1271474A (de)
AT (1) ATE238630T1 (de)
AU (1) AU7605098A (de)
DE (1) DE69813805T2 (de)
NO (1) NO996113L (de)
WO (1) WO1998057423A1 (de)

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Also Published As

Publication number Publication date
US5976994A (en) 1999-11-02
CN1271474A (zh) 2000-10-25
KR100370602B1 (ko) 2003-02-05
US6169321B1 (en) 2001-01-02
DE69813805D1 (de) 2003-05-28
EP0988695B1 (de) 2003-04-23
NO996113L (no) 2000-02-07
JP2002505046A (ja) 2002-02-12
AU7605098A (en) 1998-12-30
EP0988695A1 (de) 2000-03-29
NO996113D0 (no) 1999-12-10
DE69813805T2 (de) 2003-11-06
JP2009044741A (ja) 2009-02-26
WO1998057423A1 (en) 1998-12-17
KR20010013636A (ko) 2001-02-26

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