ATE240589T1 - Verfahren zum herstellen von dünnschicht- solarzellen-modulen - Google Patents

Verfahren zum herstellen von dünnschicht- solarzellen-modulen

Info

Publication number
ATE240589T1
ATE240589T1 AT99120971T AT99120971T ATE240589T1 AT E240589 T1 ATE240589 T1 AT E240589T1 AT 99120971 T AT99120971 T AT 99120971T AT 99120971 T AT99120971 T AT 99120971T AT E240589 T1 ATE240589 T1 AT E240589T1
Authority
AT
Austria
Prior art keywords
semiconductor layer
electrode layer
layer
substrate
thin film
Prior art date
Application number
AT99120971T
Other languages
English (en)
Inventor
Masataka Kondo
Original Assignee
Kaneka Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kaneka Corp filed Critical Kaneka Corp
Application granted granted Critical
Publication of ATE240589T1 publication Critical patent/ATE240589T1/de

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F71/00—Manufacture or treatment of devices covered by this subclass
    • H10F71/10—Manufacture or treatment of devices covered by this subclass the devices comprising amorphous semiconductor material
    • H10F71/103—Manufacture or treatment of devices covered by this subclass the devices comprising amorphous semiconductor material including only Group IV materials
    • H10F71/1035—Manufacture or treatment of devices covered by this subclass the devices comprising amorphous semiconductor material including only Group IV materials having multiple Group IV elements, e.g. SiGe or SiC
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F19/00—Integrated devices, or assemblies of multiple devices, comprising at least one photovoltaic cell covered by group H10F10/00, e.g. photovoltaic modules
    • H10F19/30—Integrated devices, or assemblies of multiple devices, comprising at least one photovoltaic cell covered by group H10F10/00, e.g. photovoltaic modules comprising thin-film photovoltaic cells
    • H10F19/31—Integrated devices, or assemblies of multiple devices, comprising at least one photovoltaic cell covered by group H10F10/00, e.g. photovoltaic modules comprising thin-film photovoltaic cells having multiple laterally adjacent thin-film photovoltaic cells deposited on the same substrate
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F19/00—Integrated devices, or assemblies of multiple devices, comprising at least one photovoltaic cell covered by group H10F10/00, e.g. photovoltaic modules
    • H10F19/80—Encapsulations or containers for integrated devices, or assemblies of multiple devices, having photovoltaic cells
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F71/00—Manufacture or treatment of devices covered by this subclass
    • H10F71/121—The active layers comprising only Group IV materials
    • H10F71/1224—The active layers comprising only Group IV materials comprising microcrystalline silicon
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y02E10/545—Microcrystalline silicon PV cells
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S136/00—Batteries: thermoelectric and photoelectric
    • Y10S136/29—Testing, calibrating, treating, e.g. aging

Landscapes

  • Photovoltaic Devices (AREA)
AT99120971T 1999-03-25 1999-11-04 Verfahren zum herstellen von dünnschicht- solarzellen-modulen ATE240589T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8196199 1999-03-25

Publications (1)

Publication Number Publication Date
ATE240589T1 true ATE240589T1 (de) 2003-05-15

Family

ID=13761111

Family Applications (1)

Application Number Title Priority Date Filing Date
AT99120971T ATE240589T1 (de) 1999-03-25 1999-11-04 Verfahren zum herstellen von dünnschicht- solarzellen-modulen

Country Status (5)

Country Link
US (1) US6271053B1 (de)
EP (1) EP1039554B1 (de)
AT (1) ATE240589T1 (de)
DE (1) DE69907866T2 (de)
ES (1) ES2198833T3 (de)

Families Citing this family (49)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6455347B1 (en) * 1999-06-14 2002-09-24 Kaneka Corporation Method of fabricating thin-film photovoltaic module
JP4036616B2 (ja) * 2000-01-31 2008-01-23 三洋電機株式会社 太陽電池モジュール
JP4201241B2 (ja) * 2001-05-17 2008-12-24 株式会社カネカ 集積型薄膜光電変換モジュールの作製方法
JP4162447B2 (ja) * 2001-09-28 2008-10-08 三洋電機株式会社 光起電力素子及び光起電力装置
US7993773B2 (en) 2002-08-09 2011-08-09 Infinite Power Solutions, Inc. Electrochemical apparatus with barrier layer protected substrate
US8404376B2 (en) 2002-08-09 2013-03-26 Infinite Power Solutions, Inc. Metal film encapsulation
US8236443B2 (en) 2002-08-09 2012-08-07 Infinite Power Solutions, Inc. Metal film encapsulation
US8431264B2 (en) 2002-08-09 2013-04-30 Infinite Power Solutions, Inc. Hybrid thin-film battery
US8394522B2 (en) 2002-08-09 2013-03-12 Infinite Power Solutions, Inc. Robust metal film encapsulation
US8445130B2 (en) 2002-08-09 2013-05-21 Infinite Power Solutions, Inc. Hybrid thin-film battery
US20070264564A1 (en) 2006-03-16 2007-11-15 Infinite Power Solutions, Inc. Thin film battery on an integrated circuit or circuit board and method thereof
US8021778B2 (en) 2002-08-09 2011-09-20 Infinite Power Solutions, Inc. Electrochemical apparatus with barrier layer protected substrate
US8728285B2 (en) 2003-05-23 2014-05-20 Demaray, Llc Transparent conductive oxides
US7888584B2 (en) * 2003-08-29 2011-02-15 Lyden Robert M Solar cell, module, array, network, and power grid
KR101127370B1 (ko) 2004-12-08 2012-03-29 인피니트 파워 솔루션스, 인크. ＬｉＣｏＯ２의 증착
US7959769B2 (en) 2004-12-08 2011-06-14 Infinite Power Solutions, Inc. Deposition of LiCoO2
US20090308428A1 (en) * 2006-09-08 2009-12-17 Mitsubishi Heavy Industries, Ltd. Solar panel and method of manufacturing solar panel
CN101523571A (zh) 2006-09-29 2009-09-02 无穷动力解决方案股份有限公司 柔性基板上沉积的电池层的掩模和材料限制
US8197781B2 (en) 2006-11-07 2012-06-12 Infinite Power Solutions, Inc. Sputtering target of Li3PO4 and method for producing same
WO2008150769A2 (en) * 2007-05-31 2008-12-11 Thinsilicon Corporation Photovoltaic device and method of manufacturing photovoltaic devices
TWI405340B (zh) * 2007-08-31 2013-08-11 Nexpower Technology Corp 薄膜太陽能電池與其製作方法
CN101903560B (zh) 2007-12-21 2014-08-06 无穷动力解决方案股份有限公司 用于电解质膜的溅射靶的方法
US8268488B2 (en) 2007-12-21 2012-09-18 Infinite Power Solutions, Inc. Thin film electrolyte for thin film batteries
US8518581B2 (en) 2008-01-11 2013-08-27 Inifinite Power Solutions, Inc. Thin film encapsulation for thin film batteries and other devices
JP2009206279A (ja) * 2008-02-27 2009-09-10 Sharp Corp 薄膜太陽電池およびその製造方法
TWI440198B (zh) * 2008-03-13 2014-06-01 Nexpower Technology Corp 薄膜疊層太陽能電池與其製作方法
WO2009124191A2 (en) 2008-04-02 2009-10-08 Infinite Power Solutions, Inc. Passive over/under voltage control and protection for energy storage devices associated with energy harvesting
TWI378565B (en) * 2008-04-30 2012-12-01 Nexpower Technology Corp Stacked-layered thin film solar cell and manufacturing method thereof
JP5207493B2 (ja) * 2008-05-15 2013-06-12 株式会社アルバック 薄膜太陽電池モジュールの製造方法
JP2012500610A (ja) 2008-08-11 2012-01-05 インフィニット パワー ソリューションズ， インコーポレイテッド 電磁エネルギー獲得ための統合コレクタ表面を有するエネルギーデバイスおよびその方法
CN102138214B (zh) 2008-09-01 2014-06-04 默克专利股份有限公司 借助蚀刻的薄层太阳能电池组件的边缘去除
CN102150185B (zh) 2008-09-12 2014-05-28 无穷动力解决方案股份有限公司 具有经由电磁能进行数据通信的组成导电表面的能量装置及其方法
WO2010042594A1 (en) 2008-10-08 2010-04-15 Infinite Power Solutions, Inc. Environmentally-powered wireless sensor module
US8298852B2 (en) * 2008-12-29 2012-10-30 Jusung Engineering Co., Ltd. Thin film type solar cell and method for manufacturing the same
TWI387120B (zh) * 2009-02-17 2013-02-21 Nexpower Technology Corp 薄膜疊層太陽能電池及其製作方法
US8418418B2 (en) 2009-04-29 2013-04-16 3Form, Inc. Architectural panels with organic photovoltaic interlayers and methods of forming the same
WO2010144459A2 (en) * 2009-06-10 2010-12-16 Thinsilicon Corporation Photovoltaic modules and methods for manufacturing photovoltaic modules having tandem semiconductor layer stacks
CN102576828B (zh) 2009-09-01 2016-04-20 萨普拉斯特研究有限责任公司 具有集成薄膜电池的印刷电路板
EP2577777B1 (de) 2010-06-07 2016-12-28 Sapurast Research LLC Wiederaufladbare elektrochemische vorrichtung von hoher dichte
KR101251841B1 (ko) * 2011-11-28 2013-04-09 엘지이노텍 주식회사 태양광 발전장치 및 이의 제조방법
US9634176B2 (en) 2013-05-29 2017-04-25 Kaneka Corporation Method for manufacturing crystalline silicon-based solar cell and method for manufacturing crystalline silicon-based solar cell module
EP3396699A1 (de) 2017-04-27 2018-10-31 TRUMPF Hüttinger GmbH + Co. KG Strommwandlungseinheit, plasmaverarbeitungsausrüstung und verfahren zur steuerung mehrerer plasmaprozesse
EP3396698A1 (de) 2017-04-27 2018-10-31 TRUMPF Hüttinger GmbH + Co. KG Strommwandlungseinheit, plasmaverarbeitungsausrüstung und verfahren zur steuerung mehrerer plasmaprozesse
EP3396700A1 (de) 2017-04-27 2018-10-31 TRUMPF Hüttinger GmbH + Co. KG Strommwandlungseinheit, plasmaverarbeitungsausrüstung und verfahren zur steuerung mehrerer plasmaprozesse
US10490682B2 (en) 2018-03-14 2019-11-26 National Mechanical Group Corp. Frame-less encapsulated photo-voltaic solar panel supporting solar cell modules encapsulated within multiple layers of optically-transparent epoxy-resin materials
US11207988B2 (en) 2018-08-06 2021-12-28 Robert M. Lyden Electric or hybrid vehicle with wireless device and method of supplying electromagnetic energy to vehicle
US10840707B2 (en) 2018-08-06 2020-11-17 Robert M. Lyden Utility pole with solar modules and wireless device and method of retrofitting existing utility pole
US11588421B1 (en) 2019-08-15 2023-02-21 Robert M. Lyden Receiver device of energy from the earth and its atmosphere
US20260008129A1 (en) * 2022-06-30 2026-01-08 University Of Virginia Patent Foundation Use of lasers to selectively remove materials from substrates

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4166918A (en) 1978-07-19 1979-09-04 Rca Corporation Method of removing the effects of electrical shorts and shunts created during the fabrication process of a solar cell
AU2042183A (en) 1983-08-03 1985-02-07 Energy Conversion Devices Inc. Eliminating short circuits in photovoltaic devices
JPS60208869A (ja) 1984-04-03 1985-10-21 Matsushita Electric Ind Co Ltd 光起電力素子の製造法
JPS61156775A (ja) 1984-12-28 1986-07-16 Teijin Ltd 非晶質シリコン太陽電池の分割加工方法
JPS61198685A (ja) 1985-02-27 1986-09-03 Kanegafuchi Chem Ind Co Ltd 半導体装置の製法
US4838950A (en) 1988-04-22 1989-06-13 Chronar Corp. Stabilization of intraconnections and interfaces

Also Published As

Publication number Publication date
ES2198833T3 (es) 2004-02-01
DE69907866D1 (de) 2003-06-18
EP1039554B1 (de) 2003-05-14
EP1039554A1 (de) 2000-09-27
DE69907866T2 (de) 2004-03-11
US6271053B1 (en) 2001-08-07

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