ATE243088T1 - Laserbearbeitungsvorrichtung - Google Patents

Laserbearbeitungsvorrichtung

Info

Publication number
ATE243088T1
ATE243088T1 AT98944342T AT98944342T ATE243088T1 AT E243088 T1 ATE243088 T1 AT E243088T1 AT 98944342 T AT98944342 T AT 98944342T AT 98944342 T AT98944342 T AT 98944342T AT E243088 T1 ATE243088 T1 AT E243088T1
Authority
AT
Austria
Prior art keywords
laser
optics
focusing
laser processing
processing apparatus
Prior art date
Application number
AT98944342T
Other languages
English (en)
Inventor
Herman Leonard Offerhaus
Richard Antonius Kleijhorst
Der Slot Peter Johannes Ma Van
Original Assignee
Nl Ct Voor Laser Res B V
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nl Ct Voor Laser Res B V filed Critical Nl Ct Voor Laser Res B V
Application granted granted Critical
Publication of ATE243088T1 publication Critical patent/ATE243088T1/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/0665—Shaping the laser beam, e.g. by masks or multi-focusing by beam condensation on the workpiece, e.g. for focusing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/03—Observing, e.g. monitoring, the workpiece
    • B23K26/032—Observing, e.g. monitoring, the workpiece using optical means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
    • B23K26/0622—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses
    • B23K26/0624—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses using ultrashort pulses, i.e. pulses of 1 ns or less
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0643—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising mirrors

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)
  • Laser Surgery Devices (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
AT98944342T 1997-09-18 1998-09-18 Laserbearbeitungsvorrichtung ATE243088T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
NL1007068A NL1007068C2 (nl) 1997-09-18 1997-09-18 Laserbewerkingsapparaat.
PCT/NL1998/000543 WO1999014009A1 (en) 1997-09-18 1998-09-18 Laser processing device

Publications (1)

Publication Number Publication Date
ATE243088T1 true ATE243088T1 (de) 2003-07-15

Family

ID=19765699

Family Applications (1)

Application Number Title Priority Date Filing Date
AT98944342T ATE243088T1 (de) 1997-09-18 1998-09-18 Laserbearbeitungsvorrichtung

Country Status (7)

Country Link
US (1) US6437287B1 (de)
EP (1) EP1015164B1 (de)
JP (1) JP2001516647A (de)
AT (1) ATE243088T1 (de)
DE (1) DE69815699T2 (de)
NL (1) NL1007068C2 (de)
WO (1) WO1999014009A1 (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7119351B2 (en) 2002-05-17 2006-10-10 Gsi Group Corporation Method and system for machine vision-based feature detection and mark verification in a workpiece or wafer marking system
JP2005125339A (ja) * 2003-10-21 2005-05-19 Hitachi Via Mechanics Ltd レーザ加工装置
CN100352593C (zh) * 2004-06-02 2007-12-05 上海大众汽车有限公司 激光器的对焦设备
JP2006167728A (ja) * 2004-12-13 2006-06-29 Yamazaki Mazak Corp レーザ加工機における集光レンズの汚れ検出方法及び装置
ATE418143T1 (de) * 2005-04-19 2009-01-15 Koninkl Philips Electronics Nv Vorrichtung zur strahlungslenkung auf eine schicht, gerät mit einer derartigen vorrichtung und verfahren unter verwendung eines derartigen geräts
EP2465877A1 (de) 2010-12-20 2012-06-20 Ineos Commercial Services UK Limited Verfahren
US10290118B2 (en) 2015-08-06 2019-05-14 Cognex Corporation System and method for tying together machine vision coordinate spaces in a guided assembly environment
CN108602159B (zh) * 2016-01-28 2020-09-29 浜松光子学株式会社 激光加工装置及激光输出装置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4573467A (en) * 1983-05-13 1986-03-04 The United States Of America As Represented By The Department Of Health And Human Services Optical coupling device for biomicroscope
US4611115A (en) * 1985-01-14 1986-09-09 Richland Glass Company, Inc. Laser etch monitoring system
US4769523A (en) * 1985-03-08 1988-09-06 Nippon Kogaku K.K. Laser processing apparatus
US5382770A (en) * 1993-01-14 1995-01-17 Reliant Laser Corporation Mirror-based laser-processing system with visual tracking and position control of a moving laser spot
US5609780A (en) * 1994-11-14 1997-03-11 International Business Machines, Corporation Laser system
JP3162254B2 (ja) * 1995-01-17 2001-04-25 三菱電機株式会社 レーザ加工装置
US6040550A (en) * 1996-10-28 2000-03-21 Chang; Dale U. Apparatus and method for laser welding the outer joints of metal bellows

Also Published As

Publication number Publication date
NL1007068C2 (nl) 1999-03-22
EP1015164B1 (de) 2003-06-18
EP1015164A1 (de) 2000-07-05
JP2001516647A (ja) 2001-10-02
DE69815699D1 (de) 2003-07-24
WO1999014009A1 (en) 1999-03-25
US6437287B1 (en) 2002-08-20
DE69815699T2 (de) 2004-04-29

Similar Documents

Publication Publication Date Title
ES2129051T3 (es) Opticas para camara.
EP1078710A3 (de) Verfahren und Vorrichtung zum Erfassen der Lage des Fokuspunktes eines Lasers
EP0874283A3 (de) Optischer Belichtungsapparat und optisches Reinigungsverfahren
ATE163476T1 (de) Verfahren und vorrichtung zur messung der abmessung eines objekts
EA200100669A1 (ru) Устройство и способ оптического воспроизведения изображения особенностей на поверхности руки
KR970069226A (ko) 레이저 가공 장치
ATE337604T1 (de) Vorrichtung zur fokussierung von röntgenstrahlen
CA2055899A1 (en) Laser process apparatus
EP0840107A3 (de) Vorrichtung und Verfahren zur Bildaufnahme und Bildverarbeitung
SE9901881D0 (sv) A device and a method for an infrared image analysing autofocus
WO1998044718A3 (en) High-precision-resolution image acquisision apparatus and method
WO1999062263A8 (en) Miniature inspection system
EP0671238A4 (de) Lasermarkierungsgerät.
ES2079792T3 (es) Sistema de formacion termica de imagen.
EP1045329A3 (de) Optische Vorrichtung mit einer von der optischen Achse verschobenen Linse
BR9403255A (pt) Aparelho para formação de uma imagem
DE3674206D1 (de) Vermessungssystem und vermessungsverfahren.
ATE243088T1 (de) Laserbearbeitungsvorrichtung
JPS55130512A (en) Semiconductor laser optical system
DE59204161D1 (de) Laseroptik.
WO2003068051A3 (en) Flexible scanning beam imaging system
ATE246367T1 (de) Laser-generatorsystem
WO2001065837A3 (de) Verfahren und vorrichtung zum justieren einer kamera
ATE320019T1 (de) Verwendung einer vorrichtung zur aufnahme stereoskopischer bilder
DE60123568D1 (de) Verwendung von Verzerrungsoptiken in Bilderzeugungssystemen

Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties