NL1007068C2 - Laserbewerkingsapparaat. - Google Patents

Laserbewerkingsapparaat. Download PDF

Info

Publication number
NL1007068C2
NL1007068C2 NL1007068A NL1007068A NL1007068C2 NL 1007068 C2 NL1007068 C2 NL 1007068C2 NL 1007068 A NL1007068 A NL 1007068A NL 1007068 A NL1007068 A NL 1007068A NL 1007068 C2 NL1007068 C2 NL 1007068C2
Authority
NL
Netherlands
Prior art keywords
laser
head housing
optics
head
optical path
Prior art date
Application number
NL1007068A
Other languages
English (en)
Dutch (nl)
Inventor
Herman Leonard Offerhaus
Richard Antonius Kleijhorst
Original Assignee
Nl Laser Res
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nl Laser Res filed Critical Nl Laser Res
Priority to NL1007068A priority Critical patent/NL1007068C2/nl
Priority to PCT/NL1998/000543 priority patent/WO1999014009A1/en
Priority to DE69815699T priority patent/DE69815699T2/de
Priority to US09/486,912 priority patent/US6437287B1/en
Priority to AT98944342T priority patent/ATE243088T1/de
Priority to JP2000511607A priority patent/JP2001516647A/ja
Priority to EP98944342A priority patent/EP1015164B1/de
Application granted granted Critical
Publication of NL1007068C2 publication Critical patent/NL1007068C2/nl

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/0665—Shaping the laser beam, e.g. by masks or multi-focusing by beam condensation on the workpiece, e.g. for focusing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/03—Observing, e.g. monitoring, the workpiece
    • B23K26/032—Observing, e.g. monitoring, the workpiece using optical means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
    • B23K26/0622—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses
    • B23K26/0624—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses using ultrashort pulses, i.e. pulses of 1 ns or less
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0643—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising mirrors

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)
  • Laser Surgery Devices (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
NL1007068A 1997-09-18 1997-09-18 Laserbewerkingsapparaat. NL1007068C2 (nl)

Priority Applications (7)

Application Number Priority Date Filing Date Title
NL1007068A NL1007068C2 (nl) 1997-09-18 1997-09-18 Laserbewerkingsapparaat.
PCT/NL1998/000543 WO1999014009A1 (en) 1997-09-18 1998-09-18 Laser processing device
DE69815699T DE69815699T2 (de) 1997-09-18 1998-09-18 Laserbearbeitungsvorrichtung
US09/486,912 US6437287B1 (en) 1997-09-18 1998-09-18 Laser processing device
AT98944342T ATE243088T1 (de) 1997-09-18 1998-09-18 Laserbearbeitungsvorrichtung
JP2000511607A JP2001516647A (ja) 1997-09-18 1998-09-18 レーザ加工装置
EP98944342A EP1015164B1 (de) 1997-09-18 1998-09-18 Laserbearbeitungsvorrichtung

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
NL1007068 1997-09-18
NL1007068A NL1007068C2 (nl) 1997-09-18 1997-09-18 Laserbewerkingsapparaat.

Publications (1)

Publication Number Publication Date
NL1007068C2 true NL1007068C2 (nl) 1999-03-22

Family

ID=19765699

Family Applications (1)

Application Number Title Priority Date Filing Date
NL1007068A NL1007068C2 (nl) 1997-09-18 1997-09-18 Laserbewerkingsapparaat.

Country Status (7)

Country Link
US (1) US6437287B1 (de)
EP (1) EP1015164B1 (de)
JP (1) JP2001516647A (de)
AT (1) ATE243088T1 (de)
DE (1) DE69815699T2 (de)
NL (1) NL1007068C2 (de)
WO (1) WO1999014009A1 (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7119351B2 (en) * 2002-05-17 2006-10-10 Gsi Group Corporation Method and system for machine vision-based feature detection and mark verification in a workpiece or wafer marking system
JP2005125339A (ja) * 2003-10-21 2005-05-19 Hitachi Via Mechanics Ltd レーザ加工装置
CN100352593C (zh) * 2004-06-02 2007-12-05 上海大众汽车有限公司 激光器的对焦设备
JP2006167728A (ja) * 2004-12-13 2006-06-29 Yamazaki Mazak Corp レーザ加工機における集光レンズの汚れ検出方法及び装置
ATE418143T1 (de) * 2005-04-19 2009-01-15 Koninkl Philips Electronics Nv Vorrichtung zur strahlungslenkung auf eine schicht, gerät mit einer derartigen vorrichtung und verfahren unter verwendung eines derartigen geräts
EP2465877A1 (de) 2010-12-20 2012-06-20 Ineos Commercial Services UK Limited Verfahren
US10290118B2 (en) 2015-08-06 2019-05-14 Cognex Corporation System and method for tying together machine vision coordinate spaces in a guided assembly environment
DE112017000576T5 (de) * 2016-01-28 2018-10-31 Hamamatsu Photonics K.K. Laserbearbeitungsvorrichtung und laserausgabevorrichtung

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4573467A (en) * 1983-05-13 1986-03-04 The United States Of America As Represented By The Department Of Health And Human Services Optical coupling device for biomicroscope

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4611115A (en) * 1985-01-14 1986-09-09 Richland Glass Company, Inc. Laser etch monitoring system
US4769523A (en) * 1985-03-08 1988-09-06 Nippon Kogaku K.K. Laser processing apparatus
US5382770A (en) * 1993-01-14 1995-01-17 Reliant Laser Corporation Mirror-based laser-processing system with visual tracking and position control of a moving laser spot
US5609780A (en) * 1994-11-14 1997-03-11 International Business Machines, Corporation Laser system
JP3162254B2 (ja) * 1995-01-17 2001-04-25 三菱電機株式会社 レーザ加工装置
US6040550A (en) * 1996-10-28 2000-03-21 Chang; Dale U. Apparatus and method for laser welding the outer joints of metal bellows

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4573467A (en) * 1983-05-13 1986-03-04 The United States Of America As Represented By The Department Of Health And Human Services Optical coupling device for biomicroscope

Also Published As

Publication number Publication date
EP1015164A1 (de) 2000-07-05
EP1015164B1 (de) 2003-06-18
US6437287B1 (en) 2002-08-20
ATE243088T1 (de) 2003-07-15
DE69815699T2 (de) 2004-04-29
JP2001516647A (ja) 2001-10-02
WO1999014009A1 (en) 1999-03-25
DE69815699D1 (de) 2003-07-24

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Effective date: 20090401