ATE243719T1 - Verfahren zur herstellung von norbornensulfonamidpolymeren - Google Patents

Verfahren zur herstellung von norbornensulfonamidpolymeren

Info

Publication number
ATE243719T1
ATE243719T1 AT00905995T AT00905995T ATE243719T1 AT E243719 T1 ATE243719 T1 AT E243719T1 AT 00905995 T AT00905995 T AT 00905995T AT 00905995 T AT00905995 T AT 00905995T AT E243719 T1 ATE243719 T1 AT E243719T1
Authority
AT
Austria
Prior art keywords
polymers
norbornene
norbornenesulfonamide
producing
romp
Prior art date
Application number
AT00905995T
Other languages
English (en)
Inventor
Saikumar Jayaraman
Richard Vicari
Larry F Rhodes
Original Assignee
Sumitomo Bakelite Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Bakelite Co filed Critical Sumitomo Bakelite Co
Application granted granted Critical
Publication of ATE243719T1 publication Critical patent/ATE243719T1/de

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G61/00Macromolecular compounds obtained by reactions forming a carbon-to-carbon link in the main chain of the macromolecule
    • C08G61/02Macromolecular compounds containing only carbon atoms in the main chain of the macromolecule, e.g. polyxylylenes
    • C08G61/04Macromolecular compounds containing only carbon atoms in the main chain of the macromolecule, e.g. polyxylylenes only aliphatic carbon atoms
    • C08G61/06Macromolecular compounds containing only carbon atoms in the main chain of the macromolecule, e.g. polyxylylenes only aliphatic carbon atoms prepared by ring-opening of carbocyclic compounds
    • C08G61/08Macromolecular compounds containing only carbon atoms in the main chain of the macromolecule, e.g. polyxylylenes only aliphatic carbon atoms prepared by ring-opening of carbocyclic compounds of carbocyclic compounds containing one or more carbon-to-carbon double bonds in the ring
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G61/00Macromolecular compounds obtained by reactions forming a carbon-to-carbon link in the main chain of the macromolecule
    • C08G61/02Macromolecular compounds containing only carbon atoms in the main chain of the macromolecule, e.g. polyxylylenes
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G61/00Macromolecular compounds obtained by reactions forming a carbon-to-carbon link in the main chain of the macromolecule

Landscapes

  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Organic Chemistry (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
  • Polyoxymethylene Polymers And Polymers With Carbon-To-Carbon Bonds (AREA)
  • Polyethers (AREA)
  • Polymers With Sulfur, Phosphorus Or Metals In The Main Chain (AREA)
AT00905995T 1999-02-05 2000-02-04 Verfahren zur herstellung von norbornensulfonamidpolymeren ATE243719T1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US11893699P 1999-02-05 1999-02-05
US09/497,356 US6235849B1 (en) 1999-02-05 2000-02-03 Method of preparing norbornene sulfonamide polymers
PCT/US2000/003060 WO2000046267A1 (en) 1999-02-05 2000-02-04 Method of preparing norbornene sulfonamide polymers

Publications (1)

Publication Number Publication Date
ATE243719T1 true ATE243719T1 (de) 2003-07-15

Family

ID=22381647

Family Applications (1)

Application Number Title Priority Date Filing Date
AT00905995T ATE243719T1 (de) 1999-02-05 2000-02-04 Verfahren zur herstellung von norbornensulfonamidpolymeren

Country Status (8)

Country Link
US (1) US6235849B1 (de)
EP (1) EP1157058B1 (de)
JP (1) JP2003525311A (de)
KR (1) KR100687963B1 (de)
AT (1) ATE243719T1 (de)
AU (1) AU2757300A (de)
DE (1) DE60003529T2 (de)
WO (1) WO2000046267A1 (de)

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BR0114663A (pt) 2000-10-12 2004-01-13 Dow Global Technologies Inc Sistema catalisador para polibutadieno de alto teor de cis
KR20020056602A (ko) * 2000-12-29 2002-07-10 노기호 황을 포함하는 고리형 올레핀 공중합체 및 그의 제조방법
JP5013033B2 (ja) * 2001-07-27 2012-08-29 Jsr株式会社 環状オレフィン付加重合体の製造方法
JP4941621B2 (ja) * 2001-07-27 2012-05-30 Jsr株式会社 環状オレフィン付加重合体の製造方法
US6583307B2 (en) * 2001-03-07 2003-06-24 University Of New Orleans Research And Technology Foundation, Inc. Convenient and efficient Suzuki-Miyaura cross-coupling catalyzed by a palladium/diazabutadiene system
AU2003287194A1 (en) 2002-10-21 2004-05-13 Shipley Company L.L.C. Photoresists containing sulfonamide component
US6677419B1 (en) 2002-11-13 2004-01-13 International Business Machines Corporation Preparation of copolymers
US8722828B2 (en) * 2003-01-31 2014-05-13 Zeon Corporation Process for continuous production of cycloolefin resins, and sheets or films thereof, using ring opening metathesis polymerization
US6949325B2 (en) * 2003-09-16 2005-09-27 International Business Machines Corporation Negative resist composition with fluorosulfonamide-containing polymer
JP2005171234A (ja) * 2003-11-18 2005-06-30 Jsr Corp 新規な(共)重合体およびその製造方法並びにカルボキシル基含有(共)重合体の製造方法
US7063931B2 (en) * 2004-01-08 2006-06-20 International Business Machines Corporation Positive photoresist composition with a polymer including a fluorosulfonamide group and process for its use
CA2462011A1 (en) * 2004-02-23 2005-08-23 Bayer Inc. Process for the preparation of low molecular weight nitrile rubber
WO2006017035A1 (en) * 2004-07-07 2006-02-16 Promerus Llc Photosensitive dielectric resin compositions and their uses
JP4494161B2 (ja) * 2004-10-14 2010-06-30 東京応化工業株式会社 高分子化合物、ポジ型レジスト組成物およびレジストパターン形成方法
EP1826221A4 (de) * 2004-12-15 2008-03-05 Univ Nihon Verfahren zur herstellung von (co)polymerisat auf basis von norbornen
US7799883B2 (en) * 2005-02-22 2010-09-21 Promerus Llc Norbornene-type polymers, compositions thereof and lithographic process using such compositions
US20060235174A1 (en) * 2005-02-22 2006-10-19 Promerus Llc Norbornene-type polymers, compositions thereof and lithographic processes using such compositions
JP4887710B2 (ja) * 2005-09-28 2012-02-29 セントラル硝子株式会社 α−置換アクリル酸ノルボルナニル類の製造方法
CN100344656C (zh) * 2006-05-11 2007-10-24 复旦大学 聚降冰片烯的制备方法
JP5076682B2 (ja) * 2006-07-26 2012-11-21 セントラル硝子株式会社 N−(ビシクロ[2,2,1]ヘプト−5−エン−2−イルメチル)−1,1,1−トリフルオロメタンスルホンアミドの製造方法
US20080027246A1 (en) * 2006-07-26 2008-01-31 Andrew Bell Process for forming perfluorinated-alkyl sulfonamide substituted norbornene-type monomers
WO2008099725A1 (ja) * 2007-02-15 2008-08-21 Tokyo Ohka Kogyo Co., Ltd. 高分子化合物、レジスト組成物及びレジストパターン形成方法
JP5314882B2 (ja) 2007-02-15 2013-10-16 東京応化工業株式会社 高分子化合物、レジスト組成物及びレジストパターン形成方法
JP5236246B2 (ja) * 2007-10-18 2013-07-17 株式会社クラレ スルホニルハライド誘導体の製造方法
US8367849B2 (en) * 2008-09-02 2013-02-05 Kuraray Co., Ltd. Production method for sultone derivatives
JP5117484B2 (ja) * 2009-12-28 2013-01-16 東京応化工業株式会社 新規な化合物、及びその製造方法
US8541523B2 (en) * 2010-04-05 2013-09-24 Promerus, Llc Norbornene-type polymers, compositions thereof and lithographic process using such compositions
CN102702432B (zh) * 2012-05-30 2014-06-18 宁波工程学院 用于降冰片烯、马来酸酐与环己烯三元共聚的催化剂以及三元共聚方法
CN105218821A (zh) * 2015-10-19 2016-01-06 昆明理工大学 一种聚合单体与二氧化硫共聚物的制备方法

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US3970133A (en) * 1974-12-16 1976-07-20 The Goodyear Tire & Rubber Company Chlorothio-sulfonamide-modified rubbery terpolymers and their blends
DE3720760A1 (de) 1987-06-24 1989-01-05 Bayer Ag Norbornan- und norbornensulfonamide, verfahren zu deren herstellung sowie ihre verwendung als arzneimittel
JP3221636B2 (ja) * 1993-03-15 2001-10-22 株式会社クラレ 3−フェニルスルホニルアミノ−ビシクロ[2,2,1]ヘプタン−2−カルボン酸アルキルエステルの製造方法
US5656412A (en) * 1995-03-07 1997-08-12 Lucent Technologies Inc. Energy-sensitive resist material and a process for device fabrication using an energy-sensitive resist material
CA2154862A1 (en) * 1995-03-20 1996-09-21 Roger John Hopper Process for preparation of n-halothiosulfonamide modified terpolymers
JPH09124588A (ja) * 1995-11-07 1997-05-13 Mitsubishi Materials Corp 不飽和スルホン酸誘導体とその製造方法
KR100536824B1 (ko) 1996-03-07 2006-03-09 스미토모 베이클라이트 가부시키가이샤 산불안정성펜던트기를지닌다중고리중합체를포함하는포토레지스트조성물
JPH11184090A (ja) * 1997-10-13 1999-07-09 Fuji Photo Film Co Ltd 遠紫外線露光用ポジ型フォトレジスト組成物
JP3720970B2 (ja) * 1998-01-13 2005-11-30 株式会社東芝 感光性組成物、およびこれを用いたパターン形成方法、半導体装置の製造方法

Also Published As

Publication number Publication date
KR100687963B1 (ko) 2007-02-27
AU2757300A (en) 2000-08-25
EP1157058A1 (de) 2001-11-28
KR20010089637A (ko) 2001-10-06
EP1157058B1 (de) 2003-06-25
US6235849B1 (en) 2001-05-22
WO2000046267A1 (en) 2000-08-10
DE60003529D1 (de) 2003-07-31
JP2003525311A (ja) 2003-08-26
DE60003529T2 (de) 2004-04-29

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