ATE248350T1 - Mikrogefertigter beschleunigungs-und koriolissensor - Google Patents

Mikrogefertigter beschleunigungs-und koriolissensor

Info

Publication number
ATE248350T1
ATE248350T1 AT96912993T AT96912993T ATE248350T1 AT E248350 T1 ATE248350 T1 AT E248350T1 AT 96912993 T AT96912993 T AT 96912993T AT 96912993 T AT96912993 T AT 96912993T AT E248350 T1 ATE248350 T1 AT E248350T1
Authority
AT
Austria
Prior art keywords
sensor
mac
micromachined
proof mass
linear
Prior art date
Application number
AT96912993T
Other languages
English (en)
Inventor
Terry V Roszhart
Original Assignee
Kearfott Guidance & Navigation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kearfott Guidance & Navigation filed Critical Kearfott Guidance & Navigation
Application granted granted Critical
Publication of ATE248350T1 publication Critical patent/ATE248350T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
    • G01C19/5656—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams the devices involving a micromechanical structure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/097—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
  • Pressure Sensors (AREA)
  • Micromachines (AREA)
AT96912993T 1995-04-24 1996-04-23 Mikrogefertigter beschleunigungs-und koriolissensor ATE248350T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/427,449 US5656778A (en) 1995-04-24 1995-04-24 Micromachined acceleration and coriolis sensor
PCT/US1996/005547 WO1996034255A1 (en) 1995-04-24 1996-04-23 Micromachined acceleration and coriolis sensor

Publications (1)

Publication Number Publication Date
ATE248350T1 true ATE248350T1 (de) 2003-09-15

Family

ID=23694920

Family Applications (1)

Application Number Title Priority Date Filing Date
AT96912993T ATE248350T1 (de) 1995-04-24 1996-04-23 Mikrogefertigter beschleunigungs-und koriolissensor

Country Status (6)

Country Link
US (1) US5656778A (de)
EP (1) EP0823039B1 (de)
JP (1) JPH11504426A (de)
AT (1) ATE248350T1 (de)
DE (1) DE69629676T2 (de)
WO (1) WO1996034255A1 (de)

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US9278845B2 (en) 2010-09-18 2016-03-08 Fairchild Semiconductor Corporation MEMS multi-axis gyroscope Z-axis electrode structure
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US8567246B2 (en) 2010-10-12 2013-10-29 Invensense, Inc. Integrated MEMS device and method of use
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US9664750B2 (en) 2011-01-11 2017-05-30 Invensense, Inc. In-plane sensing Lorentz force magnetometer
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US9488693B2 (en) 2012-04-04 2016-11-08 Fairchild Semiconductor Corporation Self test of MEMS accelerometer with ASICS integrated capacitors
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Also Published As

Publication number Publication date
DE69629676T2 (de) 2004-06-17
EP0823039A1 (de) 1998-02-11
WO1996034255A1 (en) 1996-10-31
EP0823039A4 (de) 1999-05-12
EP0823039B1 (de) 2003-08-27
US5656778A (en) 1997-08-12
JPH11504426A (ja) 1999-04-20
DE69629676D1 (de) 2003-10-02

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